JP2002217169A5 - - Google Patents
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- Publication number
- JP2002217169A5 JP2002217169A5 JP2001007158A JP2001007158A JP2002217169A5 JP 2002217169 A5 JP2002217169 A5 JP 2002217169A5 JP 2001007158 A JP2001007158 A JP 2001007158A JP 2001007158 A JP2001007158 A JP 2001007158A JP 2002217169 A5 JP2002217169 A5 JP 2002217169A5
- Authority
- JP
- Japan
- Prior art keywords
- manufacturing
- semiconductor device
- gas
- substrate
- semiconductor substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004065 semiconductor Substances 0.000 claims 45
- 239000000758 substrate Substances 0.000 claims 28
- 238000004519 manufacturing process Methods 0.000 claims 25
- 239000007789 gas Substances 0.000 claims 24
- 238000004140 cleaning Methods 0.000 claims 6
- 238000001514 detection method Methods 0.000 claims 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims 2
- 229910001873 dinitrogen Inorganic materials 0.000 claims 2
- 238000000034 method Methods 0.000 claims 2
- 238000001020 plasma etching Methods 0.000 claims 2
- 238000005530 etching Methods 0.000 claims 1
- 238000002347 injection Methods 0.000 claims 1
- 239000007924 injection Substances 0.000 claims 1
- 238000009434 installation Methods 0.000 claims 1
- 230000002093 peripheral effect Effects 0.000 claims 1
Priority Applications (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2001007158A JP4016598B2 (ja) | 2001-01-16 | 2001-01-16 | 半導体装置の製造方法 |
| KR1020010029896A KR100856175B1 (ko) | 2001-01-16 | 2001-05-30 | 반도체장치의 제조방법 |
| TW090117583A TW525247B (en) | 2001-01-16 | 2001-07-18 | Method for a manufacturing a semiconductor device |
| US09/939,770 US6713401B2 (en) | 2001-01-16 | 2001-08-28 | Method for manufacturing semiconductor device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2001007158A JP4016598B2 (ja) | 2001-01-16 | 2001-01-16 | 半導体装置の製造方法 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2002217169A JP2002217169A (ja) | 2002-08-02 |
| JP2002217169A5 true JP2002217169A5 (enExample) | 2005-08-04 |
| JP4016598B2 JP4016598B2 (ja) | 2007-12-05 |
Family
ID=18874942
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2001007158A Expired - Fee Related JP4016598B2 (ja) | 2001-01-16 | 2001-01-16 | 半導体装置の製造方法 |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US6713401B2 (enExample) |
| JP (1) | JP4016598B2 (enExample) |
| KR (1) | KR100856175B1 (enExample) |
| TW (1) | TW525247B (enExample) |
Families Citing this family (18)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3997859B2 (ja) * | 2002-07-25 | 2007-10-24 | 株式会社日立製作所 | 半導体装置の製造方法および製造装置 |
| SG140469A1 (en) * | 2002-09-30 | 2008-03-28 | Lam Res Corp | System for substrate processing with meniscus, vacuum, ipa vapor, drying manifold |
| WO2004107426A1 (ja) * | 2003-05-27 | 2004-12-09 | Personal Creation Ltd. | 磁石を備えた基板の処理装置及び処理方法 |
| JP2006167849A (ja) * | 2004-12-15 | 2006-06-29 | Denso Corp | マイクロ構造体の製造方法 |
| JP4933789B2 (ja) | 2006-02-13 | 2012-05-16 | 東京エレクトロン株式会社 | 基板処理装置、基板処理方法及び記憶媒体 |
| CN101331594B (zh) * | 2006-06-22 | 2012-03-28 | 里巴贝鲁株式会社 | 处理装置、处理方法及等离子源 |
| KR100842745B1 (ko) * | 2006-11-30 | 2008-07-01 | 주식회사 하이닉스반도체 | 스캔 인젝터를 가지는 플라즈마 공정 장비 및 공정 방법 |
| JP2008153007A (ja) * | 2006-12-15 | 2008-07-03 | Nisshin:Kk | プラズマ発生装置 |
| JP4503095B2 (ja) | 2007-05-15 | 2010-07-14 | キヤノンアネルバ株式会社 | 半導体素子の製造方法 |
| EP2036856B1 (en) * | 2007-09-04 | 2018-09-12 | Mitsubishi Materials Corporation | Clean bench and method of producing raw material for single crystal silicon |
| WO2009057223A1 (ja) | 2007-11-02 | 2009-05-07 | Canon Anelva Corporation | 表面処理装置およびその基板処理方法 |
| JP5452894B2 (ja) * | 2008-07-17 | 2014-03-26 | 東京エレクトロン株式会社 | 基板処理方法、基板処理装置および記憶媒体 |
| JP5583503B2 (ja) * | 2010-07-14 | 2014-09-03 | 東京エレクトロン株式会社 | 基板洗浄装置、およびこれを備える塗布現像装置 |
| US8844793B2 (en) * | 2010-11-05 | 2014-09-30 | Raytheon Company | Reducing formation of oxide on solder |
| CN104425289B (zh) * | 2013-09-11 | 2017-12-15 | 先进科技新加坡有限公司 | 利用激发的混合气体的晶粒安装装置和方法 |
| US10895539B2 (en) * | 2017-10-20 | 2021-01-19 | Lam Research Corporation | In-situ chamber clean end point detection systems and methods using computer vision systems |
| CN114743853A (zh) * | 2021-01-07 | 2022-07-12 | 中国科学院微电子研究所 | 一种半导体处理腔室、设备及半导体处理方法 |
| US12406837B2 (en) * | 2022-06-15 | 2025-09-02 | Applied Materials, Inc. | Reaction cell for species sensing |
Family Cites Families (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE68909422T2 (de) * | 1988-01-11 | 1994-01-27 | Etec Systems Inc | Berührungsloses Reinigungsverfahren für Oberflächen mit Hilfe eines flachen Luftkissenlagers. |
| US5403434A (en) * | 1994-01-06 | 1995-04-04 | Texas Instruments Incorporated | Low-temperature in-situ dry cleaning process for semiconductor wafer |
| JP3348804B2 (ja) | 1994-09-20 | 2002-11-20 | 株式会社日立製作所 | エッチング後処理方法 |
| JP3563462B2 (ja) | 1994-11-15 | 2004-09-08 | 松下エコシステムズ株式会社 | 活性空気による乾式洗浄方法とその装置、および除電方法 |
| JPH0917776A (ja) | 1995-06-27 | 1997-01-17 | Sony Corp | 半導体装置の製造方法及び半導体製造装置 |
| US5914278A (en) * | 1997-01-23 | 1999-06-22 | Gasonics International | Backside etch process chamber and method |
| JPH10256231A (ja) * | 1997-03-10 | 1998-09-25 | Sony Corp | ウエハ処理装置及びウエハ処理方法 |
| US6042687A (en) * | 1997-06-30 | 2000-03-28 | Lam Research Corporation | Method and apparatus for improving etch and deposition uniformity in plasma semiconductor processing |
-
2001
- 2001-01-16 JP JP2001007158A patent/JP4016598B2/ja not_active Expired - Fee Related
- 2001-05-30 KR KR1020010029896A patent/KR100856175B1/ko not_active Expired - Fee Related
- 2001-07-18 TW TW090117583A patent/TW525247B/zh not_active IP Right Cessation
- 2001-08-28 US US09/939,770 patent/US6713401B2/en not_active Expired - Fee Related
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