JP2000021953A5 - - Google Patents

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Publication number
JP2000021953A5
JP2000021953A5 JP1998189185A JP18918598A JP2000021953A5 JP 2000021953 A5 JP2000021953 A5 JP 2000021953A5 JP 1998189185 A JP1998189185 A JP 1998189185A JP 18918598 A JP18918598 A JP 18918598A JP 2000021953 A5 JP2000021953 A5 JP 2000021953A5
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JP
Japan
Prior art keywords
cassette
wafer
semiconductor manufacturing
orientation
semiconductor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1998189185A
Other languages
English (en)
Japanese (ja)
Other versions
JP2000021953A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP18918598A priority Critical patent/JP2000021953A/ja
Priority claimed from JP18918598A external-priority patent/JP2000021953A/ja
Publication of JP2000021953A publication Critical patent/JP2000021953A/ja
Publication of JP2000021953A5 publication Critical patent/JP2000021953A5/ja
Pending legal-status Critical Current

Links

JP18918598A 1998-07-03 1998-07-03 半導体処理方法 Pending JP2000021953A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18918598A JP2000021953A (ja) 1998-07-03 1998-07-03 半導体処理方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18918598A JP2000021953A (ja) 1998-07-03 1998-07-03 半導体処理方法

Publications (2)

Publication Number Publication Date
JP2000021953A JP2000021953A (ja) 2000-01-21
JP2000021953A5 true JP2000021953A5 (enExample) 2006-01-26

Family

ID=16236938

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18918598A Pending JP2000021953A (ja) 1998-07-03 1998-07-03 半導体処理方法

Country Status (1)

Country Link
JP (1) JP2000021953A (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007173285A (ja) * 2005-12-19 2007-07-05 Nec Electronics Corp ウェーハプローバ装置およびウェーハ検査方法

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