USD1063875S1 - Substrate lifter for semiconductor manufacturing equipment - Google Patents
Substrate lifter for semiconductor manufacturing equipment Download PDFInfo
- Publication number
- USD1063875S1 USD1063875S1 US29/885,259 US202329885259F USD1063875S US D1063875 S1 USD1063875 S1 US D1063875S1 US 202329885259 F US202329885259 F US 202329885259F US D1063875 S USD1063875 S US D1063875S
- Authority
- US
- United States
- Prior art keywords
- semiconductor manufacturing
- manufacturing equipment
- substrate lifter
- lifter
- substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
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Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2022-019754D | 2022-09-14 | ||
JP2022019754F JP1741512S (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 2022-09-14 | 2022-09-14 |
Publications (1)
Publication Number | Publication Date |
---|---|
USD1063875S1 true USD1063875S1 (en) | 2025-02-25 |
Family
ID=85802433
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US29/885,259 Active USD1063875S1 (en) | 2022-09-14 | 2023-02-22 | Substrate lifter for semiconductor manufacturing equipment |
Country Status (3)
Citations (40)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
USD291413S (en) * | 1984-07-30 | 1987-08-18 | Tokyo Denshi Kagaku Co., Ltd. | Wafer holding frame |
USD366868S (en) * | 1993-09-29 | 1996-02-06 | Tokyo Electron Kabushiki Kaisha | Wafer boat or rack |
USD378675S (en) * | 1995-05-30 | 1997-04-01 | Tokyo Electron Limited | Wafer boat |
USD378823S (en) * | 1995-05-30 | 1997-04-15 | Tokyo Electron Limited | Wafer boat |
US5752609A (en) * | 1996-02-06 | 1998-05-19 | Tokyo Electron Limited | Wafer boat |
USD404015S (en) * | 1997-01-31 | 1999-01-12 | Tokyo Electron Ltd. | Wafer boat for use in a semiconductor wafer heat processing apparatus |
USD409158S (en) * | 1997-08-20 | 1999-05-04 | Tokyo Electron Limited | Wafer boat for use in a semiconductor wafer heat processing apparatus |
USD411176S (en) * | 1997-08-20 | 1999-06-22 | Tokyo Electron Limited | Wafer boat for use in a semiconductor wafer heat processing apparatus |
US6095806A (en) * | 1998-06-24 | 2000-08-01 | Tokyo Electron Limited | Semiconductor wafer boat and vertical heat treating system |
US6099302A (en) * | 1998-06-23 | 2000-08-08 | Samsung Electronics Co., Ltd. | Semiconductor wafer boat with reduced wafer contact area |
US6099645A (en) * | 1999-07-09 | 2000-08-08 | Union Oil Company Of California | Vertical semiconductor wafer carrier with slats |
US6225594B1 (en) * | 1999-04-15 | 2001-05-01 | Integrated Materials, Inc. | Method and apparatus for securing components of wafer processing fixtures |
US6287112B1 (en) * | 2000-03-30 | 2001-09-11 | Asm International, N.V. | Wafer boat |
US6341935B1 (en) * | 2000-06-14 | 2002-01-29 | Taiwan Semiconductor Manufacturing Company, Ltd. | Wafer boat having improved wafer holding capability |
US20020130061A1 (en) * | 2000-11-02 | 2002-09-19 | Hengst Richard R. | Apparatus and method of making a slip free wafer boat |
US20020187023A1 (en) * | 2001-05-11 | 2002-12-12 | Itsuo Araki | Vertical type wafer supporting jig |
US20030024888A1 (en) * | 2001-07-16 | 2003-02-06 | Rohm And Haas Company | Wafer holding apparatus |
US6979659B2 (en) * | 2001-02-26 | 2005-12-27 | Integrated Materials, Inc. | Silicon fixture supporting silicon wafers during high temperature processing |
USD570308S1 (en) * | 2006-05-01 | 2008-06-03 | Tokyo Electron Limited | Wafer boat |
USD570309S1 (en) * | 2006-10-25 | 2008-06-03 | Tokyo Electron Limited | Wafer boat |
USD580894S1 (en) * | 2006-05-01 | 2008-11-18 | Tokyo Electron Limited | Wafer boat |
US7484958B2 (en) * | 2003-07-16 | 2009-02-03 | Shin-Etsu Handotai Co., Ltd. | Vertical boat for heat treatment and method for producing the same |
USD703161S1 (en) * | 2012-10-15 | 2014-04-22 | Sumitomo Electric Industries, Ltd. | Wafer holder for ion implantation |
USD734730S1 (en) * | 2012-12-27 | 2015-07-21 | Hitachi Kokusai Electric Inc. | Boat of substrate processing apparatus |
USD737785S1 (en) * | 2013-07-29 | 2015-09-01 | Hitachi Kokusai Electric Inc. | Boat for substrate processing apparatus |
USD738329S1 (en) * | 2013-07-29 | 2015-09-08 | Hitachi Kokusai Electric Inc. | Boat for substrate processing apparatus |
USD739831S1 (en) * | 2013-03-22 | 2015-09-29 | Hitachi Kokusai Electric Inc. | Boat for substrate processing apparatus |
USD740769S1 (en) * | 2013-03-22 | 2015-10-13 | Hitachi Kokusai Electric Inc. | Boat for substrate processing apparatus |
USD747279S1 (en) * | 2013-07-29 | 2016-01-12 | Hitachi Kokusai Electric Inc. | Boat for substrate processing apparatus |
USD789310S1 (en) * | 2014-11-20 | 2017-06-13 | Tokyo Electron Limited | Wafer boat |
USD791721S1 (en) * | 2014-11-20 | 2017-07-11 | Tokyo Electron Limited | Wafer boat |
USD839219S1 (en) * | 2016-02-12 | 2019-01-29 | Kokusai Electric Corporation | Boat for substrate processing apparatus |
USD846514S1 (en) * | 2018-05-03 | 2019-04-23 | Kokusai Electric Corporation | Boat of substrate processing apparatus |
USD847105S1 (en) * | 2018-05-03 | 2019-04-30 | Kokusai Electric Corporation | Boat of substrate processing apparatus |
USD893438S1 (en) * | 2017-08-21 | 2020-08-18 | Tokyo Electron Limited | Wafer boat |
USD920935S1 (en) * | 2018-09-20 | 2021-06-01 | Kokusai Electric Corporation | Boat for substrate processing apparatus |
USD940669S1 (en) * | 2018-11-19 | 2022-01-11 | Kokusai Electric Corporation | Boat for substrate processing apparatus |
USD958093S1 (en) * | 2019-11-28 | 2022-07-19 | Kokusai Electric Corporation | Boat of substrate processing apparatus |
USD965542S1 (en) * | 2020-03-19 | 2022-10-04 | Kokusai Electric Corporation | Boat of substrate processing apparatus |
USD981971S1 (en) * | 2021-03-15 | 2023-03-28 | Kokusai Electric Corporation | Boat of substrate processing apparatus |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP1678274S (ja) | 2020-03-10 | 2021-02-01 | 基板処理装置用ボート |
-
2022
- 2022-09-14 JP JP2022019754F patent/JP1741512S/ja active Active
-
2023
- 2023-02-07 TW TW112300492F patent/TWD230464S/zh unknown
- 2023-02-22 US US29/885,259 patent/USD1063875S1/en active Active
Patent Citations (40)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
USD291413S (en) * | 1984-07-30 | 1987-08-18 | Tokyo Denshi Kagaku Co., Ltd. | Wafer holding frame |
USD366868S (en) * | 1993-09-29 | 1996-02-06 | Tokyo Electron Kabushiki Kaisha | Wafer boat or rack |
USD378675S (en) * | 1995-05-30 | 1997-04-01 | Tokyo Electron Limited | Wafer boat |
USD378823S (en) * | 1995-05-30 | 1997-04-15 | Tokyo Electron Limited | Wafer boat |
US5752609A (en) * | 1996-02-06 | 1998-05-19 | Tokyo Electron Limited | Wafer boat |
USD404015S (en) * | 1997-01-31 | 1999-01-12 | Tokyo Electron Ltd. | Wafer boat for use in a semiconductor wafer heat processing apparatus |
USD409158S (en) * | 1997-08-20 | 1999-05-04 | Tokyo Electron Limited | Wafer boat for use in a semiconductor wafer heat processing apparatus |
USD411176S (en) * | 1997-08-20 | 1999-06-22 | Tokyo Electron Limited | Wafer boat for use in a semiconductor wafer heat processing apparatus |
US6099302A (en) * | 1998-06-23 | 2000-08-08 | Samsung Electronics Co., Ltd. | Semiconductor wafer boat with reduced wafer contact area |
US6095806A (en) * | 1998-06-24 | 2000-08-01 | Tokyo Electron Limited | Semiconductor wafer boat and vertical heat treating system |
US6225594B1 (en) * | 1999-04-15 | 2001-05-01 | Integrated Materials, Inc. | Method and apparatus for securing components of wafer processing fixtures |
US6099645A (en) * | 1999-07-09 | 2000-08-08 | Union Oil Company Of California | Vertical semiconductor wafer carrier with slats |
US6287112B1 (en) * | 2000-03-30 | 2001-09-11 | Asm International, N.V. | Wafer boat |
US6341935B1 (en) * | 2000-06-14 | 2002-01-29 | Taiwan Semiconductor Manufacturing Company, Ltd. | Wafer boat having improved wafer holding capability |
US20020130061A1 (en) * | 2000-11-02 | 2002-09-19 | Hengst Richard R. | Apparatus and method of making a slip free wafer boat |
US6979659B2 (en) * | 2001-02-26 | 2005-12-27 | Integrated Materials, Inc. | Silicon fixture supporting silicon wafers during high temperature processing |
US20020187023A1 (en) * | 2001-05-11 | 2002-12-12 | Itsuo Araki | Vertical type wafer supporting jig |
US20030024888A1 (en) * | 2001-07-16 | 2003-02-06 | Rohm And Haas Company | Wafer holding apparatus |
US7484958B2 (en) * | 2003-07-16 | 2009-02-03 | Shin-Etsu Handotai Co., Ltd. | Vertical boat for heat treatment and method for producing the same |
USD580894S1 (en) * | 2006-05-01 | 2008-11-18 | Tokyo Electron Limited | Wafer boat |
USD570308S1 (en) * | 2006-05-01 | 2008-06-03 | Tokyo Electron Limited | Wafer boat |
USD570309S1 (en) * | 2006-10-25 | 2008-06-03 | Tokyo Electron Limited | Wafer boat |
USD703161S1 (en) * | 2012-10-15 | 2014-04-22 | Sumitomo Electric Industries, Ltd. | Wafer holder for ion implantation |
USD734730S1 (en) * | 2012-12-27 | 2015-07-21 | Hitachi Kokusai Electric Inc. | Boat of substrate processing apparatus |
USD739831S1 (en) * | 2013-03-22 | 2015-09-29 | Hitachi Kokusai Electric Inc. | Boat for substrate processing apparatus |
USD740769S1 (en) * | 2013-03-22 | 2015-10-13 | Hitachi Kokusai Electric Inc. | Boat for substrate processing apparatus |
USD737785S1 (en) * | 2013-07-29 | 2015-09-01 | Hitachi Kokusai Electric Inc. | Boat for substrate processing apparatus |
USD738329S1 (en) * | 2013-07-29 | 2015-09-08 | Hitachi Kokusai Electric Inc. | Boat for substrate processing apparatus |
USD747279S1 (en) * | 2013-07-29 | 2016-01-12 | Hitachi Kokusai Electric Inc. | Boat for substrate processing apparatus |
USD791721S1 (en) * | 2014-11-20 | 2017-07-11 | Tokyo Electron Limited | Wafer boat |
USD789310S1 (en) * | 2014-11-20 | 2017-06-13 | Tokyo Electron Limited | Wafer boat |
USD839219S1 (en) * | 2016-02-12 | 2019-01-29 | Kokusai Electric Corporation | Boat for substrate processing apparatus |
USD893438S1 (en) * | 2017-08-21 | 2020-08-18 | Tokyo Electron Limited | Wafer boat |
USD846514S1 (en) * | 2018-05-03 | 2019-04-23 | Kokusai Electric Corporation | Boat of substrate processing apparatus |
USD847105S1 (en) * | 2018-05-03 | 2019-04-30 | Kokusai Electric Corporation | Boat of substrate processing apparatus |
USD920935S1 (en) * | 2018-09-20 | 2021-06-01 | Kokusai Electric Corporation | Boat for substrate processing apparatus |
USD940669S1 (en) * | 2018-11-19 | 2022-01-11 | Kokusai Electric Corporation | Boat for substrate processing apparatus |
USD958093S1 (en) * | 2019-11-28 | 2022-07-19 | Kokusai Electric Corporation | Boat of substrate processing apparatus |
USD965542S1 (en) * | 2020-03-19 | 2022-10-04 | Kokusai Electric Corporation | Boat of substrate processing apparatus |
USD981971S1 (en) * | 2021-03-15 | 2023-03-28 | Kokusai Electric Corporation | Boat of substrate processing apparatus |
Non-Patent Citations (2)
Title |
---|
Customized Silicon Carbide (SiC) Boat for Wafer Handling,https://www.msesupplies.com/products/customized-silicon-carbide-sic-boat, © 2024. (Year: 2024). * |
Vertical Column Wafer Boat & Pedestal,https://www.veteksemi.com/vertical-column-wafer-boat-pedestal.html, Copyright © 2024. (Year: 2024). * |
Also Published As
Publication number | Publication date |
---|---|
TWD230464S (zh) | 2024-03-21 |
JP1741512S (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 2023-04-11 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
FEPP | Fee payment procedure |
Free format text: ENTITY STATUS SET TO UNDISCOUNTED (ORIGINAL EVENT CODE: BIG.); ENTITY STATUS OF PATENT OWNER: LARGE ENTITY |