JP2002144220A5 - - Google Patents

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Publication number
JP2002144220A5
JP2002144220A5 JP2001285787A JP2001285787A JP2002144220A5 JP 2002144220 A5 JP2002144220 A5 JP 2002144220A5 JP 2001285787 A JP2001285787 A JP 2001285787A JP 2001285787 A JP2001285787 A JP 2001285787A JP 2002144220 A5 JP2002144220 A5 JP 2002144220A5
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Japan
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JP2001285787A
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JP4926351B2 (ja
JP2002144220A (ja
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JP2001285787A 2000-09-19 2001-09-19 ミクロ−テクスチャーを備えた研磨パッド Expired - Lifetime JP4926351B2 (ja)

Applications Claiming Priority (2)

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US23374700P 2000-09-19 2000-09-19
US60/233,747 2000-09-19

Publications (3)

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JP2002144220A JP2002144220A (ja) 2002-05-21
JP2002144220A5 true JP2002144220A5 (enExample) 2008-10-23
JP4926351B2 JP4926351B2 (ja) 2012-05-09

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JP2001285787A Expired - Lifetime JP4926351B2 (ja) 2000-09-19 2001-09-19 ミクロ−テクスチャーを備えた研磨パッド

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US (1) US6641471B1 (enExample)
EP (1) EP1320443B1 (enExample)
JP (1) JP4926351B2 (enExample)
KR (1) KR100571448B1 (enExample)
DE (1) DE60110820T2 (enExample)
TW (1) TW491755B (enExample)
WO (1) WO2002024415A1 (enExample)

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