JP2001172090A5 - - Google Patents

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Publication number
JP2001172090A5
JP2001172090A5 JP2000309392A JP2000309392A JP2001172090A5 JP 2001172090 A5 JP2001172090 A5 JP 2001172090A5 JP 2000309392 A JP2000309392 A JP 2000309392A JP 2000309392 A JP2000309392 A JP 2000309392A JP 2001172090 A5 JP2001172090 A5 JP 2001172090A5
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JP
Japan
Prior art keywords
ceramic
semiconductor manufacturing
nitride
manufacturing apparatus
less
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2000309392A
Other languages
English (en)
Japanese (ja)
Other versions
JP4719965B2 (ja
JP2001172090A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2000309392A priority Critical patent/JP4719965B2/ja
Priority claimed from JP2000309392A external-priority patent/JP4719965B2/ja
Publication of JP2001172090A publication Critical patent/JP2001172090A/ja
Publication of JP2001172090A5 publication Critical patent/JP2001172090A5/ja
Application granted granted Critical
Publication of JP4719965B2 publication Critical patent/JP4719965B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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JP2000309392A 1999-10-08 2000-10-10 セラミックス Expired - Fee Related JP4719965B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2000309392A JP4719965B2 (ja) 1999-10-08 2000-10-10 セラミックス

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP28782599 1999-10-08
JP1999287825 1999-10-08
JP11-287825 1999-10-08
JP2000309392A JP4719965B2 (ja) 1999-10-08 2000-10-10 セラミックス

Publications (3)

Publication Number Publication Date
JP2001172090A JP2001172090A (ja) 2001-06-26
JP2001172090A5 true JP2001172090A5 (enExample) 2007-11-22
JP4719965B2 JP4719965B2 (ja) 2011-07-06

Family

ID=26556898

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2000309392A Expired - Fee Related JP4719965B2 (ja) 1999-10-08 2000-10-10 セラミックス

Country Status (1)

Country Link
JP (1) JP4719965B2 (enExample)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6953538B2 (en) * 2000-06-06 2005-10-11 Nippon Steel Corporation Electroconductive low thermal expansion ceramic sintered body
CN1209321C (zh) 2001-02-08 2005-07-06 住友电气工业株式会社 多孔性陶瓷及其制造方法,以及微波传输带基片
JP2002321967A (ja) * 2001-04-24 2002-11-08 Toray Ind Inc 低熱膨張セラミックス
JP2003160384A (ja) 2001-09-04 2003-06-03 Sumitomo Electric Ind Ltd 多孔質窒化ケイ素セラミックスおよびその製造方法

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6442366A (en) * 1987-08-07 1989-02-14 Toyota Motor Corp Silicon nitride sintered body resistant to thermal shock
JPH04338178A (ja) * 1991-05-13 1992-11-25 Mitsubishi Materials Corp 多孔質マグネシア焼結体及びその製造方法
JPH05254950A (ja) * 1992-03-13 1993-10-05 Toshiba Corp 高靭性セラミックス部材
JPH07138084A (ja) * 1993-11-15 1995-05-30 Sumitomo Osaka Cement Co Ltd 気孔率傾斜型軽量セラミックス成形体及びその製造方法
US5656217A (en) * 1994-09-13 1997-08-12 Advanced Composite Materials Corporation Pressureless sintering of whisker reinforced alumina composites
JPH0963749A (ja) * 1995-08-28 1997-03-07 Riken Corp ヒートローラー及びその製造方法
JP2000001386A (ja) * 1998-06-12 2000-01-07 Toshiyuki Hashida セラミックスの塑性加工方法
JP4025455B2 (ja) * 1999-03-31 2007-12-19 京セラ株式会社 複合酸化物セラミックス
JP2000344585A (ja) * 1999-06-02 2000-12-12 Asahi Glass Co Ltd セラミックス多孔体の製造方法
JP2001058867A (ja) * 1999-08-23 2001-03-06 Taiheiyo Cement Corp 構造部品

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