JP2002250470A - 真空バルブの弁プレート取付け装置 - Google Patents

真空バルブの弁プレート取付け装置

Info

Publication number
JP2002250470A
JP2002250470A JP2001392851A JP2001392851A JP2002250470A JP 2002250470 A JP2002250470 A JP 2002250470A JP 2001392851 A JP2001392851 A JP 2001392851A JP 2001392851 A JP2001392851 A JP 2001392851A JP 2002250470 A JP2002250470 A JP 2002250470A
Authority
JP
Japan
Prior art keywords
valve
plate
valve rod
bearing block
force transmitting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2001392851A
Other languages
English (en)
Japanese (ja)
Other versions
JP2002250470A5 (enExample
Inventor
Bernhard Duelli
ドゥエリ ベルンハルド
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
VAT Holding AG
Original Assignee
VAT Holding AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by VAT Holding AG filed Critical VAT Holding AG
Publication of JP2002250470A publication Critical patent/JP2002250470A/ja
Publication of JP2002250470A5 publication Critical patent/JP2002250470A5/ja
Pending legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K51/00—Other details not peculiar to particular types of valves or cut-off apparatus
    • F16K51/02—Other details not peculiar to particular types of valves or cut-off apparatus specially adapted for high-vacuum installations
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
    • F16K3/02—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor
    • F16K3/16—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together
    • F16K3/18—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together by movement of the closure members

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Sliding Valves (AREA)
  • Details Of Valves (AREA)
  • Lift Valve (AREA)
JP2001392851A 2001-01-11 2001-12-25 真空バルブの弁プレート取付け装置 Pending JP2002250470A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US09/759,027 US6471181B2 (en) 2001-01-11 2001-01-11 Suspension of a valve plate of a vacuum valve
US09/759027 2001-01-11

Publications (2)

Publication Number Publication Date
JP2002250470A true JP2002250470A (ja) 2002-09-06
JP2002250470A5 JP2002250470A5 (enExample) 2005-07-28

Family

ID=25054111

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2001392851A Pending JP2002250470A (ja) 2001-01-11 2001-12-25 真空バルブの弁プレート取付け装置

Country Status (2)

Country Link
US (1) US6471181B2 (enExample)
JP (1) JP2002250470A (enExample)

Cited By (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007155005A (ja) * 2005-12-05 2007-06-21 Ulvac Japan Ltd 真空用ゲ−トバルブ
JP2007208252A (ja) * 2006-01-06 2007-08-16 Applied Materials Inc 柔軟性のある結合要素を備えた湾曲したスリットバルブドア
KR100960030B1 (ko) 2004-03-12 2010-05-28 배트 홀딩 아게 진공 게이트 밸브
JP2012511672A (ja) * 2008-12-11 2012-05-24 バット ホールディング アーゲー バルブロッドに対するバルブプレートの懸架装置
US8833383B2 (en) 2011-07-20 2014-09-16 Ferrotec (Usa) Corporation Multi-vane throttle valve
JP2015209977A (ja) * 2014-04-25 2015-11-24 バット ホールディング アーゲー バルブ
JP5890929B1 (ja) * 2015-07-01 2016-03-22 株式会社ブイテックス ゲートバルブ
JP2017227325A (ja) * 2016-06-14 2017-12-28 バット ホールディング アーゲー 流量を制御するためのおよび流路を遮断するための真空バルブ
JP2020008164A (ja) * 2018-07-10 2020-01-16 イノレス カンパニー リミテッド 真空バルブ用開閉プレート
JPWO2021229870A1 (enExample) * 2020-05-14 2021-11-18
CN114483988A (zh) * 2022-04-06 2022-05-13 成都乘风阀门有限责任公司 一种高压耐磨闸阀
JP7637511B2 (ja) 2020-01-29 2025-02-28 バット ホールディング アーゲー 連結機構

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20050098208A1 (en) * 2003-11-10 2005-05-12 Topf Henry E.Jr. Branch connection method
DE102008051349B3 (de) * 2008-10-15 2009-11-12 Vat Holding Ag Vakuumventil
TWI541465B (zh) * 2009-10-27 2016-07-11 Ｖａｔ控股股份有限公司 用於真空閥之封閉單元
WO2011091455A1 (de) 2010-01-29 2011-08-04 Vat Holding Ag TÜR ZUM VERSCHLIEßEN EINER ÖFFNUNG
EP2355132B1 (de) * 2010-02-04 2014-05-21 VAT Holding AG Klappen-Transferventil mit schwenkbarem Ventilverschlussbalken
WO2011153562A1 (de) 2010-06-09 2011-12-15 Vat Holding Ag Vakuumventil
GB2517904A (en) * 2013-07-31 2015-03-11 Ingegneria Ceramica S R L An Improved Obturator and Method of Fabrication Thereof
EP2913573A1 (de) 2014-02-26 2015-09-02 VAT Holding AG Vakuumventil
US9470319B2 (en) 2015-01-26 2016-10-18 King Lai Hygienic Materials Co., Ltd. Gate valve with linkage structure
DE102015106916A1 (de) * 2015-05-04 2016-11-10 M. Braun Inertgas-Systeme Gmbh Transferventil
EP3150322A1 (de) 2015-10-02 2017-04-05 VAT Holding AG Verschlusselement für eine vakuumdichtung mit einer reibrührschweissverbindung
DE102019001115A1 (de) * 2019-02-15 2020-08-20 Vat Holding Ag Torventil mit Kulissenführung
DE102021102284A1 (de) 2021-02-01 2022-08-04 Vat Holding Ag Ventilplatte für eine Verschlusseinrichtung zum vakuumdichten Verschließen einer Öffnung in einer Wand
DE102021102283A1 (de) 2021-02-01 2022-08-04 Vat Holding Ag Verschlussvorrichtung zum vakuumdichten Verschließen einer Öffnung in einer Wand
KR20230059635A (ko) 2021-10-26 2023-05-03 삼성전자주식회사 밸브 구조체 및 이를 포함하는 기판 처리 장치
CN121047985A (zh) * 2025-11-05 2025-12-02 宸微设备科技(苏州)有限公司 真空系统压力控制装置及真空系统压力控制方法

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US2848187A (en) * 1958-08-19 Ball type swivel valve seat
US2573623A (en) * 1945-12-07 1951-10-30 Fred J Stover Valve head
US2925987A (en) * 1957-08-28 1960-02-23 Powers Regulator Co Diaphragm valve with yieldable connections between the diaphragm, stem, and valve hea
US3185435A (en) 1962-02-15 1965-05-25 Ultek Corp Valve construction
BE650162A (enExample) * 1963-07-06 1900-01-01 Danfoss As
US3820755A (en) * 1973-02-20 1974-06-28 Itt Poppet valve
CA1021225A (en) * 1974-06-28 1977-11-22 General Signal Corporation Quick-acting valve assembly
US4142543A (en) * 1977-02-25 1979-03-06 Henry Valve Company Valve stem and disc combination and method of assembling same
US4337920A (en) * 1980-10-16 1982-07-06 Cameron Iron Works, Inc. Valve
DE3209217C2 (de) 1982-03-13 1985-10-03 Siegfried Haag Schertler Schiebeventil
DE3224387A1 (de) 1982-06-30 1984-01-12 Schertler, Siegfried, 9469 Haag Vakuumschieberventil
DE3539057A1 (de) * 1985-11-04 1987-05-14 Vdo Schindling Elektromagnetisch betaetigbares kraftstoffeinspritzventil
US4671484A (en) * 1986-04-16 1987-06-09 Eaton Corporation Gas valve
JP2613171B2 (ja) 1993-07-22 1997-05-21 株式会社岸川特殊バルブ ゲートバルブ
JP2958267B2 (ja) 1996-05-07 1999-10-06 入江工研株式会社 無摺動真空ゲートバルブ
DE19633798A1 (de) 1996-08-22 1998-02-26 Vat Holding Ag Einrichtung zum Verschließen einer Öffnung in einem Behälter oder in einer Rohrleitung
US5755255A (en) 1996-10-29 1998-05-26 Benkan Corporation Gate valve for regulating gas flow in semiconductor manufacturing
US5934646A (en) 1997-04-04 1999-08-10 Nok Corporation Gate valve and cylinder apparatus
DE19746241C2 (de) 1997-10-20 2000-05-31 Vat Holding Ag Haag Einrichtung zum Verschließen einer Öffnung
JP3915083B2 (ja) 1998-05-20 2007-05-16 Ｓｍｃ株式会社 高真空バルブ
US5971358A (en) * 1998-06-11 1999-10-26 Penn Troy Machine Co., Inc. Gate assembly for a double disk gate valve
EP1028278A3 (en) 1999-02-09 2001-10-24 Applied Materials, Inc. Valve seal
US6283446B1 (en) * 1999-03-18 2001-09-04 Suiken Technology Co., Ltd. Gate valve system

Cited By (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100960030B1 (ko) 2004-03-12 2010-05-28 배트 홀딩 아게 진공 게이트 밸브
JP2007155005A (ja) * 2005-12-05 2007-06-21 Ulvac Japan Ltd 真空用ゲ−トバルブ
JP2007208252A (ja) * 2006-01-06 2007-08-16 Applied Materials Inc 柔軟性のある結合要素を備えた湾曲したスリットバルブドア
JP2012511672A (ja) * 2008-12-11 2012-05-24 バット ホールディング アーゲー バルブロッドに対するバルブプレートの懸架装置
KR101568454B1 (ko) 2008-12-11 2015-11-11 배트 홀딩 아게 밸브 로드 상에의 밸브 플레이트의 현가 장치
US8833383B2 (en) 2011-07-20 2014-09-16 Ferrotec (Usa) Corporation Multi-vane throttle valve
JP2015209977A (ja) * 2014-04-25 2015-11-24 バット ホールディング アーゲー バルブ
JP5890929B1 (ja) * 2015-07-01 2016-03-22 株式会社ブイテックス ゲートバルブ
JP7128611B2 (ja) 2016-06-14 2022-08-31 バット ホールディング アーゲー 流量を制御するためのおよび流路を遮断するための真空バルブ
JP2017227325A (ja) * 2016-06-14 2017-12-28 バット ホールディング アーゲー 流量を制御するためのおよび流路を遮断するための真空バルブ
JP2020008164A (ja) * 2018-07-10 2020-01-16 イノレス カンパニー リミテッド 真空バルブ用開閉プレート
JP7637511B2 (ja) 2020-01-29 2025-02-28 バット ホールディング アーゲー 連結機構
JPWO2021229870A1 (enExample) * 2020-05-14 2021-11-18
CN115280466A (zh) * 2020-05-14 2022-11-01 株式会社岛津制作所 质量分析装置
JP7332043B2 (ja) 2020-05-14 2023-08-23 株式会社島津製作所 質量分析装置
WO2021229870A1 (ja) * 2020-05-14 2021-11-18 株式会社島津製作所 質量分析装置
CN115280466B (zh) * 2020-05-14 2025-08-26 株式会社岛津制作所 质量分析装置
US12460471B2 (en) 2020-05-14 2025-11-04 Shimadzu Corporation Mass spectrometer
CN114483988B (zh) * 2022-04-06 2022-06-17 成都乘风阀门有限责任公司 一种高压耐磨闸阀
CN114483988A (zh) * 2022-04-06 2022-05-13 成都乘风阀门有限责任公司 一种高压耐磨闸阀

Also Published As

Publication number Publication date
US20020130288A1 (en) 2002-09-19
US6471181B2 (en) 2002-10-29

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