JP2000021953A - 半導体処理方法 - Google Patents

半導体処理方法

Info

Publication number
JP2000021953A
JP2000021953A JP18918598A JP18918598A JP2000021953A JP 2000021953 A JP2000021953 A JP 2000021953A JP 18918598 A JP18918598 A JP 18918598A JP 18918598 A JP18918598 A JP 18918598A JP 2000021953 A JP2000021953 A JP 2000021953A
Authority
JP
Japan
Prior art keywords
wafer
orientation flat
cassette
transfer
processing method
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP18918598A
Other languages
English (en)
Japanese (ja)
Other versions
JP2000021953A5 (enExample
Inventor
Yasuhiro Mizuguchi
靖裕 水口
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kokusai Denki Electric Inc
Original Assignee
Kokusai Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kokusai Electric Co Ltd filed Critical Kokusai Electric Co Ltd
Priority to JP18918598A priority Critical patent/JP2000021953A/ja
Publication of JP2000021953A publication Critical patent/JP2000021953A/ja
Publication of JP2000021953A5 publication Critical patent/JP2000021953A5/ja
Pending legal-status Critical Current

Links

Landscapes

  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
JP18918598A 1998-07-03 1998-07-03 半導体処理方法 Pending JP2000021953A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18918598A JP2000021953A (ja) 1998-07-03 1998-07-03 半導体処理方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18918598A JP2000021953A (ja) 1998-07-03 1998-07-03 半導体処理方法

Publications (2)

Publication Number Publication Date
JP2000021953A true JP2000021953A (ja) 2000-01-21
JP2000021953A5 JP2000021953A5 (enExample) 2006-01-26

Family

ID=16236938

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18918598A Pending JP2000021953A (ja) 1998-07-03 1998-07-03 半導体処理方法

Country Status (1)

Country Link
JP (1) JP2000021953A (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007173285A (ja) * 2005-12-19 2007-07-05 Nec Electronics Corp ウェーハプローバ装置およびウェーハ検査方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007173285A (ja) * 2005-12-19 2007-07-05 Nec Electronics Corp ウェーハプローバ装置およびウェーハ検査方法

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