JP2000223396A5 - - Google Patents

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Publication number
JP2000223396A5
JP2000223396A5 JP1999021591A JP2159199A JP2000223396A5 JP 2000223396 A5 JP2000223396 A5 JP 2000223396A5 JP 1999021591 A JP1999021591 A JP 1999021591A JP 2159199 A JP2159199 A JP 2159199A JP 2000223396 A5 JP2000223396 A5 JP 2000223396A5
Authority
JP
Japan
Prior art keywords
luminous flux
optical axis
optical path
optical
light
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1999021591A
Other languages
English (en)
Japanese (ja)
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JP2000223396A (ja
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Publication date
Application filed filed Critical
Priority to JP11021591A priority Critical patent/JP2000223396A/ja
Priority claimed from JP11021591A external-priority patent/JP2000223396A/ja
Priority to US09/300,660 priority patent/US6238063B1/en
Publication of JP2000223396A publication Critical patent/JP2000223396A/ja
Publication of JP2000223396A5 publication Critical patent/JP2000223396A5/ja
Pending legal-status Critical Current

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JP11021591A 1998-04-27 1999-01-29 照明光学装置および該照明光学装置を備えた露光装置 Pending JP2000223396A (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP11021591A JP2000223396A (ja) 1999-01-29 1999-01-29 照明光学装置および該照明光学装置を備えた露光装置
US09/300,660 US6238063B1 (en) 1998-04-27 1999-04-27 Illumination optical apparatus and projection exposure apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11021591A JP2000223396A (ja) 1999-01-29 1999-01-29 照明光学装置および該照明光学装置を備えた露光装置

Publications (2)

Publication Number Publication Date
JP2000223396A JP2000223396A (ja) 2000-08-11
JP2000223396A5 true JP2000223396A5 (xx) 2008-02-28

Family

ID=12059293

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11021591A Pending JP2000223396A (ja) 1998-04-27 1999-01-29 照明光学装置および該照明光学装置を備えた露光装置

Country Status (1)

Country Link
JP (1) JP2000223396A (xx)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6741394B1 (en) 1998-03-12 2004-05-25 Nikon Corporation Optical integrator, illumination optical apparatus, exposure apparatus and observation apparatus
JP4426913B2 (ja) * 2004-07-06 2010-03-03 株式会社小松製作所 レーザ装置の調整方法
US7193765B2 (en) * 2005-03-31 2007-03-20 Evans & Sutherland Computer Corporation Reduction of speckle and interference patterns for laser projectors
US7653097B2 (en) * 2007-12-31 2010-01-26 Corning Incorporated Systems and methods for polarization modulation of an optical signal
TW202248769A (zh) * 2019-10-16 2022-12-16 美商希瑪有限責任公司 用於減少光斑之堆疊共焦脈衝拉伸器系列

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