JP2003515960A5 - - Google Patents

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Publication number
JP2003515960A5
JP2003515960A5 JP2001542603A JP2001542603A JP2003515960A5 JP 2003515960 A5 JP2003515960 A5 JP 2003515960A5 JP 2001542603 A JP2001542603 A JP 2001542603A JP 2001542603 A JP2001542603 A JP 2001542603A JP 2003515960 A5 JP2003515960 A5 JP 2003515960A5
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JP
Japan
Prior art keywords
upper electrode
platinum
heater
heating
electrode
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JP2001542603A
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English (en)
Japanese (ja)
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JP5054874B2 (ja
JP2003515960A (ja
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Priority claimed from PCT/US2000/031987 external-priority patent/WO2001040540A1/en
Publication of JP2003515960A publication Critical patent/JP2003515960A/ja
Publication of JP2003515960A5 publication Critical patent/JP2003515960A5/ja
Application granted granted Critical
Publication of JP5054874B2 publication Critical patent/JP5054874B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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JP2001542603A 1999-12-02 2000-11-21 リアクタ内でプラチナエッチングを行う方法 Expired - Fee Related JP5054874B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US45384299A 1999-12-02 1999-12-02
US09/453,842 1999-12-02
PCT/US2000/031987 WO2001040540A1 (en) 1999-12-02 2000-11-21 Improved reactor with heated and textured electrodes and surfaces

Publications (3)

Publication Number Publication Date
JP2003515960A JP2003515960A (ja) 2003-05-07
JP2003515960A5 true JP2003515960A5 (https=) 2008-02-07
JP5054874B2 JP5054874B2 (ja) 2012-10-24

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Family Applications (1)

Application Number Title Priority Date Filing Date
JP2001542603A Expired - Fee Related JP5054874B2 (ja) 1999-12-02 2000-11-21 リアクタ内でプラチナエッチングを行う方法

Country Status (5)

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US (2) US7439188B2 (https=)
EP (1) EP1252359B1 (https=)
JP (1) JP5054874B2 (https=)
AU (1) AU1786301A (https=)
WO (1) WO2001040540A1 (https=)

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