JP2002523327A - 酸化アルミニウム粒子 - Google Patents

酸化アルミニウム粒子

Info

Publication number
JP2002523327A
JP2002523327A JP2000566199A JP2000566199A JP2002523327A JP 2002523327 A JP2002523327 A JP 2002523327A JP 2000566199 A JP2000566199 A JP 2000566199A JP 2000566199 A JP2000566199 A JP 2000566199A JP 2002523327 A JP2002523327 A JP 2002523327A
Authority
JP
Japan
Prior art keywords
particles
particle size
aggregate
aluminum oxide
percent
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP2000566199A
Other languages
English (en)
Japanese (ja)
Other versions
JP2002523327A5 (enExample
Inventor
クマール，スジェート
レイツ，ハリクリア・ドリス
ビ，ジアンジン
カンベ，ノブユキ
Original Assignee
ナノグラム・コーポレーション
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by ナノグラム・コーポレーション filed Critical ナノグラム・コーポレーション
Publication of JP2002523327A publication Critical patent/JP2002523327A/ja
Publication of JP2002523327A5 publication Critical patent/JP2002523327A5/ja
Withdrawn legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01F—COMPOUNDS OF THE METALS BERYLLIUM, MAGNESIUM, ALUMINIUM, CALCIUM, STRONTIUM, BARIUM, RADIUM, THORIUM, OR OF THE RARE-EARTH METALS
    • C01F7/00—Compounds of aluminium
    • C01F7/02—Aluminium oxide; Aluminium hydroxide; Aluminates
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y30/00—Nanotechnology for materials or surface science, e.g. nanocomposites
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01F—COMPOUNDS OF THE METALS BERYLLIUM, MAGNESIUM, ALUMINIUM, CALCIUM, STRONTIUM, BARIUM, RADIUM, THORIUM, OR OF THE RARE-EARTH METALS
    • C01F7/00—Compounds of aluminium
    • C01F7/02—Aluminium oxide; Aluminium hydroxide; Aluminates
    • C01F7/30—Preparation of aluminium oxide or hydroxide by thermal decomposition or by hydrolysis or oxidation of aluminium compounds
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01F—COMPOUNDS OF THE METALS BERYLLIUM, MAGNESIUM, ALUMINIUM, CALCIUM, STRONTIUM, BARIUM, RADIUM, THORIUM, OR OF THE RARE-EARTH METALS
    • C01F7/00—Compounds of aluminium
    • C01F7/02—Aluminium oxide; Aluminium hydroxide; Aluminates
    • C01F7/30—Preparation of aluminium oxide or hydroxide by thermal decomposition or by hydrolysis or oxidation of aluminium compounds
    • C01F7/306—Thermal decomposition of hydrated chlorides, e.g. of aluminium trichloride hexahydrate
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09G—POLISHING COMPOSITIONS; SKI WAXES
    • C09G1/00—Polishing compositions
    • C09G1/02—Polishing compositions containing abrasives or grinding agents
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01P—INDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
    • C01P2002/00—Crystal-structural characteristics
    • C01P2002/70—Crystal-structural characteristics defined by measured X-ray, neutron or electron diffraction data
    • C01P2002/72—Crystal-structural characteristics defined by measured X-ray, neutron or electron diffraction data by d-values or two theta-values, e.g. as X-ray diagram
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01P—INDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
    • C01P2004/00—Particle morphology
    • C01P2004/01—Particle morphology depicted by an image
    • C01P2004/04—Particle morphology depicted by an image obtained by TEM, STEM, STM or AFM
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01P—INDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
    • C01P2004/00—Particle morphology
    • C01P2004/30—Particle morphology extending in three dimensions
    • C01P2004/32—Spheres
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01P—INDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
    • C01P2004/00—Particle morphology
    • C01P2004/50—Agglomerated particles
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01P—INDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
    • C01P2004/00—Particle morphology
    • C01P2004/51—Particles with a specific particle size distribution
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01P—INDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
    • C01P2004/00—Particle morphology
    • C01P2004/51—Particles with a specific particle size distribution
    • C01P2004/52—Particles with a specific particle size distribution highly monodisperse size distribution
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01P—INDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
    • C01P2004/00—Particle morphology
    • C01P2004/60—Particles characterised by their size
    • C01P2004/62—Submicrometer sized, i.e. from 0.1-1 micrometer
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01P—INDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
    • C01P2004/00—Particle morphology
    • C01P2004/60—Particles characterised by their size
    • C01P2004/64—Nanometer sized, i.e. from 1-100 nanometer
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
    • C09K3/00—Materials not provided for elsewhere
    • C09K3/14—Anti-slip materials; Abrasives
    • C09K3/1409—Abrasive particles per se
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
    • C09K3/00—Materials not provided for elsewhere
    • C09K3/14—Anti-slip materials; Abrasives
    • C09K3/1454—Abrasive powders, suspensions and pastes for polishing

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Inorganic Chemistry (AREA)
  • Geology (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Thermal Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Nanotechnology (AREA)
  • Composite Materials (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • General Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Compounds Of Alkaline-Earth Elements, Aluminum Or Rare-Earth Metals (AREA)
JP2000566199A 1998-08-19 1999-08-11 酸化アルミニウム粒子 Withdrawn JP2002523327A (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US09/136,483 1998-08-19
US09/136,483 US20090255189A1 (en) 1998-08-19 1998-08-19 Aluminum oxide particles
PCT/US1999/018169 WO2000010920A1 (en) 1998-08-19 1999-08-11 Aluminum oxide particles

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2010154669A Division JP2010265171A (ja) 1998-08-19 2010-07-07 酸化アルミニウム粒子

Publications (2)

Publication Number Publication Date
JP2002523327A true JP2002523327A (ja) 2002-07-30
JP2002523327A5 JP2002523327A5 (enExample) 2006-09-28

Family

ID=22473049

Family Applications (2)

Application Number Title Priority Date Filing Date
JP2000566199A Withdrawn JP2002523327A (ja) 1998-08-19 1999-08-11 酸化アルミニウム粒子
JP2010154669A Pending JP2010265171A (ja) 1998-08-19 2010-07-07 酸化アルミニウム粒子

Family Applications After (1)

Application Number Title Priority Date Filing Date
JP2010154669A Pending JP2010265171A (ja) 1998-08-19 2010-07-07 酸化アルミニウム粒子

Country Status (7)

Country Link
US (2) US20090255189A1 (enExample)
EP (1) EP1129035A1 (enExample)
JP (2) JP2002523327A (enExample)
KR (1) KR20010072686A (enExample)
CN (1) CN1322185A (enExample)
TW (1) TW590988B (enExample)
WO (1) WO2000010920A1 (enExample)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006523178A (ja) * 2003-04-02 2006-10-12 サン−ゴバン セラミックス アンド プラスティクス，インコーポレイティド ナノ多孔質超微細アルファ−アルミナ粉末及び該粉末を調製するゾル−ゲル法
JP2007500943A (ja) * 2003-07-30 2007-01-18 クライマックス・エンジニアード・マテリアルズ・エルエルシー 銅を化学的機械的に平滑化するためのスラリーおよび方法
KR101286825B1 (ko) * 2005-03-18 2013-07-17 스미또모 가가꾸 가부시키가이샤 미세 α-알루미나 입자의 제조 방법
JP2021147529A (ja) * 2020-03-19 2021-09-27 株式会社フジミインコーポレーテッド 研磨用組成物、研磨方法および半導体基板の製造方法

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US20030077221A1 (en) * 2001-10-01 2003-04-24 Shivkumar Chiruvolu Aluminum oxide powders
US7080513B2 (en) 2001-08-04 2006-07-25 Siemens Aktiengesellschaft Seal element for sealing a gap and combustion turbine having a seal element
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US20070003694A1 (en) * 2005-05-23 2007-01-04 Shivkumar Chiruvolu In-flight modification of inorganic particles within a reaction product flow
US20090020411A1 (en) * 2007-07-20 2009-01-22 Holunga Dean M Laser pyrolysis with in-flight particle manipulation for powder engineering
US8252076B2 (en) 2007-12-05 2012-08-28 3M Innovative Properties Company Buffing composition and method of finishing a surface of a material
FR2956111B1 (fr) * 2010-02-11 2012-04-20 Baikowski Alumine alpha, utilisation, procede de synthese et dispositif associes
CN114975234A (zh) * 2021-02-24 2022-08-30 中国科学院微电子研究所 一种半导体器件的制造方法

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Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006523178A (ja) * 2003-04-02 2006-10-12 サン−ゴバン セラミックス アンド プラスティクス，インコーポレイティド ナノ多孔質超微細アルファ−アルミナ粉末及び該粉末を調製するゾル−ゲル法
JP2007500943A (ja) * 2003-07-30 2007-01-18 クライマックス・エンジニアード・マテリアルズ・エルエルシー 銅を化学的機械的に平滑化するためのスラリーおよび方法
KR101286825B1 (ko) * 2005-03-18 2013-07-17 스미또모 가가꾸 가부시키가이샤 미세 α-알루미나 입자의 제조 방법
TWI408104B (zh) * 2005-03-18 2013-09-11 Sumitomo Chemical Co 微細α-氧化鋁粒子之製造方法
JP2021147529A (ja) * 2020-03-19 2021-09-27 株式会社フジミインコーポレーテッド 研磨用組成物、研磨方法および半導体基板の製造方法
JP7398304B2 (ja) 2020-03-19 2023-12-14 株式会社フジミインコーポレーテッド 研磨用組成物、研磨方法および半導体基板の製造方法

Also Published As

Publication number Publication date
US20050132659A1 (en) 2005-06-23
TW590988B (en) 2004-06-11
CN1322185A (zh) 2001-11-14
US20090255189A1 (en) 2009-10-15
WO2000010920A1 (en) 2000-03-02
JP2010265171A (ja) 2010-11-25
EP1129035A1 (en) 2001-09-05
KR20010072686A (ko) 2001-07-31

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