JP2000275140A5 - - Google Patents
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- Publication number
- JP2000275140A5 JP2000275140A5 JP1999080030A JP8003099A JP2000275140A5 JP 2000275140 A5 JP2000275140 A5 JP 2000275140A5 JP 1999080030 A JP1999080030 A JP 1999080030A JP 8003099 A JP8003099 A JP 8003099A JP 2000275140 A5 JP2000275140 A5 JP 2000275140A5
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- holding means
- inspection apparatus
- substrate holding
- glass substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000758 substrate Substances 0.000 description 79
- 238000007689 inspection Methods 0.000 description 26
- 239000011521 glass Substances 0.000 description 20
- 238000005286 illumination Methods 0.000 description 4
- 230000002093 peripheral Effects 0.000 description 4
- 230000001678 irradiating Effects 0.000 description 2
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP08003099A JP4121662B2 (ja) | 1999-03-24 | 1999-03-24 | 基板検査装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP08003099A JP4121662B2 (ja) | 1999-03-24 | 1999-03-24 | 基板検査装置 |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2007333290A Division JP2008116470A (ja) | 2007-12-25 | 2007-12-25 | 基板検査装置 |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2000275140A JP2000275140A (ja) | 2000-10-06 |
JP2000275140A5 true JP2000275140A5 (zh) | 2006-04-27 |
JP4121662B2 JP4121662B2 (ja) | 2008-07-23 |
Family
ID=13706884
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP08003099A Expired - Fee Related JP4121662B2 (ja) | 1999-03-24 | 1999-03-24 | 基板検査装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP4121662B2 (zh) |
Families Citing this family (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2003006971A1 (fr) * | 2001-07-02 | 2003-01-23 | Olympus Optical Co., Ltd. | Dispositif de support de substrat |
KR100641817B1 (ko) * | 2002-05-30 | 2006-11-02 | 삼성코닝정밀유리 주식회사 | 유리기판용 핸들러 |
TWI393875B (zh) * | 2004-09-27 | 2013-04-21 | Olympus Corp | 基板檢測裝置之固持器及基板檢測裝置 |
JP2006133099A (ja) * | 2004-11-08 | 2006-05-25 | Micronics Japan Co Ltd | 表示用パネルの検査装置 |
JP4700365B2 (ja) * | 2005-02-09 | 2011-06-15 | オリンパス株式会社 | 基板検査装置 |
KR100748106B1 (ko) * | 2005-09-05 | 2007-08-09 | 코리아테크노(주) | 포토마스크 육안검사장치 |
KR100743427B1 (ko) | 2006-08-07 | 2007-07-30 | (주)오엘케이 | 평판 디스플레이 패널 매크로 검사장치 |
KR100813117B1 (ko) | 2006-10-17 | 2008-03-17 | 최보경 | 디스플레이 표시모듈의 지지수단을 갖는 팔레트 |
KR100783618B1 (ko) | 2006-10-31 | 2007-12-07 | (주)오엘케이 | 매크로 검사장치 |
KR100881631B1 (ko) | 2007-07-02 | 2009-02-04 | 주식회사 에이디피엔지니어링 | 전자빔 검사 시스템 및 검사 방법 |
KR101077898B1 (ko) | 2009-09-15 | 2011-10-31 | 태산엘시디 주식회사 | 패널 안착기 |
CN112816486A (zh) * | 2020-12-31 | 2021-05-18 | 立讯智造(浙江)有限公司 | 检测治具 |
-
1999
- 1999-03-24 JP JP08003099A patent/JP4121662B2/ja not_active Expired - Fee Related
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