JP2002227765A5 - - Google Patents
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- Publication number
- JP2002227765A5 JP2002227765A5 JP2001024998A JP2001024998A JP2002227765A5 JP 2002227765 A5 JP2002227765 A5 JP 2002227765A5 JP 2001024998 A JP2001024998 A JP 2001024998A JP 2001024998 A JP2001024998 A JP 2001024998A JP 2002227765 A5 JP2002227765 A5 JP 2002227765A5
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2001024998A JP4657463B2 (ja) | 2001-02-01 | 2001-02-01 | 真空ポンプ |
EP02250514A EP1231383A1 (en) | 2001-02-01 | 2002-01-25 | Vacuum pump |
US10/061,130 US6679677B2 (en) | 2001-02-01 | 2002-01-31 | Vacuum pump |
KR1020020005845A KR20020064216A (ko) | 2001-02-01 | 2002-02-01 | 진공 펌프 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2001024998A JP4657463B2 (ja) | 2001-02-01 | 2001-02-01 | 真空ポンプ |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2002227765A JP2002227765A (ja) | 2002-08-14 |
JP2002227765A5 true JP2002227765A5 (ja) | 2007-12-06 |
JP4657463B2 JP4657463B2 (ja) | 2011-03-23 |
Family
ID=18890059
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2001024998A Expired - Fee Related JP4657463B2 (ja) | 2001-02-01 | 2001-02-01 | 真空ポンプ |
Country Status (4)
Country | Link |
---|---|
US (1) | US6679677B2 (ja) |
EP (1) | EP1231383A1 (ja) |
JP (1) | JP4657463B2 (ja) |
KR (1) | KR20020064216A (ja) |
Families Citing this family (20)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4007130B2 (ja) * | 2002-09-10 | 2007-11-14 | 株式会社豊田自動織機 | 真空ポンプ |
DE10305038A1 (de) * | 2003-02-07 | 2004-08-19 | Pfeiffer Vacuum Gmbh | Vakuumpumpanordnung |
ITTO20030421A1 (it) * | 2003-06-05 | 2004-12-06 | Varian Spa | Pompa da vuoto compatta |
JP4499388B2 (ja) * | 2003-08-27 | 2010-07-07 | エドワーズ株式会社 | 分子ポンプおよび結合装置 |
JP4671624B2 (ja) * | 2004-05-25 | 2011-04-20 | エドワーズ株式会社 | 真空ポンプ |
JP2005344610A (ja) * | 2004-06-03 | 2005-12-15 | Boc Edwards Kk | 真空排気装置 |
US7389629B2 (en) * | 2004-07-23 | 2008-06-24 | Reynolds Foil Inc. | Portable vacuum pump for use with reclosable, evacuable containers |
US20100193594A1 (en) * | 2004-12-20 | 2010-08-05 | Edc Automotive, Llc | Electronic thermostat |
WO2006068014A1 (ja) * | 2004-12-20 | 2006-06-29 | Boc Edwards Japan Limited | 端部間の接続構造及び該構造を適用した真空システム |
US20070020115A1 (en) * | 2005-07-01 | 2007-01-25 | The Boc Group, Inc. | Integrated pump apparatus for semiconductor processing |
US7395755B1 (en) | 2006-02-13 | 2008-07-08 | Deese Henry W | Container crusher and method of use thereof |
US8712758B2 (en) | 2007-08-31 | 2014-04-29 | Microsoft Corporation | Coreference resolution in an ambiguity-sensitive natural language processing system |
JP5483684B2 (ja) * | 2009-09-03 | 2014-05-07 | 株式会社大阪真空機器製作所 | 分子ポンプ |
DE102012112492A1 (de) * | 2012-12-18 | 2014-06-18 | Pfeiffer Vacuum Gmbh | Vakuumsystem |
US10037869B2 (en) | 2013-08-13 | 2018-07-31 | Lam Research Corporation | Plasma processing devices having multi-port valve assemblies |
JP6206002B2 (ja) * | 2013-08-30 | 2017-10-04 | 株式会社島津製作所 | ターボ分子ポンプ |
EP3051138B1 (de) * | 2015-01-27 | 2021-03-10 | Pfeiffer Vacuum Gmbh | Vakuumpumpengehäuse, Vakuumpumpe und Verfahren zur Herstellung eines Vakuumpumpengehäuses |
GB201701833D0 (en) * | 2017-02-03 | 2017-03-22 | Edwards Ltd | Pump cooling systems |
EP3657022B1 (de) | 2018-11-22 | 2022-09-07 | Pfeiffer Vacuum Gmbh | Vakuumpumpe mit einem peltierelement |
JP7242321B2 (ja) * | 2019-02-01 | 2023-03-20 | エドワーズ株式会社 | 真空ポンプ及び真空ポンプの制御装置 |
Family Cites Families (19)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2574810B2 (ja) * | 1987-09-11 | 1997-01-22 | 株式会社日立製作所 | 真空ポンプ |
JPH01195993A (ja) * | 1988-01-31 | 1989-08-07 | Shimadzu Corp | ターボ分子ポンプ |
US4926648A (en) * | 1988-03-07 | 1990-05-22 | Toshiba Corp. | Turbomolecular pump and method of operating the same |
US4873833A (en) * | 1988-11-23 | 1989-10-17 | American Telephone Telegraph Company, At&T Bell Laboratories | Apparatus comprising a high-vacuum chamber |
JP2538796B2 (ja) * | 1989-05-09 | 1996-10-02 | 株式会社東芝 | 真空排気装置および真空排気方法 |
JPH048896A (ja) * | 1990-04-25 | 1992-01-13 | Hitachi Ltd | 真空ポンプ |
KR950007378B1 (ko) * | 1990-04-06 | 1995-07-10 | 가부시끼 가이샤 히다찌 세이사꾸쇼 | 진공펌프 |
JPH05172093A (ja) * | 1991-12-24 | 1993-07-09 | Hitachi Ltd | 真空ポンプ |
JP2527398B2 (ja) * | 1992-06-05 | 1996-08-21 | 財団法人真空科学研究所 | タ―ボ分子ポンプ |
DE59305085D1 (de) * | 1992-06-19 | 1997-02-20 | Leybold Ag | Gasreibungsvakuumpumpe |
JPH0612794U (ja) * | 1992-07-13 | 1994-02-18 | 株式会社大阪真空機器製作所 | 複合型真空ポンプの加熱装置 |
JP2719298B2 (ja) * | 1993-07-29 | 1998-02-25 | アプライド マテリアルズ インコーポレイテッド | 真空装置の冷却構造 |
JP3672630B2 (ja) * | 1995-07-21 | 2005-07-20 | 株式会社大阪真空機器製作所 | 分子ポンプ |
IT1296155B1 (it) * | 1996-04-05 | 1999-06-09 | Varian Spa | Rotore di pompa turbomolecolare |
JPH10122143A (ja) * | 1996-10-11 | 1998-05-12 | Anelva Corp | クライオポンプ |
US5938406A (en) * | 1997-04-18 | 1999-08-17 | Varian, Inc. | Rotor for turbomolecular pump |
JPH10306790A (ja) * | 1997-05-01 | 1998-11-17 | Daikin Ind Ltd | 分子ポンプ |
IT1302694B1 (it) * | 1998-10-19 | 2000-09-29 | Getters Spa | Dispositivo di schermatura mobile in funzione della temperatura trapompa getter e pompa turbomolecolare collegate in linea. |
JP2000205126A (ja) * | 1999-01-12 | 2000-07-25 | Canon Inc | 真空容器の排気方法、画像表示装置の製造方法、真空容器の排気装置、及び画像表示装置の製造装置 |
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2001
- 2001-02-01 JP JP2001024998A patent/JP4657463B2/ja not_active Expired - Fee Related
-
2002
- 2002-01-25 EP EP02250514A patent/EP1231383A1/en not_active Withdrawn
- 2002-01-31 US US10/061,130 patent/US6679677B2/en not_active Expired - Lifetime
- 2002-02-01 KR KR1020020005845A patent/KR20020064216A/ko not_active Application Discontinuation