JP2002373985A5 - - Google Patents

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Publication number
JP2002373985A5
JP2002373985A5 JP2002086215A JP2002086215A JP2002373985A5 JP 2002373985 A5 JP2002373985 A5 JP 2002373985A5 JP 2002086215 A JP2002086215 A JP 2002086215A JP 2002086215 A JP2002086215 A JP 2002086215A JP 2002373985 A5 JP2002373985 A5 JP 2002373985A5
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Japan
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semiconductor
region
semiconductor layer
semiconductor device
conductivity type
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JP2002086215A
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English (en)
Japanese (ja)
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JP2002373985A (ja
JP3505535B2 (ja
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Priority to JP2002086215A priority Critical patent/JP3505535B2/ja
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Publication of JP3505535B2 publication Critical patent/JP3505535B2/ja
Publication of JP2002373985A5 publication Critical patent/JP2002373985A5/ja
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Expired - Fee Related legal-status Critical Current

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JP2002086215A 2001-04-12 2002-03-26 半導体装置およびその製造方法 Expired - Fee Related JP3505535B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2002086215A JP3505535B2 (ja) 2001-04-12 2002-03-26 半導体装置およびその製造方法

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2001-113437 2001-04-12
JP2001113437 2001-04-12
JP2002086215A JP3505535B2 (ja) 2001-04-12 2002-03-26 半導体装置およびその製造方法

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2003276842A Division JP2004006959A (ja) 2001-04-12 2003-07-18 半導体装置およびその製造方法

Publications (3)

Publication Number Publication Date
JP2002373985A JP2002373985A (ja) 2002-12-26
JP3505535B2 JP3505535B2 (ja) 2004-03-08
JP2002373985A5 true JP2002373985A5 (fr) 2004-08-12

Family

ID=26613470

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2002086215A Expired - Fee Related JP3505535B2 (ja) 2001-04-12 2002-03-26 半導体装置およびその製造方法

Country Status (1)

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JP (1) JP3505535B2 (fr)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006186261A (ja) * 2004-12-28 2006-07-13 Matsushita Electric Ind Co Ltd 半導体装置及びその製造方法
KR101513601B1 (ko) * 2008-03-07 2015-04-21 삼성전자주식회사 트랜지스터

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