JP2001244391A - マルチチップモジュールの冷却構造 - Google Patents

マルチチップモジュールの冷却構造

Info

Publication number
JP2001244391A
JP2001244391A JP2000343677A JP2000343677A JP2001244391A JP 2001244391 A JP2001244391 A JP 2001244391A JP 2000343677 A JP2000343677 A JP 2000343677A JP 2000343677 A JP2000343677 A JP 2000343677A JP 2001244391 A JP2001244391 A JP 2001244391A
Authority
JP
Japan
Prior art keywords
electronic element
heat
chip module
cooling
chip
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2000343677A
Other languages
English (en)
Japanese (ja)
Other versions
JP2001244391A5 (https=
Inventor
Makoto Imai
誠 今井
Hisanori Ogawa
尚紀 小川
Yasushi Yamada
靖 山田
Takashi Kojima
崇 小島
Yuji Yagi
雄二 八木
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toyota Central R&D Labs Inc
Original Assignee
Toyota Central R&D Labs Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toyota Central R&D Labs Inc filed Critical Toyota Central R&D Labs Inc
Priority to JP2000343677A priority Critical patent/JP2001244391A/ja
Priority to DE60043767T priority patent/DE60043767D1/de
Priority to EP00127971A priority patent/EP1111677B1/en
Priority to US09/747,517 priority patent/US20010022395A1/en
Publication of JP2001244391A publication Critical patent/JP2001244391A/ja
Priority to US10/262,865 priority patent/US6969907B2/en
Publication of JP2001244391A5 publication Critical patent/JP2001244391A5/ja
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W40/00—Arrangements for thermal protection or thermal control
    • H10W40/20—Arrangements for cooling
    • H10W40/22—Arrangements for cooling characterised by their shape, e.g. having conical or cylindrical projections
    • H10W40/226—Arrangements for cooling characterised by their shape, e.g. having conical or cylindrical projections characterised by projecting parts, e.g. fins to increase surface area
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W90/00—Package configurations
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00—Interconnections or connectors in packages
    • H10W72/071—Connecting or disconnecting
    • H10W72/073—Connecting or disconnecting of die-attach connectors
    • H10W72/07351—Connecting or disconnecting of die-attach connectors characterised by changes in properties of the die-attach connectors during connecting
    • H10W72/07354—Connecting or disconnecting of die-attach connectors characterised by changes in properties of the die-attach connectors during connecting changes in dispositions
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00—Interconnections or connectors in packages
    • H10W72/30—Die-attach connectors
    • H10W72/341—Dispositions of die-attach connectors, e.g. layouts
    • H10W72/347—Dispositions of multiple die-attach connectors
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W90/00—Package configurations
    • H10W90/701—Package configurations characterised by the relative positions of pads or connectors relative to package parts
    • H10W90/731—Package configurations characterised by the relative positions of pads or connectors relative to package parts of die-attach connectors
    • H10W90/734—Package configurations characterised by the relative positions of pads or connectors relative to package parts of die-attach connectors between a chip and a stacked insulating package substrate, interposer or RDL
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W90/00—Package configurations
    • H10W90/701—Package configurations characterised by the relative positions of pads or connectors relative to package parts
    • H10W90/731—Package configurations characterised by the relative positions of pads or connectors relative to package parts of die-attach connectors
    • H10W90/736—Package configurations characterised by the relative positions of pads or connectors relative to package parts of die-attach connectors between a chip and a stacked lead frame, conducting package substrate or heat sink
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S257/00—Active solid-state devices, e.g. transistors, solid-state diodes
    • Y10S257/93—Thermoelectric, e.g. peltier effect cooling

Landscapes

  • Cooling Or The Like Of Semiconductors Or Solid State Devices (AREA)
JP2000343677A 1999-12-21 2000-11-10 マルチチップモジュールの冷却構造 Pending JP2001244391A (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP2000343677A JP2001244391A (ja) 1999-12-21 2000-11-10 マルチチップモジュールの冷却構造
DE60043767T DE60043767D1 (de) 1999-12-21 2000-12-20 Kühlstruktur eines Multi-Chip-Moduls
EP00127971A EP1111677B1 (en) 1999-12-21 2000-12-20 Cooling structure for a multichip module
US09/747,517 US20010022395A1 (en) 1999-12-21 2000-12-21 Cooling structure for multichip module
US10/262,865 US6969907B2 (en) 1999-12-21 2002-10-03 Cooling structure for multichip module

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP36205899 1999-12-21
JP11-362058 1999-12-21
JP2000343677A JP2001244391A (ja) 1999-12-21 2000-11-10 マルチチップモジュールの冷却構造

Publications (2)

Publication Number Publication Date
JP2001244391A true JP2001244391A (ja) 2001-09-07
JP2001244391A5 JP2001244391A5 (https=) 2007-12-06

Family

ID=26581343

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2000343677A Pending JP2001244391A (ja) 1999-12-21 2000-11-10 マルチチップモジュールの冷却構造

Country Status (4)

Country Link
US (2) US20010022395A1 (https=)
EP (1) EP1111677B1 (https=)
JP (1) JP2001244391A (https=)
DE (1) DE60043767D1 (https=)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006066464A (ja) * 2004-08-24 2006-03-09 Toyota Industries Corp 半導体装置
JP2014187083A (ja) * 2013-03-22 2014-10-02 Casio Comput Co Ltd 回路基板構造、及び電子機器
JP2015082960A (ja) * 2013-10-24 2015-04-27 株式会社オートネットワーク技術研究所 Ｄｃ−ｄｃコンバータ装置
WO2018164160A1 (ja) * 2017-03-10 2018-09-13 株式会社村田製作所 モジュール

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* Cited by examiner, † Cited by third party
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DE10102750B4 (de) * 2001-01-22 2006-04-20 Siemens Ag Schaltungsanordnung
JP3627738B2 (ja) * 2001-12-27 2005-03-09 株式会社デンソー 半導体装置
JP3673776B2 (ja) 2002-07-03 2005-07-20 株式会社日立製作所 半導体モジュール及び電力変換装置
JP3780230B2 (ja) * 2002-07-03 2006-05-31 株式会社日立製作所 半導体モジュール及び電力変換装置
US7612443B1 (en) * 2003-09-04 2009-11-03 University Of Notre Dame Du Lac Inter-chip communication
JP2005158917A (ja) * 2003-11-25 2005-06-16 Sharp Corp 電子ヒートポンプ装置、レーザ部品、光ピックアップおよび電子機器
DE102004018477B4 (de) * 2004-04-16 2008-08-21 Infineon Technologies Ag Halbleitermodul
US7091604B2 (en) * 2004-06-04 2006-08-15 Cabot Microelectronics Corporation Three dimensional integrated circuits
US7079396B2 (en) 2004-06-14 2006-07-18 Sun Microsystems, Inc. Memory module cooling
US6943293B1 (en) * 2004-09-01 2005-09-13 Delphi Technologies, Inc. High power electronic package with enhanced cooling characteristics
US7589348B2 (en) * 2005-03-14 2009-09-15 Borealis Technical Limited Thermal tunneling gap diode with integrated spacers and vacuum seal
US7462934B2 (en) * 2006-06-20 2008-12-09 Microsoft Corporation Integrated heat sink
US8091614B2 (en) * 2006-11-10 2012-01-10 International Business Machines Corporation Air/fluid cooling system
US7932170B1 (en) 2008-06-23 2011-04-26 Amkor Technology, Inc. Flip chip bump structure and fabrication method
US9620473B1 (en) 2013-01-18 2017-04-11 University Of Notre Dame Du Lac Quilt packaging system with interdigitated interconnecting nodules for inter-chip alignment

Citations (3)

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Publication number Priority date Publication date Assignee Title
JPH08204068A (ja) * 1995-01-20 1996-08-09 Fuji Electric Co Ltd モジュール構造の半導体装置
JPH0945827A (ja) * 1995-08-02 1997-02-14 Hitachi Ltd 半導体装置
WO1998012748A1 (en) * 1996-09-18 1998-03-26 Hitachi, Ltd. Junction semiconductor module

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JPS59200495A (ja) * 1983-04-27 1984-11-13 株式会社日立製作所 マルチチツプ・モジユ−ル
JP2708495B2 (ja) * 1988-09-19 1998-02-04 株式会社日立製作所 半導体冷却装置
JP2592308B2 (ja) * 1988-09-30 1997-03-19 株式会社日立製作所 半導体パッケージ及びそれを用いたコンピュータ
US4965658A (en) * 1988-12-29 1990-10-23 York International Corporation System for mounting and cooling power semiconductor devices
US5345107A (en) * 1989-09-25 1994-09-06 Hitachi, Ltd. Cooling apparatus for electronic device
US5611140A (en) * 1989-12-18 1997-03-18 Epoxy Technology, Inc. Method of forming electrically conductive polymer interconnects on electrical substrates
FR2665046A1 (fr) * 1990-07-20 1992-01-24 Thomson Csf Procede et dispositif pour le montage en parallele de composants de puissance a semi-conducteurs.
US5239448A (en) * 1991-10-28 1993-08-24 International Business Machines Corporation Formulation of multichip modules
US5369552A (en) * 1992-07-14 1994-11-29 Ncr Corporation Multi-chip module with multiple compartments
US5323292A (en) * 1992-10-06 1994-06-21 Hewlett-Packard Company Integrated multi-chip module having a conformal chip/heat exchanger interface
US5500555A (en) * 1994-04-11 1996-03-19 Lsi Logic Corporation Multi-layer semiconductor package substrate with thermally-conductive prepeg layer
JP2926537B2 (ja) * 1994-12-15 1999-07-28 株式会社日立製作所 マルチチップモジュ−ルの冷却装置
JPH08195455A (ja) 1995-01-17 1996-07-30 Hitachi Ltd 半導体冷却装置
US5642262A (en) * 1995-02-23 1997-06-24 Altera Corporation High-density programmable logic device in a multi-chip module package with improved interconnect scheme
JP3058047B2 (ja) * 1995-04-04 2000-07-04 株式会社日立製作所 マルチチップモジュールの封止冷却構造
US5694297A (en) * 1995-09-05 1997-12-02 Astec International Limited Integrated circuit mounting structure including a switching power supply
KR100211058B1 (ko) * 1995-12-23 1999-07-15 이계철 멀티칩 모듈의 냉각장치 및 방법
US5808874A (en) * 1996-05-02 1998-09-15 Tessera, Inc. Microelectronic connections with liquid conductive elements
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US5900674A (en) * 1996-12-23 1999-05-04 General Electric Company Interface structures for electronic devices
JP3241639B2 (ja) * 1997-06-30 2001-12-25 日本電気株式会社 マルチチップモジュールの冷却構造およびその製造方法
JPH11121666A (ja) * 1997-10-20 1999-04-30 Fujitsu Ltd マルチチップモジュールの冷却装置
US6393169B1 (en) * 1997-12-19 2002-05-21 Intel Corporation Method and apparatus for providing optical interconnection
US5930135A (en) * 1998-01-20 1999-07-27 Reliance Electric Industrial Company Heat sink apparatus and method for making the same
US6392296B1 (en) * 1998-08-31 2002-05-21 Micron Technology, Inc. Silicon interposer with optical connections
US6144013A (en) * 1999-07-01 2000-11-07 International Business Machines Corporation Local humidity control system for low temperature electronic module
US20020000239A1 (en) * 1999-09-27 2002-01-03 Krishna G. Sachdev Removal of cured silicone adhesive for reworking electronic components
US6366461B1 (en) * 1999-09-29 2002-04-02 Silicon Graphics, Inc. System and method for cooling electronic components

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08204068A (ja) * 1995-01-20 1996-08-09 Fuji Electric Co Ltd モジュール構造の半導体装置
JPH0945827A (ja) * 1995-08-02 1997-02-14 Hitachi Ltd 半導体装置
WO1998012748A1 (en) * 1996-09-18 1998-03-26 Hitachi, Ltd. Junction semiconductor module

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006066464A (ja) * 2004-08-24 2006-03-09 Toyota Industries Corp 半導体装置
JP2014187083A (ja) * 2013-03-22 2014-10-02 Casio Comput Co Ltd 回路基板構造、及び電子機器
JP2015082960A (ja) * 2013-10-24 2015-04-27 株式会社オートネットワーク技術研究所 Ｄｃ−ｄｃコンバータ装置
WO2018164160A1 (ja) * 2017-03-10 2018-09-13 株式会社村田製作所 モジュール

Also Published As

Publication number Publication date
EP1111677A3 (en) 2003-10-15
EP1111677B1 (en) 2010-01-27
DE60043767D1 (de) 2010-03-18
EP1111677A2 (en) 2001-06-27
US6969907B2 (en) 2005-11-29
US20030025197A1 (en) 2003-02-06
US20010022395A1 (en) 2001-09-20

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