JP1755868S - ガス分配プレート - Google Patents

ガス分配プレート

Info

Publication number
JP1755868S
JP1755868S JP2023000819F JP2023000819F JP1755868S JP 1755868 S JP1755868 S JP 1755868S JP 2023000819 F JP2023000819 F JP 2023000819F JP 2023000819 F JP2023000819 F JP 2023000819F JP 1755868 S JP1755868 S JP 1755868S
Authority
JP
Japan
Prior art keywords
gas distribution
distribution plate
gas
plate
distribution
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2023000819F
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Application granted granted Critical
Publication of JP1755868S publication Critical patent/JP1755868S/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

JP2023000819F 2022-07-19 2023-01-19 ガス分配プレート Active JP1755868S (ja)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US202229846787 2022-07-19

Publications (1)

Publication Number Publication Date
JP1755868S true JP1755868S (ja) 2023-10-20

Family

ID=88327828

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2023000819F Active JP1755868S (ja) 2022-07-19 2023-01-19 ガス分配プレート

Country Status (2)

Country Link
JP (1) JP1755868S (ja)
TW (1) TWD227498S (ja)

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD980814S1 (en) 2021-05-11 2023-03-14 Asm Ip Holding B.V. Gas distributor for substrate processing apparatus

Also Published As

Publication number Publication date
TWD227498S (zh) 2023-09-11

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