IL89648A - Mixed aldehyde novolak resins and high contrast high thermal stability positive photoresists prepared therefrom - Google Patents

Mixed aldehyde novolak resins and high contrast high thermal stability positive photoresists prepared therefrom

Info

Publication number
IL89648A
IL89648A IL89648A IL8964889A IL89648A IL 89648 A IL89648 A IL 89648A IL 89648 A IL89648 A IL 89648A IL 8964889 A IL8964889 A IL 8964889A IL 89648 A IL89648 A IL 89648A
Authority
IL
Israel
Prior art keywords
novolak resins
thermal stability
prepared therefrom
positive photoresists
high thermal
Prior art date
Application number
IL89648A
Other languages
English (en)
Other versions
IL89648A0 (en
Inventor
Michael Lazarus Richard
William Kautz Randall
Suresh Dixit Sunit
Original Assignee
Thiokol Morton Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US07/227,404 external-priority patent/US4920028A/en
Application filed by Thiokol Morton Inc filed Critical Thiokol Morton Inc
Publication of IL89648A0 publication Critical patent/IL89648A0/xx
Publication of IL89648A publication Critical patent/IL89648A/xx

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
    • C08G8/00—Condensation polymers of aldehydes or ketones with phenols only
    • C08G8/04—Condensation polymers of aldehydes or ketones with phenols only of aldehydes
    • C08G8/08—Condensation polymers of aldehydes or ketones with phenols only of aldehydes of formaldehyde, e.g. of formaldehyde formed in situ
    • C08G8/10—Condensation polymers of aldehydes or ketones with phenols only of aldehydes of formaldehyde, e.g. of formaldehyde formed in situ with phenol
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
    • C08G8/00—Condensation polymers of aldehydes or ketones with phenols only
    • C08G8/04—Condensation polymers of aldehydes or ketones with phenols only of aldehydes
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/022—Quinonediazides
    • G03F7/023—Macromolecular quinonediazides; Macromolecular additives, e.g. binders
    • G03F7/0233—Macromolecular quinonediazides; Macromolecular additives, e.g. binders characterised by the polymeric binders or the macromolecular additives other than the macromolecular quinonediazides
    • G03F7/0236—Condensation products of carbonyl compounds and phenolic compounds, e.g. novolak resins

Landscapes

  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Organic Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Medicinal Chemistry (AREA)
  • Polymers & Plastics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Phenolic Resins Or Amino Resins (AREA)
  • Non-Silver Salt Photosensitive Materials And Non-Silver Salt Photography (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Materials For Photolithography (AREA)
  • Manufacturing Of Printed Circuit Boards (AREA)
  • Gas-Filled Discharge Tubes (AREA)
  • Inks, Pencil-Leads, Or Crayons (AREA)
IL89648A 1988-03-31 1989-03-17 Mixed aldehyde novolak resins and high contrast high thermal stability positive photoresists prepared therefrom IL89648A (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US17547388A 1988-03-31 1988-03-31
US29782888A 1988-04-22 1988-04-22
US07/227,404 US4920028A (en) 1988-03-31 1988-08-02 High contrast high thermal stability positive photoresists with mixed cresol and hydroxybenzaldehyde prepared novolak and photosensitive diazoquinone

Publications (2)

Publication Number Publication Date
IL89648A0 IL89648A0 (en) 1989-09-28
IL89648A true IL89648A (en) 1993-01-31

Family

ID=27390543

Family Applications (1)

Application Number Title Priority Date Filing Date
IL89648A IL89648A (en) 1988-03-31 1989-03-17 Mixed aldehyde novolak resins and high contrast high thermal stability positive photoresists prepared therefrom

Country Status (10)

Country Link
EP (1) EP0336604B1 (de)
JP (1) JPH0776254B2 (de)
KR (1) KR930006913B1 (de)
AT (1) ATE118225T1 (de)
AU (1) AU3235289A (de)
DE (1) DE68921017T2 (de)
DK (1) DK155089A (de)
HK (1) HK158995A (de)
IL (1) IL89648A (de)
NO (1) NO891063L (de)

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5182184A (en) * 1990-02-05 1993-01-26 Morton International, Inc. Novolak resins of lowered hydroxyl content and high contrast high thermal stability positive photoresists prepared therefrom
JPH03253860A (ja) * 1990-03-05 1991-11-12 Fuji Photo Film Co Ltd ポジ型フオトレジスト組成物
JPH03294861A (ja) * 1990-04-13 1991-12-26 Mitsubishi Petrochem Co Ltd ポジ型フォトレジスト組成物
JPH05323605A (ja) * 1992-05-27 1993-12-07 Sumitomo Chem Co Ltd ポジ型レジスト組成物
JP3319092B2 (ja) * 1993-11-08 2002-08-26 住友化学工業株式会社 ポジ型レジスト組成物
EP0660186A1 (de) * 1993-12-20 1995-06-28 Mitsubishi Chemical Corporation Lichtempfindliche Harzzusammensetzung und Verfahren zur Bildherstellung damit
JP3424341B2 (ja) * 1994-04-11 2003-07-07 住友化学工業株式会社 感光性樹脂組成物
US5709977A (en) * 1995-07-13 1998-01-20 Fuji Photo Film Co., Ltd. Positive working photoresist composition
JP3635598B2 (ja) * 1995-07-13 2005-04-06 富士写真フイルム株式会社 ポジ型フォトレジスト組成物
JP2006010779A (ja) * 2004-06-22 2006-01-12 Nagase Chemtex Corp 有機膜組成物及びレジストパターン形成方法
KR101324645B1 (ko) * 2006-05-08 2013-11-01 주식회사 동진쎄미켐 포토레지스트 조성물
JP5876976B2 (ja) * 2009-01-09 2016-03-02 アイカＳｄｋフェノール株式会社 ノボラック樹脂および熱硬化性樹脂組成物
CN102577712A (zh) * 2012-03-16 2012-07-18 广西钦州力顺机械有限公司 可于甘蔗蔗种下方施肥的甘蔗种植机
JP6070020B2 (ja) * 2012-09-28 2017-02-01 明和化成株式会社 ノボラック型フェノール樹脂の製造方法、ノボラック型フェノール樹脂、及びフォトレジスト組成物
JPWO2014069091A1 (ja) * 2012-10-30 2016-09-08 住友ベークライト株式会社 感光性樹脂組成物、硬化膜、保護膜、絶縁膜および電子装置
JP6277714B2 (ja) 2012-12-26 2018-02-14 セントラル硝子株式会社 ヘキサフルオロイソプロパノール基を含むノボラック樹脂およびその製造方法、並びにその組成物
JP6555975B2 (ja) * 2015-08-07 2019-08-07 群栄化学工業株式会社 新規イミン基含有樹脂

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58134631A (ja) * 1982-01-08 1983-08-10 Konishiroku Photo Ind Co Ltd 感光性組成物
JPS62123444A (ja) * 1985-08-07 1987-06-04 Japan Synthetic Rubber Co Ltd ポジ型感放射線性樹脂組成物
JPH0654381B2 (ja) * 1985-12-24 1994-07-20 日本合成ゴム株式会社 集積回路作製用ポジ型レジスト
DE3686032T2 (de) * 1985-12-27 1993-02-18 Japan Synthetic Rubber Co Ltd Strahlungsempfindliche positiv arbeitende kunststoffzusammensetzung.
JPS62198852A (ja) * 1986-02-27 1987-09-02 Japan Synthetic Rubber Co Ltd ポジ型感放射線性樹脂組成物
JPH0654389B2 (ja) * 1986-06-23 1994-07-20 日本合成ゴム株式会社 ポジ型感放射線性樹脂組成物

Also Published As

Publication number Publication date
DK155089A (da) 1989-10-01
JPH0284414A (ja) 1990-03-26
JPH0776254B2 (ja) 1995-08-16
DK155089D0 (da) 1989-03-30
EP0336604A2 (de) 1989-10-11
DE68921017T2 (de) 1995-06-01
AU3235289A (en) 1989-10-05
EP0336604B1 (de) 1995-02-08
IL89648A0 (en) 1989-09-28
DE68921017D1 (de) 1995-03-23
ATE118225T1 (de) 1995-02-15
NO891063L (no) 1989-10-02
KR930006913B1 (ko) 1993-07-24
KR890014613A (ko) 1989-10-24
NO891063D0 (no) 1989-03-13
HK158995A (en) 1995-10-20
EP0336604A3 (en) 1990-07-25

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