JP2002195755A5 - - Google Patents
Download PDFInfo
- Publication number
- JP2002195755A5 JP2002195755A5 JP2001241962A JP2001241962A JP2002195755A5 JP 2002195755 A5 JP2002195755 A5 JP 2002195755A5 JP 2001241962 A JP2001241962 A JP 2001241962A JP 2001241962 A JP2001241962 A JP 2001241962A JP 2002195755 A5 JP2002195755 A5 JP 2002195755A5
- Authority
- JP
- Japan
- Prior art keywords
- heat treatment
- air supply
- exhaust
- treated
- gas
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010438 heat treatment Methods 0.000 description 533
- 239000007789 gas Substances 0.000 description 182
- 230000007246 mechanism Effects 0.000 description 77
- 238000001035 drying Methods 0.000 description 76
- 230000032258 transport Effects 0.000 description 64
- 239000000758 substrate Substances 0.000 description 61
- 238000000034 method Methods 0.000 description 32
- 238000004519 manufacturing process Methods 0.000 description 31
- 239000003960 organic solvent Substances 0.000 description 29
- 239000011521 glass Substances 0.000 description 22
- 238000011068 loading method Methods 0.000 description 20
- 238000011282 treatment Methods 0.000 description 17
- 238000012545 processing Methods 0.000 description 14
- 239000011148 porous material Substances 0.000 description 13
- 239000000463 material Substances 0.000 description 12
- 239000000428 dust Substances 0.000 description 11
- 230000002829 reductive effect Effects 0.000 description 11
- 229910052782 aluminium Inorganic materials 0.000 description 10
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 10
- 238000012546 transfer Methods 0.000 description 10
- 229910001220 stainless steel Inorganic materials 0.000 description 9
- 239000010935 stainless steel Substances 0.000 description 9
- 239000012528 membrane Substances 0.000 description 8
- 239000000047 product Substances 0.000 description 8
- 239000000126 substance Substances 0.000 description 8
- 239000002904 solvent Substances 0.000 description 6
- 230000008569 process Effects 0.000 description 5
- 239000000523 sample Substances 0.000 description 5
- 238000009834 vaporization Methods 0.000 description 5
- 230000008016 vaporization Effects 0.000 description 5
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 5
- 239000004809 Teflon Substances 0.000 description 4
- 229920006362 Teflon® Polymers 0.000 description 4
- 238000007599 discharging Methods 0.000 description 4
- 238000001704 evaporation Methods 0.000 description 4
- 230000008020 evaporation Effects 0.000 description 4
- 230000002411 adverse Effects 0.000 description 3
- 238000013459 approach Methods 0.000 description 3
- 230000008859 change Effects 0.000 description 3
- 239000011248 coating agent Substances 0.000 description 3
- 238000000576 coating method Methods 0.000 description 3
- 230000007423 decrease Effects 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 229920006015 heat resistant resin Polymers 0.000 description 3
- 229920005989 resin Polymers 0.000 description 3
- 239000011347 resin Substances 0.000 description 3
- 230000002441 reversible effect Effects 0.000 description 3
- 239000007921 spray Substances 0.000 description 3
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 2
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 description 2
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- CPLXHLVBOLITMK-UHFFFAOYSA-N Magnesium oxide Chemical compound [Mg]=O CPLXHLVBOLITMK-UHFFFAOYSA-N 0.000 description 2
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 2
- 238000000137 annealing Methods 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 229920005549 butyl rubber Polymers 0.000 description 2
- 239000000919 ceramic Substances 0.000 description 2
- 238000009833 condensation Methods 0.000 description 2
- 230000005494 condensation Effects 0.000 description 2
- 230000003247 decreasing effect Effects 0.000 description 2
- 230000006866 deterioration Effects 0.000 description 2
- 230000005611 electricity Effects 0.000 description 2
- 238000010304 firing Methods 0.000 description 2
- 238000007667 floating Methods 0.000 description 2
- 239000011737 fluorine Substances 0.000 description 2
- 229910052731 fluorine Inorganic materials 0.000 description 2
- 239000006260 foam Substances 0.000 description 2
- 239000003365 glass fiber Substances 0.000 description 2
- 229910001026 inconel Inorganic materials 0.000 description 2
- 239000011810 insulating material Substances 0.000 description 2
- 238000009413 insulation Methods 0.000 description 2
- 239000003921 oil Substances 0.000 description 2
- 230000002093 peripheral effect Effects 0.000 description 2
- 230000000379 polymerizing effect Effects 0.000 description 2
- 238000007639 printing Methods 0.000 description 2
- 239000011435 rock Substances 0.000 description 2
- 229910052709 silver Inorganic materials 0.000 description 2
- 239000004332 silver Substances 0.000 description 2
- 239000007787 solid Substances 0.000 description 2
- 238000005507 spraying Methods 0.000 description 2
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 1
- 229920000181 Ethylene propylene rubber Polymers 0.000 description 1
- WHXSMMKQMYFTQS-UHFFFAOYSA-N Lithium Chemical compound [Li] WHXSMMKQMYFTQS-UHFFFAOYSA-N 0.000 description 1
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 229910000831 Steel Inorganic materials 0.000 description 1
- 229910001069 Ti alloy Inorganic materials 0.000 description 1
- 230000001133 acceleration Effects 0.000 description 1
- 238000005273 aeration Methods 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 238000007664 blowing Methods 0.000 description 1
- 229910010293 ceramic material Inorganic materials 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 230000003749 cleanliness Effects 0.000 description 1
- 238000002485 combustion reaction Methods 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000018044 dehydration Effects 0.000 description 1
- 238000006297 dehydration reaction Methods 0.000 description 1
- 239000007772 electrode material Substances 0.000 description 1
- 239000012467 final product Substances 0.000 description 1
- NBVXSUQYWXRMNV-UHFFFAOYSA-N fluoromethane Chemical compound FC NBVXSUQYWXRMNV-UHFFFAOYSA-N 0.000 description 1
- 239000006261 foam material Substances 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 239000013067 intermediate product Substances 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 238000002955 isolation Methods 0.000 description 1
- 229910052744 lithium Inorganic materials 0.000 description 1
- 239000000395 magnesium oxide Substances 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 239000005011 phenolic resin Substances 0.000 description 1
- 229920000642 polymer Polymers 0.000 description 1
- 230000002250 progressing effect Effects 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 230000000717 retained effect Effects 0.000 description 1
- 238000007650 screen-printing Methods 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 229920002379 silicone rubber Polymers 0.000 description 1
- 239000004945 silicone rubber Substances 0.000 description 1
- 238000001179 sorption measurement Methods 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
- 230000002195 synergetic effect Effects 0.000 description 1
- 238000002834 transmittance Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2001241962A JP2002195755A (ja) | 2000-10-16 | 2001-08-09 | 熱処理装置 |
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000315492 | 2000-10-16 | ||
| JP2000-315492 | 2000-10-16 | ||
| JP2001241962A JP2002195755A (ja) | 2000-10-16 | 2001-08-09 | 熱処理装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2002195755A JP2002195755A (ja) | 2002-07-10 |
| JP2002195755A5 true JP2002195755A5 (enExample) | 2005-04-14 |
Family
ID=26602171
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2001241962A Pending JP2002195755A (ja) | 2000-10-16 | 2001-08-09 | 熱処理装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2002195755A (enExample) |
Families Citing this family (18)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4048242B2 (ja) | 2002-05-29 | 2008-02-20 | エスペック株式会社 | 熱処理装置 |
| JP4348122B2 (ja) * | 2003-06-18 | 2009-10-21 | エスペック株式会社 | 加熱装置 |
| JP3917994B2 (ja) * | 2004-08-24 | 2007-05-23 | 株式会社石井表記 | 塗布膜用乾燥炉 |
| US20060103059A1 (en) | 2004-10-29 | 2006-05-18 | Crafton Scott P | High pressure heat treatment system |
| JP2008157541A (ja) * | 2006-12-25 | 2008-07-10 | Ngk Insulators Ltd | フラットパネル熱処理炉 |
| JP4967013B2 (ja) * | 2009-12-11 | 2012-07-04 | 東京エレクトロン株式会社 | 基板処理装置、基板処理方法及びこの基板処理方法を実行させるためのプログラムを記録した記録媒体 |
| JP2012084637A (ja) * | 2010-10-08 | 2012-04-26 | Espec Corp | 熱処理装置 |
| JP2012225557A (ja) * | 2011-04-19 | 2012-11-15 | Panasonic Corp | 熱処理装置 |
| JP5877358B2 (ja) * | 2011-04-22 | 2016-03-08 | パナソニックＩｐマネジメント株式会社 | 熱処理装置 |
| DE102013223150A1 (de) | 2013-11-13 | 2015-05-28 | Sandvik Materials Technology Deutschland Gmbh | Trockner und Verfahren zum Trocknen von flächigen Materialien |
| DE102013223151A1 (de) * | 2013-11-13 | 2015-05-13 | Sandvik Materials Technology Deutschland Gmbh | Vorrichtung und Verfahren zum Behandeln von flächigem Material |
| JP6275659B2 (ja) * | 2015-02-20 | 2018-02-07 | 日本碍子株式会社 | 連続式焼成炉 |
| KR101941097B1 (ko) * | 2015-11-24 | 2019-01-23 | 주식회사 원익테라세미콘 | 가스 공급 및 배기 장치 |
| JP6660246B2 (ja) * | 2016-05-02 | 2020-03-11 | 株式会社エナテック | 乾燥装置、及び塗布システム |
| KR102391759B1 (ko) * | 2017-12-15 | 2022-04-28 | 시바우라 메카트로닉스 가부시끼가이샤 | 유기막 형성 장치 |
| WO2022049819A1 (ja) * | 2020-09-01 | 2022-03-10 | 日本碍子株式会社 | セラミックスローラー |
| JP7366086B2 (ja) * | 2021-07-29 | 2023-10-20 | 芝浦メカトロニクス株式会社 | 加熱処理装置 |
| KR102749787B1 (ko) * | 2021-12-06 | 2025-01-03 | 주식회사 한국제이텍트써모시스템 | 열처리로의 급배기 장치 |
-
2001
- 2001-08-09 JP JP2001241962A patent/JP2002195755A/ja active Pending
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP2002195755A5 (enExample) | ||
| JP2002195755A (ja) | 熱処理装置 | |
| CN1939675A (zh) | 机器人的机械手及使用该机械手的工件搬送机器人 | |
| CN1196177C (zh) | 加热炉与半导体基板装载治具的组合及半导体装置的制造方法 | |
| WO2001092800A1 (en) | Heat treatment apparatus | |
| CN101256051B (zh) | 热处理装置 | |
| JP4936567B2 (ja) | 熱処理装置 | |
| JP5600885B2 (ja) | 有機ｅｌ用乾燥装置 | |
| JP2001241855A (ja) | 連続加熱炉 | |
| JP3683166B2 (ja) | 基板の熱処理方法及びそれに用いる連続式熱処理炉 | |
| JP3667270B2 (ja) | 基板の熱処理方法およびそのための炉設備 | |
| JP2001338578A5 (enExample) | ||
| JP2008311250A (ja) | リフローシステムおよびリフロー方法 | |
| CN1517962A (zh) | 基板的热处理方法以及热处理炉 | |
| KR101546320B1 (ko) | 기판 열처리 장치 | |
| JP2002122385A (ja) | 熱処理装置 | |
| JP2004356124A (ja) | 多孔質セラミックスを用いた半導体製造装置用部品及び半導体製造装置 | |
| JP2001012848A (ja) | 板状製品のペースト乾燥方法 | |
| JP2010043795A (ja) | 連続雰囲気炉 | |
| CN101839644A (zh) | 基板处理系统和基板处理方法 | |
| KR200318436Y1 (ko) | 피디피 페이스트막 소성용 연속소성로 | |
| JP2002206863A (ja) | 連続式熱処理炉 | |
| JP4020645B2 (ja) | 外熱式ロータリキルン | |
| JP4233350B2 (ja) | 膜形成素材を含む基板の乾燥方法及び乾燥炉 | |
| JP2003322474A (ja) | 熱処理炉の給気管及び排気口 |