JP2001003168A - 真空成膜装置 - Google Patents

真空成膜装置

Info

Publication number
JP2001003168A
JP2001003168A JP11173350A JP17335099A JP2001003168A JP 2001003168 A JP2001003168 A JP 2001003168A JP 11173350 A JP11173350 A JP 11173350A JP 17335099 A JP17335099 A JP 17335099A JP 2001003168 A JP2001003168 A JP 2001003168A
Authority
JP
Japan
Prior art keywords
film forming
vacuum
vacuum chamber
forming unit
main roll
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
JP11173350A
Other languages
English (en)
Japanese (ja)
Other versions
JP2001003168A5 (enExample
Inventor
Atsuhiro Abe
淳博 阿部
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sony Corp
Original Assignee
Sony Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sony Corp filed Critical Sony Corp
Priority to JP11173350A priority Critical patent/JP2001003168A/ja
Publication of JP2001003168A publication Critical patent/JP2001003168A/ja
Publication of JP2001003168A5 publication Critical patent/JP2001003168A5/ja
Abandoned legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
  • Chemical Vapour Deposition (AREA)
JP11173350A 1999-06-18 1999-06-18 真空成膜装置 Abandoned JP2001003168A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11173350A JP2001003168A (ja) 1999-06-18 1999-06-18 真空成膜装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11173350A JP2001003168A (ja) 1999-06-18 1999-06-18 真空成膜装置

Publications (2)

Publication Number Publication Date
JP2001003168A true JP2001003168A (ja) 2001-01-09
JP2001003168A5 JP2001003168A5 (enExample) 2006-04-20

Family

ID=15958797

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11173350A Abandoned JP2001003168A (ja) 1999-06-18 1999-06-18 真空成膜装置

Country Status (1)

Country Link
JP (1) JP2001003168A (enExample)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006299417A (ja) * 2005-04-08 2006-11-02 Applied Films Gmbh & Co Kg 基板コーティング装置及びモジュール
JP2008031493A (ja) * 2006-07-26 2008-02-14 Kobe Steel Ltd 連続成膜装置
JP2008031492A (ja) * 2006-07-26 2008-02-14 Kobe Steel Ltd 連続成膜装置
DE102005042762B4 (de) * 2004-09-09 2016-10-20 Kabushiki Kaisha Kobe Seiko Sho Vorrichtung zur kontinuierlichen Beschichtung
JP2017500447A (ja) * 2013-12-10 2017-01-05 アプライド マテリアルズ インコーポレイテッドＡｐｐｌｉｅｄ Ｍａｔｅｒｉａｌｓ，Ｉｎｃｏｒｐｏｒａｔｅｄ 処理デバイス用、特に内部に有機材料を含むデバイス用の処理装置、及び処理真空チャンバから保守真空チャンバへ又は保守真空チャンバから処理真空チャンバへ蒸発源を移送するための方法
DE102016107983A1 (de) * 2016-04-29 2017-11-02 Von Ardenne Gmbh Prozesskammeranordnung und Prozessieranordnung
CN110512185A (zh) * 2019-09-03 2019-11-29 肇庆宏旺金属实业有限公司 一种钢卷开收卷真空工作室

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102005042762B4 (de) * 2004-09-09 2016-10-20 Kabushiki Kaisha Kobe Seiko Sho Vorrichtung zur kontinuierlichen Beschichtung
JP2006299417A (ja) * 2005-04-08 2006-11-02 Applied Films Gmbh & Co Kg 基板コーティング装置及びモジュール
US7972486B2 (en) 2005-04-08 2011-07-05 Applied Materials Gmbh & Co. Kg Machine for coating a substrate, and module
JP2008031493A (ja) * 2006-07-26 2008-02-14 Kobe Steel Ltd 連続成膜装置
JP2008031492A (ja) * 2006-07-26 2008-02-14 Kobe Steel Ltd 連続成膜装置
JP2017500447A (ja) * 2013-12-10 2017-01-05 アプライド マテリアルズ インコーポレイテッドＡｐｐｌｉｅｄ Ｍａｔｅｒｉａｌｓ，Ｉｎｃｏｒｐｏｒａｔｅｄ 処理デバイス用、特に内部に有機材料を含むデバイス用の処理装置、及び処理真空チャンバから保守真空チャンバへ又は保守真空チャンバから処理真空チャンバへ蒸発源を移送するための方法
DE102016107983A1 (de) * 2016-04-29 2017-11-02 Von Ardenne Gmbh Prozesskammeranordnung und Prozessieranordnung
CN110512185A (zh) * 2019-09-03 2019-11-29 肇庆宏旺金属实业有限公司 一种钢卷开收卷真空工作室

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