JP1734543S - 基板処理チャンバのインターロック処理キットのための支持パイプ - Google Patents

基板処理チャンバのインターロック処理キットのための支持パイプ

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Publication number
JP1734543S
JP1734543S JP2022020006F JP2022020006F JP1734543S JP 1734543 S JP1734543 S JP 1734543S JP 2022020006 F JP2022020006 F JP 2022020006F JP 2022020006 F JP2022020006 F JP 2022020006F JP 1734543 S JP1734543 S JP 1734543S
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JP
Japan
Prior art keywords
support pipe
kit
processing chamber
substrate processing
chamber interlock
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2022020006F
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English (en)
Japanese (ja)
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Publication date
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Publication of JP1734543S publication Critical patent/JP1734543S/ja
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JP2022020006F 2022-03-18 2022-09-16 基板処理チャンバのインターロック処理キットのための支持パイプ Active JP1734543S (ja)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US29/831,299 USD1042374S1 (en) 2022-03-18 2022-03-18 Support pipe for an interlocking process kit for a substrate processing chamber

Publications (1)

Publication Number Publication Date
JP1734543S true JP1734543S (ja) 2023-01-16

Family

ID=84900522

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2022020006F Active JP1734543S (ja) 2022-03-18 2022-09-16 基板処理チャンバのインターロック処理キットのための支持パイプ

Country Status (3)

Country Link
US (1) USD1042374S1 (zh)
JP (1) JP1734543S (zh)
TW (1) TWD227270S (zh)

Family Cites Families (74)

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JP2021012952A (ja) 2019-07-05 2021-02-04 東京エレクトロン株式会社 載置台、基板処理装置及び載置台の組立方法
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USD941371S1 (en) 2020-03-20 2022-01-18 Applied Materials, Inc. Process shield for a substrate processing chamber
USD934315S1 (en) * 2020-03-20 2021-10-26 Applied Materials, Inc. Deposition ring for a substrate processing chamber
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CN115398616A (zh) 2020-03-23 2022-11-25 朗姆研究公司 用于衬底处理系统的高精度边缘环对中
USD928591S1 (en) 2020-05-05 2021-08-24 Wade D. Morgan, Sr. Support ring for a water heater stand
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Also Published As

Publication number Publication date
TWD227270S (zh) 2023-09-01
USD1042374S1 (en) 2024-09-17

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