JP2001244316A5 - - Google Patents

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Publication number
JP2001244316A5
JP2001244316A5 JP2000393003A JP2000393003A JP2001244316A5 JP 2001244316 A5 JP2001244316 A5 JP 2001244316A5 JP 2000393003 A JP2000393003 A JP 2000393003A JP 2000393003 A JP2000393003 A JP 2000393003A JP 2001244316 A5 JP2001244316 A5 JP 2001244316A5
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JP
Japan
Prior art keywords
substrate
end effector
slot
translation
aligned
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2000393003A
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English (en)
Japanese (ja)
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JP2001244316A (ja
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Publication date
Priority claimed from US09/470,821 external-priority patent/US6577923B1/en
Application filed filed Critical
Publication of JP2001244316A publication Critical patent/JP2001244316A/ja
Publication of JP2001244316A5 publication Critical patent/JP2001244316A5/ja
Pending legal-status Critical Current

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JP2000393003A 1999-12-23 2000-12-25 基板のロボットアラインメント装置及び方法 Pending JP2001244316A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US09/470821 1999-12-23
US09/470,821 US6577923B1 (en) 1999-12-23 1999-12-23 Apparatus and method for robotic alignment of substrates

Publications (2)

Publication Number Publication Date
JP2001244316A JP2001244316A (ja) 2001-09-07
JP2001244316A5 true JP2001244316A5 (https=) 2005-11-04

Family

ID=23869196

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2000393003A Pending JP2001244316A (ja) 1999-12-23 2000-12-25 基板のロボットアラインメント装置及び方法

Country Status (5)

Country Link
US (1) US6577923B1 (https=)
EP (1) EP1126506A3 (https=)
JP (1) JP2001244316A (https=)
KR (1) KR100753290B1 (https=)
SG (1) SG90220A1 (https=)

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US10224232B2 (en) 2013-01-18 2019-03-05 Persimmon Technologies Corporation Robot having two arms with unequal link lengths
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US10002781B2 (en) 2014-11-10 2018-06-19 Brooks Automation, Inc. Tool auto-teach method and apparatus
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KR102680059B1 (ko) * 2015-11-23 2024-06-28 어플라이드 머티어리얼스, 인코포레이티드 프로세스 툴에서의 온-보드 메트롤로지(obm) 설계 및 그 영향
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