IT1397181B1 - Componente micromeccanico - Google Patents

Componente micromeccanico

Info

Publication number
IT1397181B1
IT1397181B1 ITMI2009A001978A ITMI20091978A IT1397181B1 IT 1397181 B1 IT1397181 B1 IT 1397181B1 IT MI2009A001978 A ITMI2009A001978 A IT MI2009A001978A IT MI20091978 A ITMI20091978 A IT MI20091978A IT 1397181 B1 IT1397181 B1 IT 1397181B1
Authority
IT
Italy
Prior art keywords
micromechanical component
micromechanical
component
Prior art date
Application number
ITMI2009A001978A
Other languages
English (en)
Inventor
Johannes Classen
Original Assignee
Bosch Gmbh Robert
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Bosch Gmbh Robert filed Critical Bosch Gmbh Robert
Publication of ITMI20091978A1 publication Critical patent/ITMI20091978A1/it
Application granted granted Critical
Publication of IT1397181B1 publication Critical patent/IT1397181B1/it

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/125—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by capacitive pick-up
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/0802—Details
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
    • G01P2015/0822—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass
    • G01P2015/0825—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass
    • G01P2015/0831—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass the mass being of the paddle type having the pivot axis between the longitudinal ends of the mass, e.g. see-saw configuration
ITMI2009A001978A 2008-11-17 2009-11-12 Componente micromeccanico IT1397181B1 (it)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE102008043788A DE102008043788A1 (de) 2008-11-17 2008-11-17 Mikromechanisches Bauelement

Publications (2)

Publication Number Publication Date
ITMI20091978A1 ITMI20091978A1 (it) 2010-05-18
IT1397181B1 true IT1397181B1 (it) 2013-01-04

Family

ID=42104817

Family Applications (1)

Application Number Title Priority Date Filing Date
ITMI2009A001978A IT1397181B1 (it) 2008-11-17 2009-11-12 Componente micromeccanico

Country Status (3)

Country Link
US (1) US8806940B2 (it)
DE (1) DE102008043788A1 (it)
IT (1) IT1397181B1 (it)

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DE102006058747A1 (de) * 2006-12-12 2008-06-19 Robert Bosch Gmbh Mikromechanischer z-Sensor
DE102008043788A1 (de) * 2008-11-17 2010-05-20 Robert Bosch Gmbh Mikromechanisches Bauelement
IT1401001B1 (it) * 2010-06-15 2013-07-05 Milano Politecnico Accelerometro capacitivo triassiale microelettromeccanico
DE102010039293B4 (de) 2010-08-13 2018-05-24 Robert Bosch Gmbh Mikromechanisches Bauteil und Herstellungsverfahren für ein mikromechanisches Bauteil
JP2012088120A (ja) * 2010-10-18 2012-05-10 Seiko Epson Corp 物理量センサー素子、物理量センサーおよび電子機器
DE102010062056B4 (de) 2010-11-26 2018-09-27 Robert Bosch Gmbh Mikromechanisches Bauteil
DE102011006422B4 (de) 2011-03-30 2019-02-28 Robert Bosch Gmbh Mikromechanisches Bauteil und Sensorvorrichtung
US9069005B2 (en) * 2011-06-17 2015-06-30 Avago Technologies General Ip (Singapore) Pte. Ltd. Capacitance detector for accelerometer and gyroscope and accelerometer and gyroscope with capacitance detector
DE102011081014B4 (de) 2011-08-16 2020-01-23 Robert Bosch Gmbh Mikromechanisches Bauteil und Herstellungsverfahren für ein mikromechanisches Bauteil
JP5790296B2 (ja) * 2011-08-17 2015-10-07 セイコーエプソン株式会社 物理量センサー及び電子機器
DE102011057110A1 (de) * 2011-12-28 2013-07-04 Maxim Integrated Products, Inc. MEMS-Beschleunigungssensor
US9290067B2 (en) 2012-08-30 2016-03-22 Freescale Semiconductor, Inc. Pressure sensor with differential capacitive output
JP6206650B2 (ja) * 2013-07-17 2017-10-04 セイコーエプソン株式会社 機能素子、電子機器、および移動体
JP2015072188A (ja) * 2013-10-03 2015-04-16 セイコーエプソン株式会社 物理量検出素子、および物理量検出装置、電子機器、移動体
DE102014202816B4 (de) * 2014-02-17 2022-06-30 Robert Bosch Gmbh Wippeneinrichtung für einen mikromechanischen Z-Sensor
JP6274413B2 (ja) * 2014-02-25 2018-02-07 セイコーエプソン株式会社 機能素子、電子機器、および移動体
US9810712B2 (en) 2014-08-15 2017-11-07 Seiko Epson Corporation Physical quantity sensor, physical quantity sensor device, electronic equipment, and moving body
JP6655281B2 (ja) * 2014-08-19 2020-02-26 セイコーエプソン株式会社 物理量センサー、電子機器および移動体
JP6464613B2 (ja) * 2014-08-27 2019-02-06 セイコーエプソン株式会社 物理量センサー、電子機器および移動体
US10295346B2 (en) * 2014-10-28 2019-05-21 Seiko Epson Corporation Physical quantity detecting vibration element, physical quantity sensor, electronic apparatus, and moving object
DE102014223314A1 (de) * 2014-11-14 2016-05-19 Robert Bosch Gmbh Wippeneinrichtung für einen mikromechanischen Z-Sensor
US20170356929A1 (en) * 2015-01-30 2017-12-14 Goertek, Inc. Z-axis structure of accelerometer and manufacturing method of z-axis structure
DE102015207639B4 (de) * 2015-04-27 2022-10-06 Robert Bosch Gmbh Seismisches Erfassungselement für einen mikromechanischen Sensor
US10739376B2 (en) * 2015-09-15 2020-08-11 Hitachi, Ltd. Acceleration sensor
CN108700612B (zh) * 2016-03-03 2020-11-17 精工爱普生株式会社 传感器装置、电子设备以及移动体
WO2017188514A1 (ko) * 2016-04-26 2017-11-02 (주)스탠딩에그 오프셋 드리프트 특성이 개선된 mems 장치의 제조 방법, 상기 mems 장치를 포함하는 mems 패키지 및 컴퓨팅 시스템
JP6450983B2 (ja) * 2017-06-01 2019-01-16 セイコーエプソン株式会社 センサー素子、電子機器、および移動体
JP6911645B2 (ja) 2017-08-30 2021-07-28 セイコーエプソン株式会社 物理量センサー、物理量センサーの製造方法、複合センサー、慣性計測ユニット、携帯型電子機器、電子機器及び移動体
US10759656B2 (en) * 2017-09-29 2020-09-01 Apple Inc. MEMS sensor with dual pendulous proof masses
DE102017219901B3 (de) * 2017-11-09 2019-01-10 Robert Bosch Gmbh Mikromechanischer z-Inertialsensor
DE102018211547A1 (de) * 2018-07-11 2020-01-16 Robert Bosch Gmbh Mikromechanischer Sensor
IT201900000190A1 (it) * 2019-01-08 2020-07-08 St Microelectronics Srl Dispositivo mems con geometria ottimizzata per la riduzione dell'offset dovuto all'effetto radiometrico
JP7383978B2 (ja) * 2019-10-23 2023-11-21 セイコーエプソン株式会社 物理量センサー、電子機器および移動体
DE102020211924A1 (de) * 2020-09-23 2022-03-24 Robert Bosch Gesellschaft mit beschränkter Haftung Sensorbauelement mit einem mikroelektromechanischen z-Inertialsensor und Verfahren zum Ermitteln einer Beschleunigung mithilfe des mikroelektromechanischen z-Inertialsensors

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DE102008002606B4 (de) * 2008-06-24 2020-03-12 Robert Bosch Gmbh Mikromechanischer Beschleunigungssensor mit offener seismischer Masse
US8020443B2 (en) * 2008-10-30 2011-09-20 Freescale Semiconductor, Inc. Transducer with decoupled sensing in mutually orthogonal directions
DE102008043788A1 (de) * 2008-11-17 2010-05-20 Robert Bosch Gmbh Mikromechanisches Bauelement
DE102009029248B4 (de) * 2009-09-08 2022-12-15 Robert Bosch Gmbh Mikromechanisches System zum Erfassen einer Beschleunigung
US8322216B2 (en) * 2009-09-22 2012-12-04 Duli Yu Micromachined accelerometer with monolithic electrodes and method of making the same
DE102010039069B4 (de) * 2010-08-09 2023-08-24 Robert Bosch Gmbh Beschleunigungssensor mit einer Dämpfungseinrichtung

Also Published As

Publication number Publication date
DE102008043788A1 (de) 2010-05-20
US8806940B2 (en) 2014-08-19
ITMI20091978A1 (it) 2010-05-18
US20100122578A1 (en) 2010-05-20

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