|
USD291413S
(en)
*
|
1984-07-30 |
1987-08-18 |
Tokyo Denshi Kagaku Co., Ltd. |
Wafer holding frame
|
|
USD366868S
(en)
*
|
1993-09-29 |
1996-02-06 |
Tokyo Electron Kabushiki Kaisha |
Wafer boat or rack
|
|
USD378675S
(en)
*
|
1995-05-30 |
1997-04-01 |
Tokyo Electron Limited |
Wafer boat
|
|
USD378823S
(en)
*
|
1995-05-30 |
1997-04-15 |
Tokyo Electron Limited |
Wafer boat
|
|
JP3122364B2
(ja)
*
|
1996-02-06 |
2001-01-09 |
東京エレクトロン株式会社 |
ウエハボート
|
|
USD404015S
(en)
*
|
1997-01-31 |
1999-01-12 |
Tokyo Electron Ltd. |
Wafer boat for use in a semiconductor wafer heat processing apparatus
|
|
USD411176S
(en)
*
|
1997-08-20 |
1999-06-22 |
Tokyo Electron Limited |
Wafer boat for use in a semiconductor wafer heat processing apparatus
|
|
USD409158S
(en)
*
|
1997-08-20 |
1999-05-04 |
Tokyo Electron Limited |
Wafer boat for use in a semiconductor wafer heat processing apparatus
|
|
KR20000002833A
(ko)
*
|
1998-06-23 |
2000-01-15 |
윤종용 |
반도체 웨이퍼 보트
|
|
JP3487497B2
(ja)
*
|
1998-06-24 |
2004-01-19 |
岩手東芝エレクトロニクス株式会社 |
被処理体収容治具及びこれを用いた熱処理装置
|
|
US6225594B1
(en)
*
|
1999-04-15 |
2001-05-01 |
Integrated Materials, Inc. |
Method and apparatus for securing components of wafer processing fixtures
|
|
US6099645A
(en)
*
|
1999-07-09 |
2000-08-08 |
Union Oil Company Of California |
Vertical semiconductor wafer carrier with slats
|
|
US6287112B1
(en)
*
|
2000-03-30 |
2001-09-11 |
Asm International, N.V. |
Wafer boat
|
|
US6341935B1
(en)
*
|
2000-06-14 |
2002-01-29 |
Taiwan Semiconductor Manufacturing Company, Ltd. |
Wafer boat having improved wafer holding capability
|
|
US20020130061A1
(en)
*
|
2000-11-02 |
2002-09-19 |
Hengst Richard R. |
Apparatus and method of making a slip free wafer boat
|
|
US6727191B2
(en)
*
|
2001-02-26 |
2004-04-27 |
Integrated Materials, Inc. |
High temperature hydrogen anneal of silicon wafers supported on a silicon fixture
|
|
JP4467028B2
(ja)
*
|
2001-05-11 |
2010-05-26 |
信越石英株式会社 |
縦型ウェーハ支持治具
|
|
US6811040B2
(en)
*
|
2001-07-16 |
2004-11-02 |
Rohm And Haas Company |
Wafer holding apparatus
|
|
JP4506125B2
(ja)
*
|
2003-07-16 |
2010-07-21 |
信越半導体株式会社 |
熱処理用縦型ボート及びその製造方法
|
|
TWD119911S1
(zh)
*
|
2006-05-01 |
2007-11-11 |
東京威力科創股份有限公司 |
晶舟
|
|
TWD119910S1
(zh)
*
|
2006-05-01 |
2007-11-11 |
東京威力科創股份有限公司 |
晶舟
|
|
TWD130137S1
(zh)
*
|
2006-10-25 |
2009-08-01 |
東京威力科創股份有限公司 |
晶舟
|
|
USD703161S1
(en)
*
|
2012-10-15 |
2014-04-22 |
Sumitomo Electric Industries, Ltd. |
Wafer holder for ion implantation
|
|
USD734730S1
(en)
*
|
2012-12-27 |
2015-07-21 |
Hitachi Kokusai Electric Inc. |
Boat of substrate processing apparatus
|
|
TWD163542S
(zh)
*
|
2013-03-22 |
2014-10-11 |
日立國際電氣股份有限公司 |
基板處理裝置用晶舟
|
|
TWD166332S
(zh)
*
|
2013-03-22 |
2015-03-01 |
日立國際電氣股份有限公司 |
基板處理裝置用晶舟之部分
|
|
TWD165429S
(zh)
*
|
2013-07-29 |
2015-01-11 |
日立國際電氣股份有限公司 |
半導體製造裝置用晶舟
|
|
TWD167988S
(zh)
*
|
2013-07-29 |
2015-05-21 |
日立國際電氣股份有限公司 |
半導體製造裝置用晶舟
|
|
TWD168827S
(zh)
*
|
2013-07-29 |
2015-07-01 |
日立國際電氣股份有限公司 |
半導體製造裝置用晶舟
|
|
JP1537312S
(GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
*
|
2014-11-20 |
2015-11-09 |
|
|
|
JP1537629S
(GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
*
|
2014-11-20 |
2015-11-09 |
|
|
|
JP1563649S
(GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
*
|
2016-02-12 |
2016-11-21 |
|
|
|
JP1597807S
(GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
*
|
2017-08-21 |
2018-02-19 |
|
|
|
USD847105S1
(en)
*
|
2018-05-03 |
2019-04-30 |
Kokusai Electric Corporation |
Boat of substrate processing apparatus
|
|
USD846514S1
(en)
*
|
2018-05-03 |
2019-04-23 |
Kokusai Electric Corporation |
Boat of substrate processing apparatus
|
|
JP1638282S
(GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
*
|
2018-09-20 |
2019-08-05 |
|
|
|
JP1640260S
(GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
*
|
2018-11-19 |
2019-09-02 |
|
|
|
JP1665228S
(GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
*
|
2019-11-28 |
2020-08-03 |
|
|
|
JP1678274S
(ja)
|
2020-03-10 |
2021-02-01 |
|
基板処理装置用ボート
|
|
JP1678278S
(ja)
*
|
2020-03-19 |
2021-02-01 |
|
基板処理装置用ボート
|
|
JP1700777S
(ja)
*
|
2021-03-15 |
2021-11-29 |
|
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|