JP2002538606A5 - - Google Patents
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- Publication number
- JP2002538606A5 JP2002538606A5 JP2000601693A JP2000601693A JP2002538606A5 JP 2002538606 A5 JP2002538606 A5 JP 2002538606A5 JP 2000601693 A JP2000601693 A JP 2000601693A JP 2000601693 A JP2000601693 A JP 2000601693A JP 2002538606 A5 JP2002538606 A5 JP 2002538606A5
- Authority
- JP
- Japan
- Prior art keywords
- gating
- nanotube
- nanotubes
- nanodevice
- external
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000002071 nanotube Substances 0.000 description 67
- 230000004888 barrier function Effects 0.000 description 14
- 239000000463 material Substances 0.000 description 12
- 239000004065 semiconductor Substances 0.000 description 10
- 229910004298 SiO 2 Inorganic materials 0.000 description 6
- 239000002086 nanomaterial Substances 0.000 description 5
- 239000003989 dielectric material Substances 0.000 description 3
- 229910000980 Aluminium gallium arsenide Inorganic materials 0.000 description 2
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 2
- 239000000969 carrier Substances 0.000 description 2
- 229920002313 fluoropolymer Polymers 0.000 description 2
- 229910044991 metal oxide Inorganic materials 0.000 description 2
- 150000004706 metal oxides Chemical class 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910052752 metalloid Inorganic materials 0.000 description 1
- 150000002738 metalloids Chemical class 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US25350699A | 1999-02-22 | 1999-02-22 | |
| US09/253,506 | 1999-02-22 | ||
| PCT/US2000/004220 WO2000051186A1 (en) | 1999-02-22 | 2000-02-18 | Nanostructure device and apparatus |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2006063385A Division JP4512054B2 (ja) | 1999-02-22 | 2006-03-08 | ナノチューブの分離およびアラインメント用装置及び、原子顕微鏡の位置合わせ装置 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2002538606A JP2002538606A (ja) | 2002-11-12 |
| JP2002538606A5 true JP2002538606A5 (https=) | 2007-03-08 |
| JP4039600B2 JP4039600B2 (ja) | 2008-01-30 |
Family
ID=22960568
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2000601693A Expired - Fee Related JP4039600B2 (ja) | 1999-02-22 | 2000-02-18 | ナノ構造デバイス及び装置 |
| JP2006063385A Expired - Fee Related JP4512054B2 (ja) | 1999-02-22 | 2006-03-08 | ナノチューブの分離およびアラインメント用装置及び、原子顕微鏡の位置合わせ装置 |
Family Applications After (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2006063385A Expired - Fee Related JP4512054B2 (ja) | 1999-02-22 | 2006-03-08 | ナノチューブの分離およびアラインメント用装置及び、原子顕微鏡の位置合わせ装置 |
Country Status (6)
| Country | Link |
|---|---|
| EP (1) | EP1159761B1 (https=) |
| JP (2) | JP4039600B2 (https=) |
| KR (2) | KR100679547B1 (https=) |
| AT (1) | ATE465519T1 (https=) |
| DE (1) | DE60044238D1 (https=) |
| WO (1) | WO2000051186A1 (https=) |
Families Citing this family (33)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2001003208A1 (en) | 1999-07-02 | 2001-01-11 | President And Fellows Of Harvard College | Nanoscopic wire-based devices, arrays, and methods of their manufacture |
| EP1299914B1 (de) * | 2000-07-04 | 2008-04-02 | Qimonda AG | Feldeffekttransistor |
| DE10036897C1 (de) | 2000-07-28 | 2002-01-03 | Infineon Technologies Ag | Feldeffekttransistor, Schaltungsanordnung und Verfahren zum Herstellen eines Feldeffekttransistors |
| WO2003005450A2 (en) * | 2001-05-18 | 2003-01-16 | President And Fellows Of Harvard College | Nanoscale wires and related devices |
| US7301199B2 (en) * | 2000-08-22 | 2007-11-27 | President And Fellows Of Harvard College | Nanoscale wires and related devices |
| KR20030055346A (ko) | 2000-12-11 | 2003-07-02 | 프레지던트 앤드 펠로우즈 오브 하버드 칼리지 | 나노센서 |
| JP4676073B2 (ja) * | 2001-02-13 | 2011-04-27 | エスアイアイ・ナノテクノロジー株式会社 | マスクの白欠陥修正方法 |
| JP2004537174A (ja) * | 2001-07-26 | 2004-12-09 | テクニシェ ユニヴェルシテイト デルフト | カーボンナノチューブを利用した電子デバイス |
| AU2002352814A1 (en) | 2001-11-20 | 2003-06-10 | Andrew R. Barron | Coated fullerenes, composites and dielectrics made therefrom |
| US6891227B2 (en) | 2002-03-20 | 2005-05-10 | International Business Machines Corporation | Self-aligned nanotube field effect transistor and method of fabricating same |
| JP3522261B2 (ja) * | 2002-04-18 | 2004-04-26 | 日本電気株式会社 | ナノチューブ、近接場光検出装置および近接場光検出方法 |
| JP5016190B2 (ja) | 2002-05-02 | 2012-09-05 | 株式会社イデアルスター | 線状素子及びその製造方法 |
| AU2003261205A1 (en) | 2002-07-19 | 2004-02-09 | President And Fellows Of Harvard College | Nanoscale coherent optical components |
| DE60334723D1 (de) * | 2002-11-19 | 2010-12-09 | Univ Rice William M | Feldeffektransistor mit funktionalisierter Kohlenstoffnanoröhre und dessen Herstellungsfervahren |
| AU2003295721A1 (en) | 2002-11-19 | 2004-06-15 | William Marsh Rice University | Fabrication of light emitting film coated fullerenes and their application for in-vivo light emission |
| JP2004235618A (ja) * | 2003-01-10 | 2004-08-19 | Sanyo Electric Co Ltd | カーボンナノチューブを用いた配線、単一電子トランジスタおよびキャパシタ |
| EP1508926A1 (en) * | 2003-08-19 | 2005-02-23 | Hitachi, Ltd. | Nanotube transistor device |
| DE102004003374A1 (de) * | 2004-01-22 | 2005-08-25 | Infineon Technologies Ag | Halbleiter-Leistungsschalter sowie dafür geeignetes Herstellungsverfahren |
| FR2868201B1 (fr) * | 2004-03-23 | 2007-06-29 | Ecole Polytechnique Dgar | Procede de fabrication de composants electroniques et composants electroniques obtenus par ce procede |
| KR101100887B1 (ko) * | 2005-03-17 | 2012-01-02 | 삼성전자주식회사 | 박막 트랜지스터, 박막 트랜지스터 표시판 및 그 제조 방법 |
| US9102521B2 (en) | 2006-06-12 | 2015-08-11 | President And Fellows Of Harvard College | Nanosensors and related technologies |
| US8058640B2 (en) | 2006-09-11 | 2011-11-15 | President And Fellows Of Harvard College | Branched nanoscale wires |
| WO2008127314A1 (en) | 2006-11-22 | 2008-10-23 | President And Fellows Of Harvard College | High-sensitivity nanoscale wire sensors |
| JP2011523200A (ja) * | 2008-04-15 | 2011-08-04 | クナノ アーベー | ナノワイヤラップゲートデバイス |
| US8166819B2 (en) * | 2008-07-24 | 2012-05-01 | Northrop Grumman Systems Corporation | Standing wave field induced force |
| JP2012528020A (ja) | 2009-05-26 | 2012-11-12 | ナノシス・インク. | ナノワイヤおよび他のデバイスの電場沈着のための方法およびシステム |
| DE102009040916B4 (de) | 2009-09-11 | 2013-01-17 | Marko Behrens | Faltbecher |
| US9297796B2 (en) | 2009-09-24 | 2016-03-29 | President And Fellows Of Harvard College | Bent nanowires and related probing of species |
| KR101123958B1 (ko) * | 2010-04-02 | 2012-03-23 | 서울시립대학교 산학협력단 | 그래핀과 전도체 선들을 이용한 나노 트랜지스터 |
| CN107564946A (zh) * | 2016-07-01 | 2018-01-09 | 清华大学 | 纳米晶体管 |
| CN107564917B (zh) * | 2016-07-01 | 2020-06-09 | 清华大学 | 纳米异质结构 |
| CN107564947A (zh) * | 2016-07-01 | 2018-01-09 | 清华大学 | 纳米异质结构 |
| CN107564910B (zh) * | 2016-07-01 | 2020-08-11 | 清华大学 | 半导体器件 |
Family Cites Families (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62160688A (ja) * | 1986-01-08 | 1987-07-16 | 株式会社東芝 | 誘導加熱調理器 |
| AT390739B (de) * | 1988-11-03 | 1990-06-25 | Ewald Dipl Ing Dr Benes | Verfahren und einrichtung zur separation von teilchen, welche in einem dispersionsmittel dispergiert sind |
| JPH04329836A (ja) * | 1991-04-30 | 1992-11-18 | Daiki Alum Kogyosho:Kk | アルミニウムスクラップの前処理方法 |
| JPH07118270B2 (ja) * | 1993-10-25 | 1995-12-18 | 日本電気株式会社 | カーボンナノチューブトランジスタ |
| EP0783662B1 (en) * | 1994-08-27 | 1999-04-07 | International Business Machines Corporation | Fine positioning apparatus with atomic resolution |
| JP2700058B2 (ja) * | 1996-01-23 | 1998-01-19 | 工業技術院長 | 超音波を用いた非接触マイクロマニピュレーション方法 |
| JP2000516708A (ja) * | 1996-08-08 | 2000-12-12 | ウィリアム・マーシュ・ライス・ユニバーシティ | ナノチューブ組立体から作製された巨視的操作可能なナノ規模の装置 |
| KR100277881B1 (ko) * | 1998-06-16 | 2001-02-01 | 김영환 | 트랜지스터 |
-
2000
- 2000-02-18 DE DE60044238T patent/DE60044238D1/de not_active Expired - Lifetime
- 2000-02-18 KR KR1020017009805A patent/KR100679547B1/ko not_active Expired - Fee Related
- 2000-02-18 EP EP00913530A patent/EP1159761B1/en not_active Expired - Lifetime
- 2000-02-18 JP JP2000601693A patent/JP4039600B2/ja not_active Expired - Fee Related
- 2000-02-18 WO PCT/US2000/004220 patent/WO2000051186A1/en not_active Ceased
- 2000-02-18 AT AT00913530T patent/ATE465519T1/de not_active IP Right Cessation
- 2000-02-18 KR KR1020047008565A patent/KR100636951B1/ko not_active Expired - Fee Related
-
2006
- 2006-03-08 JP JP2006063385A patent/JP4512054B2/ja not_active Expired - Fee Related
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