JP2001019928A - 接着剤、および半導体装置 - Google Patents

接着剤、および半導体装置

Info

Publication number
JP2001019928A
JP2001019928A JP11193829A JP19382999A JP2001019928A JP 2001019928 A JP2001019928 A JP 2001019928A JP 11193829 A JP11193829 A JP 11193829A JP 19382999 A JP19382999 A JP 19382999A JP 2001019928 A JP2001019928 A JP 2001019928A
Authority
JP
Japan
Prior art keywords
adhesive
group
semiconductor chip
semiconductor device
mounting member
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11193829A
Other languages
English (en)
Japanese (ja)
Other versions
JP2001019928A5 (https=
Inventor
Kimio Yamakawa
君男 山川
Minoru Isshiki
実 一色
Katsutoshi Mine
勝利 峰
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
DuPont Toray Specialty Materials KK
Original Assignee
Dow Corning Toray Silicone Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Dow Corning Toray Silicone Co Ltd filed Critical Dow Corning Toray Silicone Co Ltd
Priority to JP11193829A priority Critical patent/JP2001019928A/ja
Priority to US09/597,218 priority patent/US6750550B1/en
Priority to DE60001434T priority patent/DE60001434T2/de
Priority to EP00305237A priority patent/EP1067163B1/en
Priority to KR1020000038822A priority patent/KR100637611B1/ko
Priority to TW089113524A priority patent/TWI225886B/zh
Publication of JP2001019928A publication Critical patent/JP2001019928A/ja
Publication of JP2001019928A5 publication Critical patent/JP2001019928A5/ja
Pending legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00Interconnections or connectors in packages
    • H10W72/30Die-attach connectors
    • CCHEMISTRY; METALLURGY
    • C09DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09JADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
    • C09J11/00Features of adhesives not provided for in group C09J9/00, e.g. additives
    • C09J11/02Non-macromolecular additives
    • C09J11/04Non-macromolecular additives inorganic
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08GMACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
    • C08G59/00Polycondensates containing more than one epoxy group per molecule; Macromolecules obtained by polymerising compounds containing more than one epoxy group per molecule using curing agents or catalysts which react with the epoxy groups
    • C08G59/18Macromolecules obtained by polymerising compounds containing more than one epoxy group per molecule using curing agents or catalysts which react with the epoxy groups ; e.g. general methods of curing
    • C08G59/20Macromolecules obtained by polymerising compounds containing more than one epoxy group per molecule using curing agents or catalysts which react with the epoxy groups ; e.g. general methods of curing characterised by the epoxy compounds used
    • C08G59/22Di-epoxy compounds
    • C08G59/30Di-epoxy compounds containing atoms other than carbon, hydrogen, oxygen and nitrogen
    • C08G59/306Di-epoxy compounds containing atoms other than carbon, hydrogen, oxygen and nitrogen containing silicon
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08GMACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
    • C08G59/00Polycondensates containing more than one epoxy group per molecule; Macromolecules obtained by polymerising compounds containing more than one epoxy group per molecule using curing agents or catalysts which react with the epoxy groups
    • C08G59/18Macromolecules obtained by polymerising compounds containing more than one epoxy group per molecule using curing agents or catalysts which react with the epoxy groups ; e.g. general methods of curing
    • C08G59/20Macromolecules obtained by polymerising compounds containing more than one epoxy group per molecule using curing agents or catalysts which react with the epoxy groups ; e.g. general methods of curing characterised by the epoxy compounds used
    • C08G59/32Epoxy compounds containing three or more epoxy groups
    • C08G59/3254Epoxy compounds containing three or more epoxy groups containing atoms other than carbon, hydrogen, oxygen or nitrogen
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08KUse of inorganic or non-macromolecular organic substances as compounding ingredients
    • C08K7/00Use of ingredients characterised by shape
    • C08K7/16Solid spheres
    • C08K7/18Solid spheres inorganic
    • CCHEMISTRY; METALLURGY
    • C09DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09JADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
    • C09J11/00Features of adhesives not provided for in group C09J9/00, e.g. additives
    • C09J11/02Non-macromolecular additives
    • CCHEMISTRY; METALLURGY
    • C09DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09JADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
    • C09J183/00Adhesives based on macromolecular compounds obtained by reactions forming in the main chain of the macromolecule a linkage containing silicon, with or without sulfur, nitrogen, oxygen, or carbon only; Adhesives based on derivatives of such polymers
    • C09J183/04Polysiloxanes
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W74/00Encapsulations, e.g. protective coatings
    • H10W74/01Manufacture or treatment
    • H10W74/012Manufacture or treatment of encapsulations on active surfaces of flip-chip devices, e.g. forming underfills
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W74/00Encapsulations, e.g. protective coatings
    • H10W74/10Encapsulations, e.g. protective coatings characterised by their shape or disposition
    • H10W74/15Encapsulations, e.g. protective coatings characterised by their shape or disposition on active surfaces of flip-chip devices, e.g. underfills
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08LCOMPOSITIONS OF MACROMOLECULAR COMPOUNDS
    • C08L2666/00Composition of polymers characterized by a further compound in the blend, being organic macromolecular compounds, natural resins, waxes or and bituminous materials, non-macromolecular organic substances, inorganic substances or characterized by their function in the composition
    • C08L2666/54Inorganic substances
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00Interconnections or connectors in packages
    • H10W72/01Manufacture or treatment
    • H10W72/013Manufacture or treatment of die-attach connectors
    • H10W72/01308Manufacture or treatment of die-attach connectors using permanent auxiliary members, e.g. using alignment marks
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00Interconnections or connectors in packages
    • H10W72/071Connecting or disconnecting
    • H10W72/073Connecting or disconnecting of die-attach connectors
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00Interconnections or connectors in packages
    • H10W72/071Connecting or disconnecting
    • H10W72/073Connecting or disconnecting of die-attach connectors
    • H10W72/07311Treating the bonding area before connecting, e.g. by applying flux or cleaning
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00Interconnections or connectors in packages
    • H10W72/071Connecting or disconnecting
    • H10W72/073Connecting or disconnecting of die-attach connectors
    • H10W72/07331Connecting techniques
    • H10W72/07337Connecting techniques using a polymer adhesive, e.g. an adhesive based on silicone or epoxy
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00Interconnections or connectors in packages
    • H10W72/30Die-attach connectors
    • H10W72/351Materials of die-attach connectors
    • H10W72/353Materials of die-attach connectors not comprising solid metals or solid metalloids, e.g. ceramics
    • H10W72/354Materials of die-attach connectors not comprising solid metals or solid metalloids, e.g. ceramics comprising polymers
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00Interconnections or connectors in packages
    • H10W72/851Dispositions of multiple connectors or interconnections
    • H10W72/853On the same surface
    • H10W72/856Bump connectors and die-attach connectors
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W90/00Package configurations
    • H10W90/701Package configurations characterised by the relative positions of pads or connectors relative to package parts
    • H10W90/721Package configurations characterised by the relative positions of pads or connectors relative to package parts of bump connectors
    • H10W90/724Package configurations characterised by the relative positions of pads or connectors relative to package parts of bump connectors between a chip and a stacked insulating package substrate, interposer or RDL

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Health & Medical Sciences (AREA)
  • Medicinal Chemistry (AREA)
  • Polymers & Plastics (AREA)
  • Inorganic Chemistry (AREA)
  • Adhesives Or Adhesive Processes (AREA)
  • Die Bonding (AREA)
  • Compositions Of Macromolecular Compounds (AREA)
JP11193829A 1999-07-08 1999-07-08 接着剤、および半導体装置 Pending JP2001019928A (ja)

Priority Applications (6)

Application Number Priority Date Filing Date Title
JP11193829A JP2001019928A (ja) 1999-07-08 1999-07-08 接着剤、および半導体装置
US09/597,218 US6750550B1 (en) 1999-07-08 2000-06-20 Adhesive and semiconductor devices
DE60001434T DE60001434T2 (de) 1999-07-08 2000-06-21 Klebstoff und Halbleiterbauelemente
EP00305237A EP1067163B1 (en) 1999-07-08 2000-06-21 Adhesive and semiconductor devices
KR1020000038822A KR100637611B1 (ko) 1999-07-08 2000-07-07 접착제 및 반도체 장치
TW089113524A TWI225886B (en) 1999-07-08 2000-09-19 Adhesive and semiconductor devices

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11193829A JP2001019928A (ja) 1999-07-08 1999-07-08 接着剤、および半導体装置

Publications (2)

Publication Number Publication Date
JP2001019928A true JP2001019928A (ja) 2001-01-23
JP2001019928A5 JP2001019928A5 (https=) 2006-08-10

Family

ID=16314444

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11193829A Pending JP2001019928A (ja) 1999-07-08 1999-07-08 接着剤、および半導体装置

Country Status (6)

Country Link
US (1) US6750550B1 (https=)
EP (1) EP1067163B1 (https=)
JP (1) JP2001019928A (https=)
KR (1) KR100637611B1 (https=)
DE (1) DE60001434T2 (https=)
TW (1) TWI225886B (https=)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005503468A (ja) * 2001-09-17 2005-02-03 ダウ・コ−ニング・コ−ポレ−ション 半導体デバイス用ダイ取付接着剤、このようなデバイスを製造する効率的な方法、およびこの方法で製造されるデバイス
JP2005503467A (ja) * 2001-09-17 2005-02-03 ダウ・コ−ニング・コ−ポレ−ション 半導体用途用のダイ取付接着剤、半導体デバイスを製造する方法、およびそのような方法により製造される半導体デバイス
JP2007288003A (ja) * 2006-04-18 2007-11-01 Sharp Corp 半導体装置
WO2008084843A1 (ja) * 2007-01-12 2008-07-17 Sekisui Chemical Co., Ltd. 電子部品用接着剤
JP2010018675A (ja) * 2008-07-09 2010-01-28 Mitsuboshi Belting Ltd 厚膜形成用ペースト
JP2012074512A (ja) * 2010-09-28 2012-04-12 Sekisui Chem Co Ltd 光半導体装置用ダイボンド材及びそれを用いた光半導体装置
WO2014119930A1 (ko) * 2013-01-29 2014-08-07 주식회사 케이씨씨 반도체칩 접착용 실리콘 고무 조성물

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001139894A (ja) * 1999-11-15 2001-05-22 Dow Corning Toray Silicone Co Ltd シリコーン系接着性シート、および半導体装置
JP4037619B2 (ja) * 2001-04-27 2008-01-23 ソニーケミカル&インフォメーションデバイス株式会社 接着剤及び電気装置
JP2005026363A (ja) * 2003-06-30 2005-01-27 Toshiba Corp 半導体装置とその製造方法
US7118940B1 (en) * 2005-08-05 2006-10-10 Delphi Technologies, Inc. Method of fabricating an electronic package having underfill standoff
US9528027B2 (en) * 2013-03-11 2016-12-27 Panasonic Intellectual Property Management Co., Ltd. Coating for preventing scattering of fragments
KR101854501B1 (ko) 2015-04-29 2018-05-04 삼성에스디아이 주식회사 반도체 소자 밀봉용 에폭시 수지 조성물 및 이를 사용하여 밀봉된 반도체 소자
KR102164171B1 (ko) * 2019-04-26 2020-10-13 (주)엘프스 미니 led 칩 본딩용 자가융착형 도전접속 페이스트, 이를 포함하는 미니 led 칩-회로기판 본딩 모듈 및 이의 제조방법

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60189229A (ja) * 1984-03-09 1985-09-26 Toshiba Chem Corp 半導体素子
JPH04152642A (ja) * 1990-10-17 1992-05-26 Fujitsu Ltd 接着用ペースト
JPH07126489A (ja) * 1993-10-29 1995-05-16 Sumitomo Bakelite Co Ltd 導電性樹脂ペースト
JPH07221125A (ja) * 1994-01-27 1995-08-18 Toyota Autom Loom Works Ltd 半導体部品の実装構造及び絶縁性接着剤
JPH07292343A (ja) * 1994-04-27 1995-11-07 Toray Dow Corning Silicone Co Ltd 接着剤および半導体装置

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0791475B2 (ja) * 1988-02-29 1995-10-04 東レ・ダウコーニング・シリコーン株式会社 硬化性樹脂組成物
JP2882823B2 (ja) 1989-11-15 1999-04-12 東レ・ダウコーニング・シリコーン株式会社 接着剤
JP2605970B2 (ja) 1993-06-21 1997-04-30 日本電気株式会社 半導体チップ用ダイボンディング樹脂及びそれを用いた半導体装置。
EP0699717A3 (en) * 1994-08-30 1997-01-02 Dow Corning Organopolysiloxane compositions curable into products having good adhesiveness and reduced flammability
US6201055B1 (en) * 1999-03-11 2001-03-13 Dow Corning Corporation Silicone composition and silicone pressure sensitive adhesive

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60189229A (ja) * 1984-03-09 1985-09-26 Toshiba Chem Corp 半導体素子
JPH04152642A (ja) * 1990-10-17 1992-05-26 Fujitsu Ltd 接着用ペースト
JPH07126489A (ja) * 1993-10-29 1995-05-16 Sumitomo Bakelite Co Ltd 導電性樹脂ペースト
JPH07221125A (ja) * 1994-01-27 1995-08-18 Toyota Autom Loom Works Ltd 半導体部品の実装構造及び絶縁性接着剤
JPH07292343A (ja) * 1994-04-27 1995-11-07 Toray Dow Corning Silicone Co Ltd 接着剤および半導体装置

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005503468A (ja) * 2001-09-17 2005-02-03 ダウ・コ−ニング・コ−ポレ−ション 半導体デバイス用ダイ取付接着剤、このようなデバイスを製造する効率的な方法、およびこの方法で製造されるデバイス
JP2005503467A (ja) * 2001-09-17 2005-02-03 ダウ・コ−ニング・コ−ポレ−ション 半導体用途用のダイ取付接着剤、半導体デバイスを製造する方法、およびそのような方法により製造される半導体デバイス
JP2011157559A (ja) * 2001-09-17 2011-08-18 Dow Corning Corp 半導体用途用のダイ取付接着剤、半導体デバイスを製造する方法、およびそのような方法により製造される半導体デバイス
JP2007288003A (ja) * 2006-04-18 2007-11-01 Sharp Corp 半導体装置
WO2008084843A1 (ja) * 2007-01-12 2008-07-17 Sekisui Chemical Co., Ltd. 電子部品用接着剤
KR100946606B1 (ko) 2007-01-12 2010-03-09 세키스이가가쿠 고교가부시키가이샤 전자 부품용 접착제
JP2010018675A (ja) * 2008-07-09 2010-01-28 Mitsuboshi Belting Ltd 厚膜形成用ペースト
JP2012074512A (ja) * 2010-09-28 2012-04-12 Sekisui Chem Co Ltd 光半導体装置用ダイボンド材及びそれを用いた光半導体装置
WO2014119930A1 (ko) * 2013-01-29 2014-08-07 주식회사 케이씨씨 반도체칩 접착용 실리콘 고무 조성물

Also Published As

Publication number Publication date
DE60001434T2 (de) 2003-11-20
EP1067163A1 (en) 2001-01-10
US6750550B1 (en) 2004-06-15
TWI225886B (en) 2005-01-01
KR20010049733A (ko) 2001-06-15
DE60001434D1 (de) 2003-03-27
KR100637611B1 (ko) 2006-10-24
EP1067163B1 (en) 2003-02-19

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