JP2003185920A5 - - Google Patents
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- Publication number
- JP2003185920A5 JP2003185920A5 JP2001384465A JP2001384465A JP2003185920A5 JP 2003185920 A5 JP2003185920 A5 JP 2003185920A5 JP 2001384465 A JP2001384465 A JP 2001384465A JP 2001384465 A JP2001384465 A JP 2001384465A JP 2003185920 A5 JP2003185920 A5 JP 2003185920A5
- Authority
- JP
- Japan
- Prior art keywords
- optical system
- imaging optical
- imaging
- refractive
- member made
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
- 238000003384 imaging method Methods 0.000 claims 13
- 230000003287 optical effect Effects 0.000 claims 13
- 239000013078 crystal Substances 0.000 claims 4
- 239000000463 material Substances 0.000 claims 4
- 229910001637 strontium fluoride Inorganic materials 0.000 claims 4
- FVRNDBHWWSPNOM-UHFFFAOYSA-L strontium fluoride Chemical compound [F-].[F-].[Sr+2] FVRNDBHWWSPNOM-UHFFFAOYSA-L 0.000 claims 4
- 239000002178 crystalline material Substances 0.000 claims 3
- 239000000758 substrate Substances 0.000 claims 3
- 238000000034 method Methods 0.000 claims 2
- WUKWITHWXAAZEY-UHFFFAOYSA-L calcium difluoride Chemical compound [F-].[F-].[Ca+2] WUKWITHWXAAZEY-UHFFFAOYSA-L 0.000 claims 1
- 229910001634 calcium fluoride Inorganic materials 0.000 claims 1
- 230000004907 flux Effects 0.000 claims 1
Priority Applications (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2001384465A JP2003185920A (ja) | 2001-12-18 | 2001-12-18 | 結像光学系及び投影露光装置 |
| PCT/JP2002/012999 WO2003052482A1 (en) | 2001-12-18 | 2002-12-12 | Imaging optical system and projection aligner |
| AU2002354213A AU2002354213A1 (en) | 2001-12-18 | 2002-12-12 | Imaging optical system and projection aligner |
| TW091136479A TW200304548A (en) | 2001-12-18 | 2002-12-18 | Image optical system and projection aligner |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2001384465A JP2003185920A (ja) | 2001-12-18 | 2001-12-18 | 結像光学系及び投影露光装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2003185920A JP2003185920A (ja) | 2003-07-03 |
| JP2003185920A5 true JP2003185920A5 (enExample) | 2005-08-25 |
Family
ID=19187727
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2001384465A Withdrawn JP2003185920A (ja) | 2001-12-18 | 2001-12-18 | 結像光学系及び投影露光装置 |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP2003185920A (enExample) |
| AU (1) | AU2002354213A1 (enExample) |
| TW (1) | TW200304548A (enExample) |
| WO (1) | WO2003052482A1 (enExample) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE10210899A1 (de) | 2002-03-08 | 2003-09-18 | Zeiss Carl Smt Ag | Refraktives Projektionsobjektiv für Immersions-Lithographie |
| US8208198B2 (en) | 2004-01-14 | 2012-06-26 | Carl Zeiss Smt Gmbh | Catadioptric projection objective |
| US20080151365A1 (en) | 2004-01-14 | 2008-06-26 | Carl Zeiss Smt Ag | Catadioptric projection objective |
| WO2005111689A2 (en) | 2004-05-17 | 2005-11-24 | Carl Zeiss Smt Ag | Catadioptric projection objective with intermediate images |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3856265B2 (ja) * | 1998-03-12 | 2006-12-13 | 株式会社ニコン | 光学素子の製造方法、光学素子の複屈折算出方法及び複屈折判定方法 |
| KR20000034967A (ko) * | 1998-11-30 | 2000-06-26 | 헨켈 카르스텐 | 수정-렌즈를 갖는 오브젝티브 및 투사 조명 장치 |
| JP2000281493A (ja) * | 1999-03-30 | 2000-10-10 | Canon Inc | 結晶処理方法および結晶並びに光学部品及び露光装置 |
| JP3466950B2 (ja) * | 1999-03-30 | 2003-11-17 | キヤノン株式会社 | フッ化物結晶の熱処理方法及び光学部品の作製方法 |
-
2001
- 2001-12-18 JP JP2001384465A patent/JP2003185920A/ja not_active Withdrawn
-
2002
- 2002-12-12 AU AU2002354213A patent/AU2002354213A1/en not_active Abandoned
- 2002-12-12 WO PCT/JP2002/012999 patent/WO2003052482A1/ja not_active Ceased
- 2002-12-18 TW TW091136479A patent/TW200304548A/zh unknown
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