JP2014018893A - 研磨パッド及びガラス、セラミックス、及び金属材料の研磨方法 - Google Patents
研磨パッド及びガラス、セラミックス、及び金属材料の研磨方法 Download PDFInfo
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- JP2014018893A JP2014018893A JP2012158007A JP2012158007A JP2014018893A JP 2014018893 A JP2014018893 A JP 2014018893A JP 2012158007 A JP2012158007 A JP 2012158007A JP 2012158007 A JP2012158007 A JP 2012158007A JP 2014018893 A JP2014018893 A JP 2014018893A
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/04—Lapping machines or devices; Accessories designed for working plane surfaces
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/11—Lapping tools
- B24B37/20—Lapping pads for working plane surfaces
- B24B37/22—Lapping pads for working plane surfaces characterised by a multi-layered structure
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/11—Lapping tools
- B24B37/20—Lapping pads for working plane surfaces
- B24B37/24—Lapping pads for working plane surfaces characterised by the composition or properties of the pad materials
- B24B37/245—Pads with fixed abrasives
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/11—Lapping tools
- B24B37/20—Lapping pads for working plane surfaces
- B24B37/26—Lapping pads for working plane surfaces characterised by the shape of the lapping pad surface, e.g. grooved
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B7/00—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor
- B24B7/20—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground
- B24B7/22—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground for grinding inorganic material, e.g. stone, ceramics, porcelain
- B24B7/24—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground for grinding inorganic material, e.g. stone, ceramics, porcelain for grinding or polishing glass
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B7/00—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor
- B24B7/20—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground
- B24B7/22—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground for grinding inorganic material, e.g. stone, ceramics, porcelain
- B24B7/24—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground for grinding inorganic material, e.g. stone, ceramics, porcelain for grinding or polishing glass
- B24B7/242—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground for grinding inorganic material, e.g. stone, ceramics, porcelain for grinding or polishing glass for plate glass
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
- B24D11/00—Constructional features of flexible abrasive materials; Special features in the manufacture of such materials
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Ceramic Engineering (AREA)
- Inorganic Chemistry (AREA)
- Polishing Bodies And Polishing Tools (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
Abstract
【解決手段】ガラス、セラミックス、及び金属材料の表面研磨に用いられる研磨パッドであって、基材層と、研磨材料からなると共に基材層の一面側に設けられた研磨層と、を備え、研磨層は、基材層上に互いに離間して配列された複数の土台部と、土台部上に互いに離間して配列された柱状或いは錐台状の先端部と、土台部間に前記基材層が露出するように設けられた複数の溝部からなる溝群であって各溝が相互に交差した溝群と、を有している。
【選択図】図2
Description
Claims (8)
- ガラス、セラミックス、及び金属材料の表面研磨に用いられる研磨パッドであって、
基材層と、
研磨材料からなると共に前記基材層の一面側に設けられた研磨層と、を備え、
前記研磨層は、
前記基材層上に互いに離間して配列された複数の土台部と、
前記土台部上に互いに離間して配列された柱状或いは錐台状の先端部と、
前記土台部間に前記基材層が露出するように設けられた複数の溝部からなる溝群であって各溝が相互に交差した溝群と、を有している研磨パッド。 - 前記土台部の頂面の面積は、30mm2〜400mm2である請求項1記載の研磨パッド。
- 前記先端部間の溝部の底部は、前記土台部上でテーパ形状をなしている請求項1又は2記載の研磨パッド。
- 前記土台部間の溝部の底部は、前記基材層上でテーパ形状をなしている請求項1〜3のいずれか一項記載の研磨パッド。
- 前記基材層は、可撓性を有する材料によって形成されている請求項1〜4のいずれか一項記載の研磨パッド。
- 前記基材層の他面側に柔軟性を有する層が設けられている請求項1〜5のいずれか一項記載の研磨パッド。
- 前記先端部のアスペクト比は、0.2〜10である請求項1〜6のいずれか一項記載の研磨パッド。
- 請求項1〜7のいずれか一項記載の研磨パッドを用いたガラス、セラミックス、及び金属材料の研磨方法であって、
前記基材層の他面側を定盤に固定して前記研磨層と被研磨体とを接触させ、前記被研磨体と前記研磨層との間に研削液を導入しながら、前記研磨パッドと前記研削液とを相対的に擦り合わせる工程を含むガラス、セラミックス、及び金属材料の研磨方法。
Priority Applications (8)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2012158007A JP6188286B2 (ja) | 2012-07-13 | 2012-07-13 | 研磨パッド及びガラス、セラミックス、及び金属材料の研磨方法 |
US14/413,330 US9415480B2 (en) | 2012-07-13 | 2013-07-08 | Abrasive pad and method for abrading glass, ceramic, and metal materials |
CN201380036902.4A CN104837593B (zh) | 2012-07-13 | 2013-07-08 | 研磨垫和用于研磨玻璃、陶瓷和金属材料的方法 |
EP13816813.3A EP2872292A4 (en) | 2012-07-13 | 2013-07-08 | ABRASIVE STAMP AND METHOD OF ABRASION OF GLASS, CERAMIC AND METALLIC MATERIAL |
BR112015000772-4A BR112015000772B1 (pt) | 2012-07-13 | 2013-07-08 | lixa abrasiva e método para abrasão de materiais de vidro, de cerâmica e metálicos |
PCT/US2013/049513 WO2014011517A1 (en) | 2012-07-13 | 2013-07-08 | Abrasive pad and method for abrading glass, ceramic, and metal materials |
KR1020157003526A KR102145336B1 (ko) | 2012-07-13 | 2013-07-08 | 연마 패드 및 유리, 세라믹, 및 금속 재료를 연마하는 방법 |
TW102125292A TWI595976B (zh) | 2012-07-13 | 2013-07-15 | 硏磨墊及硏磨玻璃,陶瓷及金屬材料之方法 |
Applications Claiming Priority (1)
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JP2012158007A JP6188286B2 (ja) | 2012-07-13 | 2012-07-13 | 研磨パッド及びガラス、セラミックス、及び金属材料の研磨方法 |
Publications (2)
Publication Number | Publication Date |
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JP2014018893A true JP2014018893A (ja) | 2014-02-03 |
JP6188286B2 JP6188286B2 (ja) | 2017-08-30 |
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Family Applications (1)
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JP2012158007A Expired - Fee Related JP6188286B2 (ja) | 2012-07-13 | 2012-07-13 | 研磨パッド及びガラス、セラミックス、及び金属材料の研磨方法 |
Country Status (8)
Country | Link |
---|---|
US (1) | US9415480B2 (ja) |
EP (1) | EP2872292A4 (ja) |
JP (1) | JP6188286B2 (ja) |
KR (1) | KR102145336B1 (ja) |
CN (1) | CN104837593B (ja) |
BR (1) | BR112015000772B1 (ja) |
TW (1) | TWI595976B (ja) |
WO (1) | WO2014011517A1 (ja) |
Cited By (7)
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CN104889896A (zh) * | 2015-06-30 | 2015-09-09 | 清远市百佳研磨科技有限公司 | 一种涂附磨具及其制备方法 |
JP2015178155A (ja) * | 2014-03-19 | 2015-10-08 | スリーエム イノベイティブ プロパティズ カンパニー | 研磨パッド及びガラス基板の研磨方法 |
CN106002632A (zh) * | 2016-07-20 | 2016-10-12 | 厦门润晶光电集团有限公司 | 化学机械研磨抛光垫修整器 |
JP2018118377A (ja) * | 2016-03-25 | 2018-08-02 | バンドー化学株式会社 | 研磨材 |
JP2020151792A (ja) * | 2019-03-19 | 2020-09-24 | 富士紡ホールディングス株式会社 | 研磨ブラシ及び研磨加工物の製造方法 |
US20210323114A1 (en) * | 2020-04-21 | 2021-10-21 | Smart Pad LLC | Chemical-mechanical polishing pad with protruded structures |
US11389929B2 (en) | 2018-03-19 | 2022-07-19 | Fuji Manufacturing Co., Ltd. | Method for surface treatment of workpiece made from hard-brittle material |
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JP6295807B2 (ja) * | 2014-04-28 | 2018-03-20 | 株式会社リコー | 研磨具、及び、研磨装置 |
JP2016047566A (ja) * | 2014-08-27 | 2016-04-07 | 株式会社フジミインコーポレーテッド | 研磨パッド |
CN206717685U (zh) * | 2014-09-26 | 2017-12-08 | 阪东化学株式会社 | 研磨垫 |
SE539716C2 (en) * | 2016-06-15 | 2017-11-07 | Valmet Oy | Refine plate segment with pre-dam |
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US10813444B2 (en) * | 2018-05-16 | 2020-10-27 | Jh Rhodes Company, Inc. | Porous polymeric polishing bristles and methods for their manufacture |
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USD866892S1 (en) * | 2017-07-28 | 2019-11-12 | 3M Innovative Properties Company | Scouring pad |
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- 2013-07-08 BR BR112015000772-4A patent/BR112015000772B1/pt not_active IP Right Cessation
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JP2015178155A (ja) * | 2014-03-19 | 2015-10-08 | スリーエム イノベイティブ プロパティズ カンパニー | 研磨パッド及びガラス基板の研磨方法 |
CN104889896A (zh) * | 2015-06-30 | 2015-09-09 | 清远市百佳研磨科技有限公司 | 一种涂附磨具及其制备方法 |
JP2018118377A (ja) * | 2016-03-25 | 2018-08-02 | バンドー化学株式会社 | 研磨材 |
CN106002632A (zh) * | 2016-07-20 | 2016-10-12 | 厦门润晶光电集团有限公司 | 化学机械研磨抛光垫修整器 |
US11389929B2 (en) | 2018-03-19 | 2022-07-19 | Fuji Manufacturing Co., Ltd. | Method for surface treatment of workpiece made from hard-brittle material |
JP2020151792A (ja) * | 2019-03-19 | 2020-09-24 | 富士紡ホールディングス株式会社 | 研磨ブラシ及び研磨加工物の製造方法 |
JP7242363B2 (ja) | 2019-03-19 | 2023-03-20 | 富士紡ホールディングス株式会社 | 研磨ブラシ及び研磨加工物の製造方法 |
US20210323114A1 (en) * | 2020-04-21 | 2021-10-21 | Smart Pad LLC | Chemical-mechanical polishing pad with protruded structures |
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EP2872292A4 (en) | 2016-03-16 |
CN104837593B (zh) | 2018-09-21 |
TWI595976B (zh) | 2017-08-21 |
CN104837593A (zh) | 2015-08-12 |
TW201404542A (zh) | 2014-02-01 |
US9415480B2 (en) | 2016-08-16 |
KR102145336B1 (ko) | 2020-08-18 |
BR112015000772A2 (pt) | 2019-11-05 |
US20150158141A1 (en) | 2015-06-11 |
EP2872292A1 (en) | 2015-05-20 |
KR20150032576A (ko) | 2015-03-26 |
BR112015000772B1 (pt) | 2021-01-19 |
WO2014011517A1 (en) | 2014-01-16 |
JP6188286B2 (ja) | 2017-08-30 |
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