JP2001501379A5 - - Google Patents

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Publication number
JP2001501379A5
JP2001501379A5 JP1998516558A JP51655898A JP2001501379A5 JP 2001501379 A5 JP2001501379 A5 JP 2001501379A5 JP 1998516558 A JP1998516558 A JP 1998516558A JP 51655898 A JP51655898 A JP 51655898A JP 2001501379 A5 JP2001501379 A5 JP 2001501379A5
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JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Application number
JP1998516558A
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English (en)
Japanese (ja)
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JP2001501379A (ja
JP4263245B2 (ja
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Priority claimed from US08/722,371 external-priority patent/US5993594A/en
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Publication of JP2001501379A publication Critical patent/JP2001501379A/ja
Publication of JP2001501379A5 publication Critical patent/JP2001501379A5/ja
Application granted granted Critical
Publication of JP4263245B2 publication Critical patent/JP4263245B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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JP51655898A 1996-09-30 1997-09-17 パーティクル制御方法及びプラズマ処理チャンバー Expired - Fee Related JP4263245B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US08/722,371 1996-09-30
US08/722,371 US5993594A (en) 1996-09-30 1996-09-30 Particle controlling method and apparatus for a plasma processing chamber
PCT/US1997/016133 WO1998014980A1 (en) 1996-09-30 1997-09-17 Particle controlling method and plasma processing chamber

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2008111896A Division JP4891287B2 (ja) 1996-09-30 2008-04-22 プラズマ処理チャンバー、チャンバー要素及びその製造方法

Publications (3)

Publication Number Publication Date
JP2001501379A JP2001501379A (ja) 2001-01-30
JP2001501379A5 true JP2001501379A5 (https=) 2005-05-12
JP4263245B2 JP4263245B2 (ja) 2009-05-13

Family

ID=24901571

Family Applications (2)

Application Number Title Priority Date Filing Date
JP51655898A Expired - Fee Related JP4263245B2 (ja) 1996-09-30 1997-09-17 パーティクル制御方法及びプラズマ処理チャンバー
JP2008111896A Expired - Fee Related JP4891287B2 (ja) 1996-09-30 2008-04-22 プラズマ処理チャンバー、チャンバー要素及びその製造方法

Family Applications After (1)

Application Number Title Priority Date Filing Date
JP2008111896A Expired - Fee Related JP4891287B2 (ja) 1996-09-30 2008-04-22 プラズマ処理チャンバー、チャンバー要素及びその製造方法

Country Status (7)

Country Link
US (2) US5993594A (https=)
EP (1) EP0938740B1 (https=)
JP (2) JP4263245B2 (https=)
KR (2) KR100615067B1 (https=)
AT (1) ATE416474T1 (https=)
DE (1) DE69739145D1 (https=)
WO (1) WO1998014980A1 (https=)

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