JP2002217093A5 - - Google Patents

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Publication number
JP2002217093A5
JP2002217093A5 JP2001014209A JP2001014209A JP2002217093A5 JP 2002217093 A5 JP2002217093 A5 JP 2002217093A5 JP 2001014209 A JP2001014209 A JP 2001014209A JP 2001014209 A JP2001014209 A JP 2001014209A JP 2002217093 A5 JP2002217093 A5 JP 2002217093A5
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JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2001014209A
Other versions
JP2002217093A (ja
JP4541571B2 (ja
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Publication date
Application filed filed Critical
Priority to JP2001014209A priority Critical patent/JP4541571B2/ja
Priority claimed from JP2001014209A external-priority patent/JP4541571B2/ja
Priority to US10/044,937 priority patent/US6810299B2/en
Publication of JP2002217093A publication Critical patent/JP2002217093A/ja
Publication of JP2002217093A5 publication Critical patent/JP2002217093A5/ja
Application granted granted Critical
Publication of JP4541571B2 publication Critical patent/JP4541571B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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JP2001014209A 2001-01-23 2001-01-23 半導体製造装置 Expired - Fee Related JP4541571B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2001014209A JP4541571B2 (ja) 2001-01-23 2001-01-23 半導体製造装置
US10/044,937 US6810299B2 (en) 2001-01-23 2002-01-15 Semiconductor manufacturing apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2001014209A JP4541571B2 (ja) 2001-01-23 2001-01-23 半導体製造装置

Publications (3)

Publication Number Publication Date
JP2002217093A JP2002217093A (ja) 2002-08-02
JP2002217093A5 true JP2002217093A5 (ja) 2008-03-06
JP4541571B2 JP4541571B2 (ja) 2010-09-08

Family

ID=18880937

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2001014209A Expired - Fee Related JP4541571B2 (ja) 2001-01-23 2001-01-23 半導体製造装置

Country Status (2)

Country Link
US (1) US6810299B2 (ja)
JP (1) JP4541571B2 (ja)

Families Citing this family (16)

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JP2003162901A (ja) * 2001-11-27 2003-06-06 Fujitsu Display Technologies Corp バックライトおよび液晶表示装置
JP2004158510A (ja) * 2002-11-01 2004-06-03 Canon Inc デバイス製造装置
US7253383B2 (en) * 2002-12-03 2007-08-07 Samsung Electronics Co., Ltd. Transformer assembly for microwave oven, method for manufacturing the same, and microwave oven having the same
JP2004283484A (ja) * 2003-03-25 2004-10-14 Pentax Corp 内視鏡用光源装置
US7618290B2 (en) * 2003-11-07 2009-11-17 Koninklijke Philips Electronics N.V. Starter housing for gas discharge lamp, and method of mounting same
US7292310B2 (en) * 2004-07-02 2007-11-06 Asml Netherlands B.V. Lithographic apparatus and a device manufacturing method
JP2006261273A (ja) * 2005-03-16 2006-09-28 Canon Inc チャンバおよびこれを用いた露光装置
JP2007142265A (ja) * 2005-11-21 2007-06-07 Fuji Koken Kk 露光装置及び露光方法
US8571396B2 (en) * 2006-06-26 2013-10-29 Tp Solar, Inc. Rapid thermal firing IR conveyor furnace having high intensity heating section
US9301340B2 (en) 2006-06-26 2016-03-29 Tp Solar, Inc. IR conveyor furnace having single belt with multiple independently controlled processing lanes
US20120181265A1 (en) * 2010-07-15 2012-07-19 Despatch Industries Limited Partnership Firing furnace configuration for thermal processing system
US9354630B2 (en) 2011-05-19 2016-05-31 Universal Laser Systems, Inc. Flexible laser manufacturing systems and associated methods of use and manufacture
US20140313493A1 (en) 2013-04-18 2014-10-23 E I Du Pont De Nemours And Company Exposure apparatus and a method for exposing a photosensitive element and a method for preparing a printing form from the photosensitive element
CN106100733A (zh) * 2016-06-14 2016-11-09 苏州迈奇杰智能技术有限公司 一种家用光通信移动端控制节能系统
JP7115735B2 (ja) * 2018-05-18 2022-08-09 株式会社ユメックス Ｖｕｖ光のフラッシュランプ照射処理装置

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JPS5899205A (ja) * 1981-12-09 1983-06-13 株式会社日立製作所 密閉型制御盤の冷却装置
JPS62239533A (ja) * 1986-04-11 1987-10-20 Nec Corp 超高圧水銀ランプ用ハウジング
JPS6327015A (ja) * 1986-07-18 1988-02-04 Nec Corp 縮小投影露光装置
JPH0729081B2 (ja) * 1987-09-14 1995-04-05 ウシオ電機株式会社 光照射装置
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JPH07201712A (ja) * 1993-12-27 1995-08-04 Dainippon Screen Mfg Co Ltd 照度分布調整装置
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JP3437352B2 (ja) * 1995-10-02 2003-08-18 キヤノン株式会社 照明光学系及び光源装置
JP4011643B2 (ja) 1996-01-05 2007-11-21 キヤノン株式会社 半導体製造装置
JP3610175B2 (ja) * 1996-10-29 2005-01-12 キヤノン株式会社 投影露光装置及びそれを用いた半導体デバイスの製造方法
JP3645389B2 (ja) * 1997-01-13 2005-05-11 富士写真フイルム株式会社 光源位置調整方法および光源装置
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JPH11162839A (ja) * 1997-12-01 1999-06-18 Canon Inc 露光装置
JPH11258815A (ja) * 1998-03-10 1999-09-24 Nikon Corp 光源ユニットおよび露光装置
JPH11283893A (ja) * 1998-03-30 1999-10-15 Canon Inc デバイス製造装置
JPH11338163A (ja) * 1998-05-21 1999-12-10 Nikon Corp 照明装置、露光装置及び照明方法
JP3441973B2 (ja) 1998-06-30 2003-09-02 キヤノン株式会社 露光装置およびデバイス製造方法
US6247830B1 (en) * 1998-07-29 2001-06-19 Russell Winnett Heat shield for agricultural light bulb
JP2000181075A (ja) * 1998-12-11 2000-06-30 Ushio Inc 露光装置におけるランプ点灯制御方法
JP2000260698A (ja) * 1999-03-09 2000-09-22 Canon Inc 投影露光装置およびそれを用いた半導体デバイスの製造方法
US6333602B1 (en) * 1999-12-14 2001-12-25 Exfo Photonic Solutions Inc. Smart light source with integrated operational parameters data storage capability
US6792321B2 (en) * 2000-03-02 2004-09-14 Electro Standards Laboratories Remote web-based control

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