IT1145411B - Procedimento di fabbricazione di giunzione p-n ad alta tensione di rottura - Google Patents

Procedimento di fabbricazione di giunzione p-n ad alta tensione di rottura

Info

Publication number
IT1145411B
IT1145411B IT49389/80A IT4938980A IT1145411B IT 1145411 B IT1145411 B IT 1145411B IT 49389/80 A IT49389/80 A IT 49389/80A IT 4938980 A IT4938980 A IT 4938980A IT 1145411 B IT1145411 B IT 1145411B
Authority
IT
Italy
Prior art keywords
manufacturing procedure
high breaking
breaking voltage
junction manufacturing
junction
Prior art date
Application number
IT49389/80A
Other languages
English (en)
Italian (it)
Other versions
IT8049389A0 (it
Inventor
Multani S Jagir
Dandhu Jagtar
Original Assignee
Gen Instrument Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Gen Instrument Corp filed Critical Gen Instrument Corp
Publication of IT8049389A0 publication Critical patent/IT8049389A0/it
Application granted granted Critical
Publication of IT1145411B publication Critical patent/IT1145411B/it

Links

Classifications

    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10PGENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P30/00Ion implantation into wafers, substrates or parts of devices
    • H10P30/20Ion implantation into wafers, substrates or parts of devices into semiconductor materials, e.g. for doping
    • H10P30/202Ion implantation into wafers, substrates or parts of devices into semiconductor materials, e.g. for doping characterised by the semiconductor materials
    • H10P30/204Ion implantation into wafers, substrates or parts of devices into semiconductor materials, e.g. for doping characterised by the semiconductor materials into Group IV semiconductors
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D62/00Semiconductor bodies, or regions thereof, of devices having potential barriers
    • H10D62/60Impurity distributions or concentrations
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10PGENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P30/00Ion implantation into wafers, substrates or parts of devices
    • H10P30/20Ion implantation into wafers, substrates or parts of devices into semiconductor materials, e.g. for doping
    • H10P30/21Ion implantation into wafers, substrates or parts of devices into semiconductor materials, e.g. for doping of electrically active species
    • H10P30/212Through-implantation
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10PGENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P32/00Diffusion of dopants within, into or out of wafers, substrates or parts of devices
IT49389/80A 1979-08-01 1980-07-31 Procedimento di fabbricazione di giunzione p-n ad alta tensione di rottura IT1145411B (it)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US6267679A 1979-08-01 1979-08-01

Publications (2)

Publication Number Publication Date
IT8049389A0 IT8049389A0 (it) 1980-07-31
IT1145411B true IT1145411B (it) 1986-11-05

Family

ID=22044093

Family Applications (1)

Application Number Title Priority Date Filing Date
IT49389/80A IT1145411B (it) 1979-08-01 1980-07-31 Procedimento di fabbricazione di giunzione p-n ad alta tensione di rottura

Country Status (5)

Country Link
JP (1) JPS5623742A (enExample)
DE (1) DE3028185A1 (enExample)
FR (1) FR2462780A1 (enExample)
GB (1) GB2056168A (enExample)
IT (1) IT1145411B (enExample)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4369072A (en) * 1981-01-22 1983-01-18 International Business Machines Corp. Method for forming IGFET devices having improved drain voltage characteristics
JPS60117681A (ja) * 1983-11-29 1985-06-25 Mitsubishi Electric Corp 半導体装置
JPH063798B2 (ja) * 1985-02-06 1994-01-12 日本電気株式会社 半導体装置の製造方法
JPH01147829A (ja) * 1987-12-04 1989-06-09 Toshiba Corp 半導体装置の製造方法
JP2706460B2 (ja) * 1988-03-14 1998-01-28 富士通株式会社 イオン注入方法
JP4629809B2 (ja) * 1996-03-27 2011-02-09 クリー,インコーポレイテッド SiCの半導体層を有する半導体素子を製造する方法

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
IT956828B (it) * 1971-08-05 1973-10-10 Rca Corp Processo per l ottenimento di regio ni diffuse a semiconduttore presen tanti un numero ridotto di difetti nel cristallo
IL40189A0 (en) * 1971-09-09 1972-10-29 Trusty J Method and apparatus for preparing and analyzing serum samples
DE2304647C2 (de) * 1973-01-31 1984-06-28 Siemens AG, 1000 Berlin und 8000 München Verfahren zur Herstellung einer dotierten Zone in einem Halbleiterkörper
JPS543479A (en) * 1977-06-09 1979-01-11 Toshiba Corp Semiconductor device and its manufacture

Also Published As

Publication number Publication date
FR2462780B1 (enExample) 1983-02-18
FR2462780A1 (fr) 1981-02-13
JPS5623742A (en) 1981-03-06
IT8049389A0 (it) 1980-07-31
DE3028185A1 (de) 1981-02-26
GB2056168A (en) 1981-03-11

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Effective date: 19970729