JP2002110865A5 - - Google Patents

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Publication number
JP2002110865A5
JP2002110865A5 JP2000295230A JP2000295230A JP2002110865A5 JP 2002110865 A5 JP2002110865 A5 JP 2002110865A5 JP 2000295230 A JP2000295230 A JP 2000295230A JP 2000295230 A JP2000295230 A JP 2000295230A JP 2002110865 A5 JP2002110865 A5 JP 2002110865A5
Authority
JP
Japan
Prior art keywords
terminal
region
interposer
substrate
semiconductor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2000295230A
Other languages
English (en)
Japanese (ja)
Other versions
JP2002110865A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2000295230A priority Critical patent/JP2002110865A/ja
Priority claimed from JP2000295230A external-priority patent/JP2002110865A/ja
Priority to US09/957,510 priority patent/US6614106B2/en
Priority to TW090123478A priority patent/TW538511B/zh
Publication of JP2002110865A publication Critical patent/JP2002110865A/ja
Publication of JP2002110865A5 publication Critical patent/JP2002110865A5/ja
Pending legal-status Critical Current

Links

JP2000295230A 2000-09-27 2000-09-27 回路装置 Pending JP2002110865A (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2000295230A JP2002110865A (ja) 2000-09-27 2000-09-27 回路装置
US09/957,510 US6614106B2 (en) 2000-09-27 2001-09-21 Stacked circuit device and method for evaluating an integrated circuit substrate using the stacked circuit device
TW090123478A TW538511B (en) 2000-09-27 2001-09-24 Stacked circuit device and method for evaluating an integrated circuit substrate using the stacked circuit device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2000295230A JP2002110865A (ja) 2000-09-27 2000-09-27 回路装置

Publications (2)

Publication Number Publication Date
JP2002110865A JP2002110865A (ja) 2002-04-12
JP2002110865A5 true JP2002110865A5 (enExample) 2005-06-16

Family

ID=18777689

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2000295230A Pending JP2002110865A (ja) 2000-09-27 2000-09-27 回路装置

Country Status (3)

Country Link
US (1) US6614106B2 (enExample)
JP (1) JP2002110865A (enExample)
TW (1) TW538511B (enExample)

Families Citing this family (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6525407B1 (en) * 2001-06-29 2003-02-25 Novellus Systems, Inc. Integrated circuit package
US20030150640A1 (en) * 2002-02-14 2003-08-14 Crippen Warren Stuart Silicon space transformer and method of manufacturing same
JP2004111676A (ja) 2002-09-19 2004-04-08 Toshiba Corp 半導体装置、半導体パッケージ用部材、半導体装置の製造方法
JP3828473B2 (ja) 2002-09-30 2006-10-04 株式会社東芝 積層型半導体装置及びその製造方法
US20040084766A1 (en) * 2002-10-30 2004-05-06 Pei-Ying Shieh System-in-a-package device
JP2004327951A (ja) * 2003-03-06 2004-11-18 Shinko Electric Ind Co Ltd 半導体装置
US6819001B2 (en) * 2003-03-14 2004-11-16 General Electric Company Interposer, interposer package and device assembly employing the same
US7566960B1 (en) 2003-10-31 2009-07-28 Xilinx, Inc. Interposing structure
US7049170B2 (en) * 2003-12-17 2006-05-23 Tru-Si Technologies, Inc. Integrated circuits and packaging substrates with cavities, and attachment methods including insertion of protruding contact pads into cavities
US7060601B2 (en) * 2003-12-17 2006-06-13 Tru-Si Technologies, Inc. Packaging substrates for integrated circuits and soldering methods
JP4377269B2 (ja) * 2004-03-19 2009-12-02 Ｎｅｃエレクトロニクス株式会社 半導体装置
JP4353861B2 (ja) 2004-06-30 2009-10-28 Ｎｅｃエレクトロニクス株式会社 半導体装置
JP4512545B2 (ja) 2005-10-27 2010-07-28 パナソニック株式会社 積層型半導体モジュール
WO2008007258A2 (en) * 2006-06-20 2008-01-17 Nxp B.V. Power amplifier assembly
TWI326908B (en) * 2006-09-11 2010-07-01 Ind Tech Res Inst Packaging structure and fabricating method thereof
US20080192452A1 (en) * 2007-02-12 2008-08-14 Randall Michael S Passive electronic device
WO2011001992A1 (ja) 2009-06-30 2011-01-06 日本電気株式会社 半導体装置、該装置に用いられる実装基板及び該実装基板の製造方法
JP5450188B2 (ja) * 2010-03-16 2014-03-26 株式会社東芝 放射線検出装置、放射線検出装置の製造方法および画像撮影装置
US9082763B2 (en) * 2012-03-15 2015-07-14 Taiwan Semiconductor Manufacturing Company, Ltd. Joint structure for substrates and methods of forming
US10068181B1 (en) 2015-04-27 2018-09-04 Rigetti & Co, Inc. Microwave integrated quantum circuits with cap wafer and methods for making the same
WO2018182598A1 (en) * 2017-03-29 2018-10-04 Intel Corporation Side mounted interconnect bridges
US11121301B1 (en) 2017-06-19 2021-09-14 Rigetti & Co, Inc. Microwave integrated quantum circuits with cap wafers and their methods of manufacture

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4811082A (en) * 1986-11-12 1989-03-07 International Business Machines Corporation High performance integrated circuit packaging structure
US5177594A (en) * 1991-01-09 1993-01-05 International Business Machines Corporation Semiconductor chip interposer module with engineering change wiring and distributed decoupling capacitance
JPH05211202A (ja) 1991-06-27 1993-08-20 Motorola Inc 複合フリップ・チップ半導体装置とその製造およびバーンインの方法
JPH10150141A (ja) 1996-11-15 1998-06-02 Sony Corp 半導体装置及びこの半導体装置の実装方法
JP3604248B2 (ja) * 1997-02-25 2004-12-22 沖電気工業株式会社 半導体装置の製造方法
JP3914615B2 (ja) 1997-08-19 2007-05-16 住友電気工業株式会社 半導体発光素子及びその製造方法
US6281042B1 (en) * 1998-08-31 2001-08-28 Micron Technology, Inc. Structure and method for a high performance electronic packaging assembly
US6137167A (en) * 1998-11-24 2000-10-24 Micron Technology, Inc. Multichip module with built in repeaters and method
JP2000183081A (ja) * 1998-12-16 2000-06-30 Matsushita Electronics Industry Corp 半導体装置の製造方法および製造装置
JP2000323701A (ja) 1999-05-10 2000-11-24 Citizen Watch Co Ltd 半導体装置およびその製造方法

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