JP2000243975A5 - - Google Patents
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- JP2000243975A5 JP2000243975A5 JP1999368296A JP36829699A JP2000243975A5 JP 2000243975 A5 JP2000243975 A5 JP 2000243975A5 JP 1999368296 A JP1999368296 A JP 1999368296A JP 36829699 A JP36829699 A JP 36829699A JP 2000243975 A5 JP2000243975 A5 JP 2000243975A5
- Authority
- JP
- Japan
- Prior art keywords
- region
- semiconductor layer
- gate electrode
- forming
- channel
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 239000004065 semiconductor Substances 0.000 description 112
- 239000012535 impurity Substances 0.000 description 91
- 239000010409 thin film Substances 0.000 description 47
- 239000010408 film Substances 0.000 description 23
- 230000015572 biosynthetic process Effects 0.000 description 19
- 238000005755 formation reaction Methods 0.000 description 19
- 238000000034 method Methods 0.000 description 9
- 238000004519 manufacturing process Methods 0.000 description 7
- 239000000758 substrate Substances 0.000 description 7
- 239000010936 titanium Substances 0.000 description 4
- 150000001875 compounds Chemical group 0.000 description 2
- ZOKXTWBITQBERF-UHFFFAOYSA-N molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 2
- 229910052750 molybdenum Inorganic materials 0.000 description 2
- 239000011733 molybdenum Substances 0.000 description 2
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 2
- 229910052715 tantalum Inorganic materials 0.000 description 2
- RTAQQCXQSZGOHL-UHFFFAOYSA-N titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 2
- 229910052719 titanium Inorganic materials 0.000 description 2
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 2
- 229910052721 tungsten Inorganic materials 0.000 description 2
- 239000010937 tungsten Substances 0.000 description 2
- 239000004973 liquid crystal related substance Substances 0.000 description 1
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP36829699A JP4869464B2 (ja) | 1998-12-25 | 1999-12-24 | 半導体装置およびその作製方法 |
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10-371203 | 1998-12-25 | ||
JP1998371203 | 1998-12-25 | ||
JP37120398 | 1998-12-25 | ||
JP36829699A JP4869464B2 (ja) | 1998-12-25 | 1999-12-24 | 半導体装置およびその作製方法 |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2000243975A JP2000243975A (ja) | 2000-09-08 |
JP2000243975A5 true JP2000243975A5 (zh) | 2007-08-23 |
JP4869464B2 JP4869464B2 (ja) | 2012-02-08 |
Family
ID=26581989
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP36829699A Expired - Fee Related JP4869464B2 (ja) | 1998-12-25 | 1999-12-24 | 半導体装置およびその作製方法 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP4869464B2 (zh) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7820464B2 (en) | 2000-04-17 | 2010-10-26 | Semiconductor Energy Laboratory Co., Ltd. | Light emitting device and manufacturing method thereof |
Families Citing this family (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP2264771A3 (en) | 1998-12-03 | 2015-04-29 | Semiconductor Energy Laboratory Co., Ltd. | MOS thin film transistor and method of fabricating same |
JP5046451B2 (ja) * | 2000-09-22 | 2012-10-10 | 株式会社半導体エネルギー研究所 | 半導体表示装置の作製方法 |
US6509616B2 (en) * | 2000-09-29 | 2003-01-21 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and its manufacturing method |
JP5046452B2 (ja) | 2000-10-26 | 2012-10-10 | 株式会社半導体エネルギー研究所 | 半導体装置の作製方法 |
JP4954366B2 (ja) | 2000-11-28 | 2012-06-13 | 株式会社半導体エネルギー研究所 | 半導体装置の作製方法 |
JP4097521B2 (ja) | 2002-12-27 | 2008-06-11 | 株式会社半導体エネルギー研究所 | 半導体装置の作製方法 |
JP4641741B2 (ja) * | 2004-05-28 | 2011-03-02 | 三菱電機株式会社 | 半導体装置 |
KR20070049742A (ko) * | 2005-11-09 | 2007-05-14 | 엘지.필립스 엘시디 주식회사 | 액정표시장치용 어레이기판과 그 제조방법 |
KR101458898B1 (ko) | 2008-02-12 | 2014-11-07 | 삼성디스플레이 주식회사 | 표시 장치 및 그 제조 방법 |
KR101727469B1 (ko) | 2009-11-06 | 2017-04-17 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 표시 장치 |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO1995003629A1 (fr) * | 1993-07-26 | 1995-02-02 | Seiko Epson Corporation | Dispositif semi-conducteur a film mince, sa fabrication et son systeme d'affichage |
-
1999
- 1999-12-24 JP JP36829699A patent/JP4869464B2/ja not_active Expired - Fee Related
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7820464B2 (en) | 2000-04-17 | 2010-10-26 | Semiconductor Energy Laboratory Co., Ltd. | Light emitting device and manufacturing method thereof |
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