IT1400768B1 - Componente micromeccanico - Google Patents

Componente micromeccanico

Info

Publication number
IT1400768B1
IT1400768B1 ITMI2010A001578A ITMI20101578A IT1400768B1 IT 1400768 B1 IT1400768 B1 IT 1400768B1 IT MI2010A001578 A ITMI2010A001578 A IT MI2010A001578A IT MI20101578 A ITMI20101578 A IT MI20101578A IT 1400768 B1 IT1400768 B1 IT 1400768B1
Authority
IT
Italy
Prior art keywords
micromechanical component
micromechanical
component
Prior art date
Application number
ITMI2010A001578A
Other languages
English (en)
Inventor
Christina Leinenbach
Original Assignee
Bosch Gmbh Robert
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Bosch Gmbh Robert filed Critical Bosch Gmbh Robert
Publication of ITMI20101578A1 publication Critical patent/ITMI20101578A1/it
Application granted granted Critical
Publication of IT1400768B1 publication Critical patent/IT1400768B1/it

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/0802—Details
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B81B3/0035—Constitution or structural means for controlling the movement of the flexible or deformable elements
    • B81B3/0051—For defining the movement, i.e. structures that guide or limit the movement of an element
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/125—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by capacitive pick-up
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/02—Sensors
    • B81B2201/0228—Inertial sensors
    • B81B2201/025—Inertial sensors not provided for in B81B2201/0235 - B81B2201/0242
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
    • G01P2015/0822—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass
    • G01P2015/0825—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass
    • G01P2015/0831—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass the mass being of the paddle type having the pivot axis between the longitudinal ends of the mass, e.g. see-saw configuration
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49826—Assembling or joining
ITMI2010A001578A 2009-09-02 2010-08-27 Componente micromeccanico IT1400768B1 (it)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE102009029095.8A DE102009029095B4 (de) 2009-09-02 2009-09-02 Mikromechanisches Bauelement

Publications (2)

Publication Number Publication Date
ITMI20101578A1 ITMI20101578A1 (it) 2011-03-03
IT1400768B1 true IT1400768B1 (it) 2013-07-02

Family

ID=43524834

Family Applications (1)

Application Number Title Priority Date Filing Date
ITMI2010A001578A IT1400768B1 (it) 2009-09-02 2010-08-27 Componente micromeccanico

Country Status (3)

Country Link
US (1) US8671757B2 (it)
DE (1) DE102009029095B4 (it)
IT (1) IT1400768B1 (it)

Families Citing this family (38)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8919199B2 (en) * 2010-12-01 2014-12-30 Analog Devices, Inc. Apparatus and method for anchoring electrodes in MEMS devices
JP2013117396A (ja) * 2011-12-01 2013-06-13 Denso Corp 加速度センサ
JP5999302B2 (ja) * 2012-02-09 2016-09-28 セイコーエプソン株式会社 電子デバイスおよびその製造方法、並びに電子機器
US8748999B2 (en) * 2012-04-20 2014-06-10 Taiwan Semiconductor Manufacturing Company, Ltd. Capacitive sensors and methods for forming the same
DE102012208032B4 (de) * 2012-05-14 2023-09-28 Robert Bosch Gmbh Hybrid integriertes Bauteil mit MEMS-Bauelement und ASIC-Bauelement
GB2506171B (en) * 2012-09-24 2015-01-28 Wolfson Microelectronics Plc MEMS device and process
DE102012219550B4 (de) * 2012-10-25 2024-04-18 Robert Bosch Gmbh Hybrid integriertes Bauteil
CN103063876B (zh) * 2013-01-05 2014-08-20 中国科学院上海微系统与信息技术研究所 变面积型电容式横向加速度传感器及制备方法
US8692340B1 (en) * 2013-03-13 2014-04-08 Invensense, Inc. MEMS acoustic sensor with integrated back cavity
US9809448B2 (en) 2013-03-13 2017-11-07 Invensense, Inc. Systems and apparatus having MEMS acoustic sensors and other MEMS sensors and methods of fabrication of the same
US9213045B2 (en) * 2013-05-23 2015-12-15 Freescale Semiconductor, Inc. Active lateral force stiction self-recovery for microelectromechanical systems devices
DE102013222747A1 (de) * 2013-11-08 2015-05-13 Robert Bosch Gmbh Mikromechanischer Z-Sensor
US9599471B2 (en) 2013-11-14 2017-03-21 Analog Devices, Inc. Dual use of a ring structure as gyroscope and accelerometer
US9709595B2 (en) 2013-11-14 2017-07-18 Analog Devices, Inc. Method and apparatus for detecting linear and rotational movement
DE102014202816B4 (de) 2014-02-17 2022-06-30 Robert Bosch Gmbh Wippeneinrichtung für einen mikromechanischen Z-Sensor
DE102014002823B4 (de) * 2014-02-25 2017-11-02 Northrop Grumman Litef Gmbh Mikromechanisches bauteil mit geteilter, galvanisch isolierter aktiver struktur und verfahren zum betreiben eines solchen bauteils
JP6413463B2 (ja) * 2014-08-15 2018-10-31 セイコーエプソン株式会社 物理量センサー、物理量センサー装置、電子機器および移動体
US9810712B2 (en) 2014-08-15 2017-11-07 Seiko Epson Corporation Physical quantity sensor, physical quantity sensor device, electronic equipment, and moving body
JP6655281B2 (ja) * 2014-08-19 2020-02-26 セイコーエプソン株式会社 物理量センサー、電子機器および移動体
JP6464613B2 (ja) * 2014-08-27 2019-02-06 セイコーエプソン株式会社 物理量センサー、電子機器および移動体
US10746548B2 (en) 2014-11-04 2020-08-18 Analog Devices, Inc. Ring gyroscope structural features
EP3038126A1 (en) * 2014-12-22 2016-06-29 DelfMEMS SAS MEMS structure with thick movable membrane
US9638712B2 (en) * 2015-01-22 2017-05-02 Nxp Usa, Inc. MEMS device with over-travel stop structure and method of fabrication
US20170356929A1 (en) * 2015-01-30 2017-12-14 Goertek, Inc. Z-axis structure of accelerometer and manufacturing method of z-axis structure
US10858241B2 (en) * 2015-04-09 2020-12-08 Rensselaer Polytechnic Institute Enhanced control of shuttle mass motion in MEMS devices
US20170023606A1 (en) * 2015-07-23 2017-01-26 Freescale Semiconductor, Inc. Mems device with flexible travel stops and method of fabrication
DE102016203092A1 (de) * 2015-11-10 2017-05-11 Robert Bosch Gmbh Beschleunigungssensor
DE102017208357A1 (de) * 2017-05-18 2018-11-22 Robert Bosch Gmbh Mikroelektromechanisches Bauelement
DE102017208370A1 (de) * 2017-05-18 2018-11-22 Robert Bosch Gmbh Mikromechanischer Sensor
JP6922562B2 (ja) * 2017-08-31 2021-08-18 セイコーエプソン株式会社 物理量センサー、物理量センサーデバイス、携帯型電子機器、電子機器および移動体
DE102017216962A1 (de) * 2017-09-25 2019-03-28 Robert Bosch Gmbh Mikromechanische Sensoranordnung
DE102018222615B4 (de) * 2018-12-20 2021-09-02 Robert Bosch Gmbh Bauelement mit einer optimierten mehrlagigen Torsionsfeder
US11656077B2 (en) 2019-01-31 2023-05-23 Analog Devices, Inc. Pseudo-extensional mode MEMS ring gyroscope
IT201900009651A1 (it) * 2019-06-20 2020-12-20 St Microelectronics Srl Sensore inerziale mems con elevata resistenza al fenomeno di adesione
DE102020203425A1 (de) 2020-03-17 2021-09-23 Robert Bosch Gesellschaft mit beschränkter Haftung Mikromechanisches Bauteil für eine Sensorvorrichtung
US11499987B2 (en) * 2020-06-17 2022-11-15 Nxp Usa, Inc. Z-axis inertial sensor with extended motion stops
JP2022081956A (ja) * 2020-11-20 2022-06-01 セイコーエプソン株式会社 物理量センサー、物理量センサーデバイス及び慣性計測装置
JP2022175616A (ja) * 2021-05-14 2022-11-25 セイコーエプソン株式会社 慣性センサー及び慣性計測装置

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2700065B1 (fr) * 1992-12-28 1995-02-10 Commissariat Energie Atomique Procédé de fabrication d'accéléromètres utilisant la technologie silicium sur isolant.
JPH11237402A (ja) * 1998-02-19 1999-08-31 Akebono Brake Ind Co Ltd 半導体加速度センサ及びその自己診断法
DE19817357B4 (de) 1998-04-18 2008-10-30 Robert Bosch Gmbh Mikromechanisches Bauelement
DE19930779B4 (de) * 1999-07-03 2010-05-06 Robert Bosch Gmbh Mikromechanisches Bauelement
DE19949605A1 (de) * 1999-10-15 2001-04-19 Bosch Gmbh Robert Beschleunigungssensor
DE10038099A1 (de) 2000-08-04 2002-02-21 Bosch Gmbh Robert Mikromechanisches Bauelement
DE10116931A1 (de) * 2001-04-05 2002-10-17 Bosch Gmbh Robert Sensor
US7232701B2 (en) 2005-01-04 2007-06-19 Freescale Semiconductor, Inc. Microelectromechanical (MEM) device with a protective cap that functions as a motion stop
US7121141B2 (en) 2005-01-28 2006-10-17 Freescale Semiconductor, Inc. Z-axis accelerometer with at least two gap sizes and travel stops disposed outside an active capacitor area
US7318349B2 (en) * 2005-06-04 2008-01-15 Vladimir Vaganov Three-axis integrated MEMS accelerometer
DE102006026880B4 (de) * 2006-06-09 2023-02-16 Robert Bosch Gmbh Mikromechanischer Beschleunigungssensor
KR100899812B1 (ko) * 2006-12-05 2009-05-27 한국전자통신연구원 정전 용량형 가속도계
DE102006057929A1 (de) * 2006-12-08 2008-06-12 Robert Bosch Gmbh Mikromechanischer Inertialsensor mit verringerter Empfindlichkeit gegenüber dem Einfluss driftender Oberflächenladungen und zu seinem Betrieb geeignetes Verfahren
ITTO20070033A1 (it) 2007-01-19 2008-07-20 St Microelectronics Srl Dispositivo microelettromeccanico ad asse z con struttura di arresto perfezionata
US7578190B2 (en) * 2007-08-03 2009-08-25 Freescale Semiconductor, Inc. Symmetrical differential capacitive sensor and method of making same
US8079262B2 (en) * 2007-10-26 2011-12-20 Rosemount Aerospace Inc. Pendulous accelerometer with balanced gas damping
US8186221B2 (en) * 2009-03-24 2012-05-29 Freescale Semiconductor, Inc. Vertically integrated MEMS acceleration transducer

Also Published As

Publication number Publication date
ITMI20101578A1 (it) 2011-03-03
DE102009029095B4 (de) 2017-05-18
US8671757B2 (en) 2014-03-18
DE102009029095A1 (de) 2011-03-03
US20110048131A1 (en) 2011-03-03

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