JP2002250470A5 - - Google Patents

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Publication number
JP2002250470A5
JP2002250470A5 JP2001392851A JP2001392851A JP2002250470A5 JP 2002250470 A5 JP2002250470 A5 JP 2002250470A5 JP 2001392851 A JP2001392851 A JP 2001392851A JP 2001392851 A JP2001392851 A JP 2001392851A JP 2002250470 A5 JP2002250470 A5 JP 2002250470A5
Authority
JP
Japan
Prior art keywords
valve
plate
bearing block
valve rod
valve plate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2001392851A
Other languages
English (en)
Japanese (ja)
Other versions
JP2002250470A (ja
Filing date
Publication date
Priority claimed from US09/759,027 external-priority patent/US6471181B2/en
Application filed filed Critical
Publication of JP2002250470A publication Critical patent/JP2002250470A/ja
Publication of JP2002250470A5 publication Critical patent/JP2002250470A5/ja
Pending legal-status Critical Current

Links

JP2001392851A 2001-01-11 2001-12-25 真空バルブの弁プレート取付け装置 Pending JP2002250470A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US09/759,027 US6471181B2 (en) 2001-01-11 2001-01-11 Suspension of a valve plate of a vacuum valve
US09/759027 2001-01-11

Publications (2)

Publication Number Publication Date
JP2002250470A JP2002250470A (ja) 2002-09-06
JP2002250470A5 true JP2002250470A5 (enExample) 2005-07-28

Family

ID=25054111

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2001392851A Pending JP2002250470A (ja) 2001-01-11 2001-12-25 真空バルブの弁プレート取付け装置

Country Status (2)

Country Link
US (1) US6471181B2 (enExample)
JP (1) JP2002250470A (enExample)

Families Citing this family (27)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20050098208A1 (en) * 2003-11-10 2005-05-12 Topf Henry E.Jr. Branch connection method
KR100960030B1 (ko) 2004-03-12 2010-05-28 배트 홀딩 아게 진공 게이트 밸브
US7497414B2 (en) * 2004-06-14 2009-03-03 Applied Materials, Inc. Curved slit valve door with flexible coupling
JP4775892B2 (ja) * 2005-12-05 2011-09-21 株式会社アルバック 真空用ゲ−トバルブ
DE102008051349B3 (de) * 2008-10-15 2009-11-12 Vat Holding Ag Vakuumventil
DE102008061315B4 (de) 2008-12-11 2012-11-15 Vat Holding Ag Aufhängung einer Ventilplatte an einer Ventilstange
TWI541465B (zh) * 2009-10-27 2016-07-11 Ｖａｔ控股股份有限公司 用於真空閥之封閉單元
US8827241B2 (en) 2010-01-29 2014-09-09 Vat Holding Ag Door for sealing an opening
EP2355132B1 (de) * 2010-02-04 2014-05-21 VAT Holding AG Klappen-Transferventil mit schwenkbarem Ventilverschlussbalken
WO2011153562A1 (de) 2010-06-09 2011-12-15 Vat Holding Ag Vakuumventil
US8833383B2 (en) 2011-07-20 2014-09-16 Ferrotec (Usa) Corporation Multi-vane throttle valve
GB2517904A (en) * 2013-07-31 2015-03-11 Ingegneria Ceramica S R L An Improved Obturator and Method of Fabrication Thereof
EP2913573A1 (de) 2014-02-26 2015-09-02 VAT Holding AG Vakuumventil
TWI656293B (zh) * 2014-04-25 2019-04-11 瑞士商Ｖａｔ控股股份有限公司 閥
US9470319B2 (en) 2015-01-26 2016-10-18 King Lai Hygienic Materials Co., Ltd. Gate valve with linkage structure
DE102015106916A1 (de) * 2015-05-04 2016-11-10 M. Braun Inertgas-Systeme Gmbh Transferventil
JP5890929B1 (ja) * 2015-07-01 2016-03-22 株式会社ブイテックス ゲートバルブ
EP3150322A1 (de) 2015-10-02 2017-04-05 VAT Holding AG Verschlusselement für eine vakuumdichtung mit einer reibrührschweissverbindung
EP3258149A1 (de) 2016-06-14 2017-12-20 VAT Holding AG Vakuumventil zur regelung eines flusses und zur unterbrechung eines fliessweges
KR101918512B1 (ko) * 2018-07-10 2018-11-15 이노레스 주식회사 진공밸브용 개폐플레이트
DE102019001115A1 (de) * 2019-02-15 2020-08-20 Vat Holding Ag Torventil mit Kulissenführung
DE102020102081A1 (de) 2020-01-29 2021-07-29 Vat Holding Ag Verbindungsvorrichtung zur Verbindung einer Ventilstange mit einem Verschlussglied eines Vakuumventils
CN115280466B (zh) * 2020-05-14 2025-08-26 株式会社岛津制作所 质量分析装置
DE102021102284A1 (de) 2021-02-01 2022-08-04 Vat Holding Ag Ventilplatte für eine Verschlusseinrichtung zum vakuumdichten Verschließen einer Öffnung in einer Wand
DE102021102283A1 (de) 2021-02-01 2022-08-04 Vat Holding Ag Verschlussvorrichtung zum vakuumdichten Verschließen einer Öffnung in einer Wand
KR20230059635A (ko) 2021-10-26 2023-05-03 삼성전자주식회사 밸브 구조체 및 이를 포함하는 기판 처리 장치
CN114483988B (zh) * 2022-04-06 2022-06-17 成都乘风阀门有限责任公司 一种高压耐磨闸阀

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Publication number Priority date Publication date Assignee Title
US2848187A (en) * 1958-08-19 Ball type swivel valve seat
US2573623A (en) * 1945-12-07 1951-10-30 Fred J Stover Valve head
US2925987A (en) * 1957-08-28 1960-02-23 Powers Regulator Co Diaphragm valve with yieldable connections between the diaphragm, stem, and valve hea
US3185435A (en) 1962-02-15 1965-05-25 Ultek Corp Valve construction
BE650162A (enExample) * 1963-07-06 1900-01-01 Danfoss As
US3820755A (en) * 1973-02-20 1974-06-28 Itt Poppet valve
CA1021225A (en) * 1974-06-28 1977-11-22 General Signal Corporation Quick-acting valve assembly
US4142543A (en) * 1977-02-25 1979-03-06 Henry Valve Company Valve stem and disc combination and method of assembling same
US4337920A (en) * 1980-10-16 1982-07-06 Cameron Iron Works, Inc. Valve
DE3209217C2 (de) 1982-03-13 1985-10-03 Siegfried Haag Schertler Schiebeventil
DE3224387A1 (de) 1982-06-30 1984-01-12 Schertler, Siegfried, 9469 Haag Vakuumschieberventil
DE3539057A1 (de) * 1985-11-04 1987-05-14 Vdo Schindling Elektromagnetisch betaetigbares kraftstoffeinspritzventil
US4671484A (en) * 1986-04-16 1987-06-09 Eaton Corporation Gas valve
JP2613171B2 (ja) 1993-07-22 1997-05-21 株式会社岸川特殊バルブ ゲートバルブ
JP2958267B2 (ja) 1996-05-07 1999-10-06 入江工研株式会社 無摺動真空ゲートバルブ
DE19633798A1 (de) 1996-08-22 1998-02-26 Vat Holding Ag Einrichtung zum Verschließen einer Öffnung in einem Behälter oder in einer Rohrleitung
US5755255A (en) 1996-10-29 1998-05-26 Benkan Corporation Gate valve for regulating gas flow in semiconductor manufacturing
US5934646A (en) 1997-04-04 1999-08-10 Nok Corporation Gate valve and cylinder apparatus
DE19746241C2 (de) 1997-10-20 2000-05-31 Vat Holding Ag Haag Einrichtung zum Verschließen einer Öffnung
JP3915083B2 (ja) 1998-05-20 2007-05-16 Ｓｍｃ株式会社 高真空バルブ
US5971358A (en) * 1998-06-11 1999-10-26 Penn Troy Machine Co., Inc. Gate assembly for a double disk gate valve
TW455662B (en) 1999-02-09 2001-09-21 Applied Materials Inc Valve seal
US6283446B1 (en) * 1999-03-18 2001-09-04 Suiken Technology Co., Ltd. Gate valve system

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