DE69710324T2 - Diamantaehnliche nanokomposit-zusammensetzungen - Google Patents

Diamantaehnliche nanokomposit-zusammensetzungen

Info

Publication number
DE69710324T2
DE69710324T2 DE69710324T DE69710324T DE69710324T2 DE 69710324 T2 DE69710324 T2 DE 69710324T2 DE 69710324 T DE69710324 T DE 69710324T DE 69710324 T DE69710324 T DE 69710324T DE 69710324 T2 DE69710324 T2 DE 69710324T2
Authority
DE
Germany
Prior art keywords
diamond
nanocomposite compositions
nanocomposite
compositions
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69710324T
Other languages
English (en)
Other versions
DE69710324D1 (de
Inventor
Dominique Neerinck
Arvind Goel
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Bekaert NV SA
Original Assignee
Bekaert NV SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Bekaert NV SA filed Critical Bekaert NV SA
Application granted granted Critical
Publication of DE69710324D1 publication Critical patent/DE69710324D1/de
Publication of DE69710324T2 publication Critical patent/DE69710324T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/50—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges
    • C23C16/503—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges using dc or ac discharges
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C30/00—Coating with metallic material characterised only by the composition of the metallic material, i.e. not characterised by the coating process
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C2206/00—Materials with ceramics, cermets, hard carbon or similar non-metallic hard materials as main constituents
    • F16C2206/02—Carbon based material
    • F16C2206/04—Diamond like carbon [DLC]
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C2240/00—Specified values or numerical ranges of parameters; Relations between them
    • F16C2240/40—Linear dimensions, e.g. length, radius, thickness, gap
    • F16C2240/60—Thickness, e.g. thickness of coatings
    • F16C2240/64—Thickness, e.g. thickness of coatings in the nanometer range
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/26—Web or sheet containing structurally defined element or component, the element or component having a specified physical dimension
    • Y10T428/263—Coating layer not in excess of 5 mils thick or equivalent
    • Y10T428/264—Up to 3 mils
    • Y10T428/265—1 mil or less
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/30—Self-sustaining carbon mass or layer with impregnant or other layer

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Inorganic Chemistry (AREA)
  • Chemical Vapour Deposition (AREA)
  • Physical Vapour Deposition (AREA)
DE69710324T 1996-04-22 1997-04-11 Diamantaehnliche nanokomposit-zusammensetzungen Expired - Lifetime DE69710324T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
EP96201070 1996-04-22
PCT/EP1997/001878 WO1997040207A1 (en) 1996-04-22 1997-04-11 Diamond-like nanocomposite compositions

Publications (2)

Publication Number Publication Date
DE69710324D1 DE69710324D1 (de) 2002-03-21
DE69710324T2 true DE69710324T2 (de) 2002-08-29

Family

ID=8223897

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69710324T Expired - Lifetime DE69710324T2 (de) 1996-04-22 1997-04-11 Diamantaehnliche nanokomposit-zusammensetzungen

Country Status (7)

Country Link
US (1) US6200675B1 (de)
EP (1) EP0896640B1 (de)
JP (1) JP4439594B2 (de)
AU (1) AU2697797A (de)
DE (1) DE69710324T2 (de)
TW (1) TW420724B (de)
WO (1) WO1997040207A1 (de)

Families Citing this family (56)

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ATE211510T1 (de) 1997-02-04 2002-01-15 Bekaert Sa Nv Beschichtung enthaltend filme aus diamantartigem kohlenstoff und diamantartigem nanokomposit
EP0885983A1 (de) 1997-06-19 1998-12-23 N.V. Bekaert S.A. Verfahren zur Beschichtung eines Substrates mit einer diamantartigen Nanocomposit-Zusammensetzung
DE69913342T2 (de) 1998-06-03 2004-10-28 Blue Medical Devices B.V. Stents mit diamantartiger beschichtung
EP1123991A3 (de) 2000-02-08 2002-11-13 Asm Japan K.K. Materialen mit niedrieger Dielektrizitätskonstante und Verfahren
US6749813B1 (en) 2000-03-05 2004-06-15 3M Innovative Properties Company Fluid handling devices with diamond-like films
US6795636B1 (en) 2000-03-05 2004-09-21 3M Innovative Properties Company Radiation-transmissive films on glass articles
US6696157B1 (en) * 2000-03-05 2004-02-24 3M Innovative Properties Company Diamond-like glass thin films
US6669996B2 (en) * 2000-07-06 2003-12-30 University Of Louisville Method of synthesizing metal doped diamond-like carbon films
WO2002009791A1 (en) * 2000-07-28 2002-02-07 Blue Medical Devices B.V. Intravascular stent with expandable coating
US6905981B1 (en) 2000-11-24 2005-06-14 Asm Japan K.K. Low-k dielectric materials and processes
US7106939B2 (en) 2001-09-19 2006-09-12 3M Innovative Properties Company Optical and optoelectronic articles
US6895855B2 (en) 2001-10-01 2005-05-24 The Timken Company Hydraulic motors and pumps with engineered surfaces
WO2004090361A2 (en) * 2003-04-03 2004-10-21 The Timken Company Corrosion tolerant rolling element bearing
EP1666573B1 (de) * 2003-08-06 2019-05-15 Nissan Motor Company Limited Reibungsarmer gleitmechanismus und reibungsverringerungsverfahren
AU2003298338A1 (en) * 2003-12-02 2005-06-24 N.V. Bekaert S.A. A layered structure
US7824498B2 (en) * 2004-02-24 2010-11-02 Applied Materials, Inc. Coating for reducing contamination of substrates during processing
JP2005314454A (ja) * 2004-04-27 2005-11-10 Toyota Central Res & Dev Lab Inc 低摩擦摺動部材
US7296965B2 (en) 2004-08-23 2007-11-20 United Technologies Corporation Cryogenic bearings
JP2006138404A (ja) * 2004-11-12 2006-06-01 Kobe Steel Ltd 水系環境下での耐摩耗性に優れた摺動部材
EP1726682A1 (de) * 2005-05-26 2006-11-29 NV Bekaert SA Beschichtung, die Filme aus diamantartigem Kohlenstoff und diamantartigem Nanokomposit enthält
WO2006134066A1 (en) * 2005-06-13 2006-12-21 Nv Bekaert Sa Coated spinning ring
US20070020451A1 (en) * 2005-07-20 2007-01-25 3M Innovative Properties Company Moisture barrier coatings
CA2652586C (en) 2006-05-17 2015-07-07 G & H Technologies Llc Wear resistant coating
US20080006819A1 (en) * 2006-06-19 2008-01-10 3M Innovative Properties Company Moisture barrier coatings for organic light emitting diode devices
US8047653B2 (en) 2006-11-10 2011-11-01 Sumitomo Electric Industries, Ltd. Si-O containing hydrogenated carbon film, optical device including the same, and method for manufacturing the Si-O containing hydrogenated carbon film and the optical device
CN101983116B (zh) * 2007-08-23 2012-10-24 圣戈班磨料磨具有限公司 用于下一代氧化物/金属cmp的优化的cmp修整器设计
JP5090389B2 (ja) * 2009-02-26 2012-12-05 オーエスジー株式会社 Ｄｌｃコーティングルアー
CN102341215B (zh) 2009-03-24 2014-06-18 圣戈班磨料磨具有限公司 用作化学机械平坦化垫修整器的研磨工具
CN102459693B (zh) * 2009-05-13 2015-11-25 Sio2医药产品公司 使用有机硅前体的pecvd涂层
US9545360B2 (en) 2009-05-13 2017-01-17 Sio2 Medical Products, Inc. Saccharide protective coating for pharmaceutical package
PL2251454T3 (pl) 2009-05-13 2014-12-31 Sio2 Medical Products Inc Powlekanie i kontrola pojemnika
US7985188B2 (en) 2009-05-13 2011-07-26 Cv Holdings Llc Vessel, coating, inspection and processing apparatus
KR101823159B1 (ko) 2009-05-13 2018-01-29 에스아이오2 메디컬 프로덕츠, 인크. 유기실리콘 전구체를 이용한 ｐｅｃｖｄ 코팅
CN102484054A (zh) * 2009-06-02 2012-05-30 圣戈班磨料磨具有限公司 耐腐蚀性cmp修整工件及其制造和使用方法
US9458536B2 (en) 2009-07-02 2016-10-04 Sio2 Medical Products, Inc. PECVD coating methods for capped syringes, cartridges and other articles
US8951099B2 (en) 2009-09-01 2015-02-10 Saint-Gobain Abrasives, Inc. Chemical mechanical polishing conditioner
TWI466782B (zh) 2010-03-03 2015-01-01 Taiyo Chemical Industry Co Ltd To an immobilization method and a layered product comprising a layer of an amorphous carbon film
US11624115B2 (en) 2010-05-12 2023-04-11 Sio2 Medical Products, Inc. Syringe with PECVD lubrication
US9878101B2 (en) 2010-11-12 2018-01-30 Sio2 Medical Products, Inc. Cyclic olefin polymer vessels and vessel coating methods
US9272095B2 (en) 2011-04-01 2016-03-01 Sio2 Medical Products, Inc. Vessels, contact surfaces, and coating and inspection apparatus and methods
US11116695B2 (en) 2011-11-11 2021-09-14 Sio2 Medical Products, Inc. Blood sample collection tube
EP2776603B1 (de) 2011-11-11 2019-03-06 SiO2 Medical Products, Inc. Passivierungs-, ph-schutz- oder schmierbeschichtung für arzneimittelverpackung, beschichtungsverfahren und vorrichtung
KR101439131B1 (ko) * 2012-09-21 2014-09-11 현대자동차주식회사 흡배기 밸브용 코팅재 및 이의 제조방법
CN104854257B (zh) 2012-11-01 2018-04-13 Sio2医药产品公司 涂层检查方法
US9903782B2 (en) 2012-11-16 2018-02-27 Sio2 Medical Products, Inc. Method and apparatus for detecting rapid barrier coating integrity characteristics
EP2925903B1 (de) 2012-11-30 2022-04-13 Si02 Medical Products, Inc. Steuerung der gleichförmigkeit der pecvg-ablagerung auf medizinischen spritzen, kartuschen und dergleichen
US9764093B2 (en) 2012-11-30 2017-09-19 Sio2 Medical Products, Inc. Controlling the uniformity of PECVD deposition
US9662450B2 (en) 2013-03-01 2017-05-30 Sio2 Medical Products, Inc. Plasma or CVD pre-treatment for lubricated pharmaceutical package, coating process and apparatus
US9937099B2 (en) 2013-03-11 2018-04-10 Sio2 Medical Products, Inc. Trilayer coated pharmaceutical packaging with low oxygen transmission rate
KR102336796B1 (ko) 2013-03-11 2021-12-10 에스아이오2 메디컬 프로덕츠, 인크. 코팅된 패키징
WO2014144926A1 (en) 2013-03-15 2014-09-18 Sio2 Medical Products, Inc. Coating method
US20160281216A1 (en) * 2013-03-19 2016-09-29 Taiyo Yuden Chemical Technology Co., Ltd. Structure having stain-proofing amorphous carbon film and method of forming stain-proofing amorphous carbon film
JP6043233B2 (ja) * 2013-04-15 2016-12-14 株式会社神戸製鋼所 非晶質炭素系皮膜およびその製造方法
EP3122917B1 (de) 2014-03-28 2020-05-06 SiO2 Medical Products, Inc. Antistatische beschichtungen für kunststoffbehälter
JP2018523538A (ja) 2015-08-18 2018-08-23 エスアイオーツー・メディカル・プロダクツ・インコーポレイテッド 低酸素透過速度を有する薬剤包装及び他の包装
US11639543B2 (en) 2019-05-22 2023-05-02 Thin Film Service, Inc. Tetrahedral amorphous hydrogenated carbon and amorphous siloxane diamond-like nanocomposite

Family Cites Families (1)

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Publication number Priority date Publication date Assignee Title
US5352493A (en) * 1991-05-03 1994-10-04 Veniamin Dorfman Method for forming diamond-like nanocomposite or doped-diamond-like nanocomposite films

Also Published As

Publication number Publication date
EP0896640B1 (de) 2002-02-06
JP2000508713A (ja) 2000-07-11
WO1997040207A1 (en) 1997-10-30
JP4439594B2 (ja) 2010-03-24
DE69710324D1 (de) 2002-03-21
EP0896640A1 (de) 1999-02-17
AU2697797A (en) 1997-11-12
TW420724B (en) 2001-02-01
US6200675B1 (en) 2001-03-13

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Legal Events

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8364 No opposition during term of opposition