JP2001003168A5 - - Google Patents
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- Publication number
- JP2001003168A5 JP2001003168A5 JP1999173350A JP17335099A JP2001003168A5 JP 2001003168 A5 JP2001003168 A5 JP 2001003168A5 JP 1999173350 A JP1999173350 A JP 1999173350A JP 17335099 A JP17335099 A JP 17335099A JP 2001003168 A5 JP2001003168 A5 JP 2001003168A5
- Authority
- JP
- Japan
- Prior art keywords
- film forming
- forming source
- film
- deposition
- preventing plate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Abandoned
Links
- 239000010408 film Substances 0.000 description 7
- 238000000151 deposition Methods 0.000 description 2
- 230000008021 deposition Effects 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 238000007740 vapor deposition Methods 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 239000004215 Carbon black (E152) Substances 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 238000002848 electrochemical method Methods 0.000 description 1
- 229930195733 hydrocarbon Natural products 0.000 description 1
- 150000002430 hydrocarbons Chemical class 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11173350A JP2001003168A (ja) | 1999-06-18 | 1999-06-18 | 真空成膜装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11173350A JP2001003168A (ja) | 1999-06-18 | 1999-06-18 | 真空成膜装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2001003168A JP2001003168A (ja) | 2001-01-09 |
| JP2001003168A5 true JP2001003168A5 (enExample) | 2006-04-20 |
Family
ID=15958797
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11173350A Abandoned JP2001003168A (ja) | 1999-06-18 | 1999-06-18 | 真空成膜装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2001003168A (enExample) |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4421980B2 (ja) * | 2004-09-09 | 2010-02-24 | 株式会社神戸製鋼所 | 連続成膜装置 |
| EP1713110B1 (de) * | 2005-04-08 | 2016-03-09 | Applied Materials GmbH & Co. KG | Anlage zum Beschichten eines Substrats und Modul |
| JP4702801B2 (ja) * | 2006-07-26 | 2011-06-15 | 株式会社神戸製鋼所 | 連続成膜装置 |
| JP4573272B2 (ja) * | 2006-07-26 | 2010-11-04 | 株式会社神戸製鋼所 | 連続成膜装置 |
| EP3187618A1 (en) * | 2013-12-10 | 2017-07-05 | Applied Materials, Inc. | Evaporation source for organic material, deposition apparatus for depositing organic materials in a vacuum chamber having an evaporation source for organic material, and method for evaporating organic material |
| DE102016107983A1 (de) * | 2016-04-29 | 2017-11-02 | Von Ardenne Gmbh | Prozesskammeranordnung und Prozessieranordnung |
| CN110512185A (zh) * | 2019-09-03 | 2019-11-29 | 肇庆宏旺金属实业有限公司 | 一种钢卷开收卷真空工作室 |
-
1999
- 1999-06-18 JP JP11173350A patent/JP2001003168A/ja not_active Abandoned
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