JP2002542056A - ガラス研削方法 - Google Patents
ガラス研削方法Info
- Publication number
- JP2002542056A JP2002542056A JP2000613611A JP2000613611A JP2002542056A JP 2002542056 A JP2002542056 A JP 2002542056A JP 2000613611 A JP2000613611 A JP 2000613611A JP 2000613611 A JP2000613611 A JP 2000613611A JP 2002542056 A JP2002542056 A JP 2002542056A
- Authority
- JP
- Japan
- Prior art keywords
- abrasive
- grinding
- layer
- matrix
- abrasive article
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
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- 238000007517 polishing process Methods 0.000 description 1
- 229920003192 poly(bis maleimide) Polymers 0.000 description 1
- 229920001485 poly(butyl acrylate) polymer Polymers 0.000 description 1
- 229920003229 poly(methyl methacrylate) Polymers 0.000 description 1
- 229920002492 poly(sulfone) Polymers 0.000 description 1
- 229920002647 polyamide Polymers 0.000 description 1
- 229920006122 polyamide resin Polymers 0.000 description 1
- 229920005906 polyester polyol Polymers 0.000 description 1
- 229920001225 polyester resin Polymers 0.000 description 1
- 239000004645 polyester resin Substances 0.000 description 1
- 229920000570 polyether Polymers 0.000 description 1
- 229920001601 polyetherimide Polymers 0.000 description 1
- 229920001721 polyimide Polymers 0.000 description 1
- 229920000642 polymer Polymers 0.000 description 1
- 239000002861 polymer material Substances 0.000 description 1
- 239000004926 polymethyl methacrylate Substances 0.000 description 1
- 229920006324 polyoxymethylene Polymers 0.000 description 1
- 229920002223 polystyrene Polymers 0.000 description 1
- 239000011496 polyurethane foam Substances 0.000 description 1
- 229920005749 polyurethane resin Polymers 0.000 description 1
- 229920003226 polyurethane urea Polymers 0.000 description 1
- 239000004800 polyvinyl chloride Substances 0.000 description 1
- 229920000915 polyvinyl chloride Polymers 0.000 description 1
- 239000011591 potassium Substances 0.000 description 1
- 229910052700 potassium Inorganic materials 0.000 description 1
- 239000001103 potassium chloride Substances 0.000 description 1
- 235000011164 potassium chloride Nutrition 0.000 description 1
- NNHHDJVEYQHLHG-UHFFFAOYSA-N potassium silicate Chemical compound [K+].[K+].[O-][Si]([O-])=O NNHHDJVEYQHLHG-UHFFFAOYSA-N 0.000 description 1
- 229910052913 potassium silicate Inorganic materials 0.000 description 1
- 235000019353 potassium silicate Nutrition 0.000 description 1
- 238000001556 precipitation Methods 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 239000000047 product Substances 0.000 description 1
- ZYTXEGXCQHPVKH-UHFFFAOYSA-N prop-2-enoic acid urea Chemical compound NC(N)=O.OC(=O)C=C.OC(=O)C=C ZYTXEGXCQHPVKH-UHFFFAOYSA-N 0.000 description 1
- HJWLCRVIBGQPNF-UHFFFAOYSA-N prop-2-enylbenzene Chemical compound C=CCC1=CC=CC=C1 HJWLCRVIBGQPNF-UHFFFAOYSA-N 0.000 description 1
- 238000005086 pumping Methods 0.000 description 1
- WVIICGIFSIBFOG-UHFFFAOYSA-N pyrylium Chemical class C1=CC=[O+]C=C1 WVIICGIFSIBFOG-UHFFFAOYSA-N 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 239000002964 rayon Substances 0.000 description 1
- 238000007142 ring opening reaction Methods 0.000 description 1
- 238000004439 roughness measurement Methods 0.000 description 1
- 150000003839 salts Chemical class 0.000 description 1
- 238000004062 sedimentation Methods 0.000 description 1
- 238000007493 shaping process Methods 0.000 description 1
- 238000010008 shearing Methods 0.000 description 1
- 150000004756 silanes Chemical class 0.000 description 1
- 150000004760 silicates Chemical class 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 1
- 229910010271 silicon carbide Inorganic materials 0.000 description 1
- ABTOQLMXBSRXSM-UHFFFAOYSA-N silicon tetrafluoride Chemical compound F[Si](F)(F)F ABTOQLMXBSRXSM-UHFFFAOYSA-N 0.000 description 1
- 239000013514 silicone foam Substances 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
- 239000005361 soda-lime glass Substances 0.000 description 1
- 239000000429 sodium aluminium silicate Substances 0.000 description 1
- 235000012217 sodium aluminium silicate Nutrition 0.000 description 1
- URGAHOPLAPQHLN-UHFFFAOYSA-N sodium aluminosilicate Chemical compound [Na+].[Al+3].[O-][Si]([O-])=O.[O-][Si]([O-])=O URGAHOPLAPQHLN-UHFFFAOYSA-N 0.000 description 1
- 229910000029 sodium carbonate Inorganic materials 0.000 description 1
- 239000011780 sodium chloride Substances 0.000 description 1
- NTHWMYGWWRZVTN-UHFFFAOYSA-N sodium silicate Chemical compound [Na+].[Na+].[O-][Si]([O-])=O NTHWMYGWWRZVTN-UHFFFAOYSA-N 0.000 description 1
- 229910052911 sodium silicate Inorganic materials 0.000 description 1
- 235000019794 sodium silicate Nutrition 0.000 description 1
- 229910052938 sodium sulfate Inorganic materials 0.000 description 1
- 235000011152 sodium sulphate Nutrition 0.000 description 1
- 229910001495 sodium tetrafluoroborate Inorganic materials 0.000 description 1
- VLDHWMAJBNWALQ-UHFFFAOYSA-M sodium;1,3-benzothiazol-3-ide-2-thione Chemical compound [Na+].C1=CC=C2SC([S-])=NC2=C1 VLDHWMAJBNWALQ-UHFFFAOYSA-M 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- 241000894007 species Species 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
- 238000003756 stirring Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- LSNNMFCWUKXFEE-UHFFFAOYSA-L sulfite Chemical class [O-]S([O-])=O LSNNMFCWUKXFEE-UHFFFAOYSA-L 0.000 description 1
- 229910052717 sulfur Inorganic materials 0.000 description 1
- 239000011593 sulfur Substances 0.000 description 1
- 229920003051 synthetic elastomer Polymers 0.000 description 1
- 239000005061 synthetic rubber Substances 0.000 description 1
- 239000000454 talc Substances 0.000 description 1
- 229910052623 talc Inorganic materials 0.000 description 1
- 238000010345 tape casting Methods 0.000 description 1
- MDDUHVRJJAFRAU-YZNNVMRBSA-N tert-butyl-[(1r,3s,5z)-3-[tert-butyl(dimethyl)silyl]oxy-5-(2-diphenylphosphorylethylidene)-4-methylidenecyclohexyl]oxy-dimethylsilane Chemical compound C1[C@@H](O[Si](C)(C)C(C)(C)C)C[C@H](O[Si](C)(C)C(C)(C)C)C(=C)\C1=C/CP(=O)(C=1C=CC=CC=1)C1=CC=CC=C1 MDDUHVRJJAFRAU-YZNNVMRBSA-N 0.000 description 1
- 150000003512 tertiary amines Chemical class 0.000 description 1
- 125000001302 tertiary amino group Chemical group 0.000 description 1
- 238000010998 test method Methods 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- 238000012956 testing procedure Methods 0.000 description 1
- 239000012815 thermoplastic material Substances 0.000 description 1
- YRHRIQCWCFGUEQ-UHFFFAOYSA-N thioxanthen-9-one Chemical compound C1=CC=C2C(=O)C3=CC=CC=C3SC2=C1 YRHRIQCWCFGUEQ-UHFFFAOYSA-N 0.000 description 1
- 229910001887 tin oxide Inorganic materials 0.000 description 1
- 239000004408 titanium dioxide Substances 0.000 description 1
- VZCYOOQTPOCHFL-UHFFFAOYSA-N trans-butenedioic acid Natural products OC(=O)C=CC(O)=O VZCYOOQTPOCHFL-UHFFFAOYSA-N 0.000 description 1
- 238000013519 translation Methods 0.000 description 1
- 239000012780 transparent material Substances 0.000 description 1
- 150000003918 triazines Chemical class 0.000 description 1
- UONOETXJSWQNOL-UHFFFAOYSA-N tungsten carbide Chemical compound [W+]#[C-] UONOETXJSWQNOL-UHFFFAOYSA-N 0.000 description 1
- 238000002604 ultrasonography Methods 0.000 description 1
- XSQUKJJJFZCRTK-UHFFFAOYSA-N urea group Chemical group NC(=O)N XSQUKJJJFZCRTK-UHFFFAOYSA-N 0.000 description 1
- 239000010455 vermiculite Substances 0.000 description 1
- 229910052902 vermiculite Inorganic materials 0.000 description 1
- 235000019354 vermiculite Nutrition 0.000 description 1
- 229920002554 vinyl polymer Polymers 0.000 description 1
- 235000012431 wafers Nutrition 0.000 description 1
- 238000009736 wetting Methods 0.000 description 1
- 239000002023 wood Substances 0.000 description 1
- 239000002759 woven fabric Substances 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B7/00—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor
- B24B7/20—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground
- B24B7/22—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground for grinding inorganic material, e.g. stone, ceramics, porcelain
- B24B7/24—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground for grinding inorganic material, e.g. stone, ceramics, porcelain for grinding or polishing glass
- B24B7/241—Methods
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
- B24D11/00—Constructional features of flexible abrasive materials; Special features in the manufacture of such materials
- B24D11/001—Manufacture of flexible abrasive materials
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
- B24D3/00—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents
- B24D3/02—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent
- B24D3/20—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent and being essentially organic
- B24D3/28—Resins or natural or synthetic macromolecular compounds
- B24D3/32—Resins or natural or synthetic macromolecular compounds for porous or cellular structure
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
- B24D3/00—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents
- B24D3/34—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents characterised by additives enhancing special physical properties, e.g. wear resistance, electric conductivity, self-cleaning properties
- B24D3/346—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents characterised by additives enhancing special physical properties, e.g. wear resistance, electric conductivity, self-cleaning properties utilised during polishing, or grinding operation
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Ceramic Engineering (AREA)
- Inorganic Chemistry (AREA)
- Manufacturing & Machinery (AREA)
- Polishing Bodies And Polishing Tools (AREA)
- Grinding Of Cylindrical And Plane Surfaces (AREA)
Applications Claiming Priority (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US13081399P | 1999-04-23 | 1999-04-23 | |
| US60/130,813 | 1999-04-23 | ||
| US09/553,295 | 2000-04-20 | ||
| US09/553,295 US6634929B1 (en) | 1999-04-23 | 2000-04-20 | Method for grinding glass |
| PCT/US2000/010915 WO2000064631A1 (en) | 1999-04-23 | 2000-04-21 | Method for grinding glass |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2002542056A true JP2002542056A (ja) | 2002-12-10 |
| JP2002542056A5 JP2002542056A5 (https=) | 2007-06-21 |
Family
ID=26828845
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2000613611A Pending JP2002542056A (ja) | 1999-04-23 | 2000-04-21 | ガラス研削方法 |
Country Status (7)
| Country | Link |
|---|---|
| US (1) | US6634929B1 (https=) |
| EP (1) | EP1173306B1 (https=) |
| JP (1) | JP2002542056A (https=) |
| KR (1) | KR100810205B1 (https=) |
| AU (1) | AU4484200A (https=) |
| DE (1) | DE60005168T2 (https=) |
| WO (1) | WO2000064631A1 (https=) |
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| JP2011230220A (ja) * | 2010-04-27 | 2011-11-17 | Asahi Glass Co Ltd | ガラス基板の研磨方法、及び該ガラス基板の研磨方法を用いたガラス基板の製造方法 |
| JP2012179539A (ja) * | 2011-03-01 | 2012-09-20 | Three M Innovative Properties Co | ガラス基板表面清掃装置及びガラス基板表面清掃方法 |
| JP2014018893A (ja) * | 2012-07-13 | 2014-02-03 | 3M Innovative Properties Co | 研磨パッド及びガラス、セラミックス、及び金属材料の研磨方法 |
| CN114174056A (zh) * | 2019-08-01 | 2022-03-11 | 贝恩多夫创新与技术有限公司 | 用于制造环形带的方法 |
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| KR20020086707A (ko) * | 2000-03-31 | 2002-11-18 | 램 리서치 코포레이션 | 고정연마제 선형 연마벨트 및 그것을 이용하는 시스템 |
| EP1276593B1 (en) * | 2000-04-28 | 2005-08-17 | 3M Innovative Properties Company | Abrasive article and methods for grinding glass |
| US20040180618A1 (en) * | 2001-09-03 | 2004-09-16 | Kazuo Suzuki | Sheet-form abrasive with dimples or perforations |
| JP2003071731A (ja) * | 2001-09-03 | 2003-03-12 | Three M Innovative Properties Co | ディンプル構造の研磨材料 |
| US6860795B2 (en) * | 2001-09-17 | 2005-03-01 | Hitachi Global Storage Technologies Netherlands B.V. | Edge finishing process for glass or ceramic disks used in disk drive data storage devices |
| US20040102140A1 (en) * | 2002-11-21 | 2004-05-27 | Wood Jeffrey H. | Contour following end effectors for lapping/polishing |
| US6866560B1 (en) * | 2003-01-09 | 2005-03-15 | Sandia Corporation | Method for thinning specimen |
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| US7404756B2 (en) * | 2004-10-29 | 2008-07-29 | 3M Innovative Properties Company | Process for manufacturing optical and semiconductor elements |
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| DE102005057384A1 (de) * | 2005-11-30 | 2007-05-31 | Nanogate Ag | Silikatumhüllte Teilchen in einer Metallschicht |
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| US8801497B2 (en) | 2009-04-30 | 2014-08-12 | Rdc Holdings, Llc | Array of abrasive members with resilient support |
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| US20130083457A1 (en) * | 2011-09-30 | 2013-04-04 | Apple Inc. | System and method for manufacturing a display panel or other patterned device |
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| DE69629054T2 (de) | 1996-09-11 | 2004-04-22 | Minnesota Mining And Manufacturing Company, St. Paul | Abrasiver Gegenstand und Verfahren zu seiner Herstellung. |
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| CA2281921A1 (en) | 1997-03-07 | 1998-09-11 | Minnesota Mining And Manufacturing Company | Abrasive article for providing a clear surface finish on glass |
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2000
- 2000-04-20 US US09/553,295 patent/US6634929B1/en not_active Expired - Fee Related
- 2000-04-21 KR KR1020017013463A patent/KR100810205B1/ko not_active Expired - Fee Related
- 2000-04-21 DE DE60005168T patent/DE60005168T2/de not_active Expired - Fee Related
- 2000-04-21 WO PCT/US2000/010915 patent/WO2000064631A1/en not_active Ceased
- 2000-04-21 EP EP00926285A patent/EP1173306B1/en not_active Expired - Lifetime
- 2000-04-21 JP JP2000613611A patent/JP2002542056A/ja active Pending
- 2000-04-21 AU AU44842/00A patent/AU4484200A/en not_active Abandoned
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| JPS60155361A (ja) * | 1984-01-26 | 1985-08-15 | Mitsui Mining & Smelting Co Ltd | 研削機 |
| JPH0727754U (ja) * | 1993-10-22 | 1995-05-23 | 鐘紡株式会社 | 研磨加工用装置 |
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Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2011230220A (ja) * | 2010-04-27 | 2011-11-17 | Asahi Glass Co Ltd | ガラス基板の研磨方法、及び該ガラス基板の研磨方法を用いたガラス基板の製造方法 |
| JP2012179539A (ja) * | 2011-03-01 | 2012-09-20 | Three M Innovative Properties Co | ガラス基板表面清掃装置及びガラス基板表面清掃方法 |
| JP2014018893A (ja) * | 2012-07-13 | 2014-02-03 | 3M Innovative Properties Co | 研磨パッド及びガラス、セラミックス、及び金属材料の研磨方法 |
| TWI595976B (zh) * | 2012-07-13 | 2017-08-21 | ３Ｍ新設資產公司 | 硏磨墊及硏磨玻璃，陶瓷及金屬材料之方法 |
| CN114174056A (zh) * | 2019-08-01 | 2022-03-11 | 贝恩多夫创新与技术有限公司 | 用于制造环形带的方法 |
| JP2022542661A (ja) * | 2019-08-01 | 2022-10-06 | ベルンドルフ イノベーションズ ウント テクノロジー ゲゼルシャフト ミット ベシュレンクテル ハフツング | エンドレスベルトの製造方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| EP1173306A1 (en) | 2002-01-23 |
| KR20010112447A (ko) | 2001-12-20 |
| AU4484200A (en) | 2000-11-10 |
| WO2000064631A1 (en) | 2000-11-02 |
| DE60005168T2 (de) | 2004-06-17 |
| KR100810205B1 (ko) | 2008-03-06 |
| US6634929B1 (en) | 2003-10-21 |
| EP1173306B1 (en) | 2003-09-10 |
| DE60005168D1 (de) | 2003-10-16 |
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