IL46733A - Inspection system employing differential imaging - Google Patents
Inspection system employing differential imagingInfo
- Publication number
- IL46733A IL46733A IL46733A IL4673375A IL46733A IL 46733 A IL46733 A IL 46733A IL 46733 A IL46733 A IL 46733A IL 4673375 A IL4673375 A IL 4673375A IL 46733 A IL46733 A IL 46733A
- Authority
- IL
- Israel
- Prior art keywords
- image
- inspected
- model
- difference
- electrical
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
- G01B11/2433—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures for measuring outlines by shadow casting
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
- G01B11/022—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness by means of tv-camera scanning
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Closed-Circuit Television Systems (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Testing, Inspecting, Measuring Of Stereoscopic Televisions And Televisions (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US449561A US3916439A (en) | 1974-03-08 | 1974-03-08 | Inspection system employing differential imaging |
Publications (2)
Publication Number | Publication Date |
---|---|
IL46733A0 IL46733A0 (en) | 1975-04-25 |
IL46733A true IL46733A (en) | 1977-07-31 |
Family
ID=23784616
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
IL46733A IL46733A (en) | 1974-03-08 | 1975-02-28 | Inspection system employing differential imaging |
Country Status (7)
Country | Link |
---|---|
US (1) | US3916439A (ja) |
JP (1) | JPS50123386A (ja) |
CA (1) | CA1017848A (ja) |
DE (1) | DE2508992A1 (ja) |
FR (1) | FR2263492A1 (ja) |
GB (1) | GB1479406A (ja) |
IL (1) | IL46733A (ja) |
Families Citing this family (23)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3987241A (en) * | 1974-10-17 | 1976-10-19 | Westinghouse Electric Corporation | Sampled differential analyzer |
US4242702A (en) * | 1976-12-01 | 1980-12-30 | Hitachi, Ltd. | Apparatus for automatically checking external appearance of object |
JPS5371563A (en) * | 1976-12-08 | 1978-06-26 | Hitachi Ltd | Automatic inspection correcting method for mask |
DE2700252C2 (de) * | 1977-01-05 | 1985-03-14 | Licentia Patent-Verwaltungs-Gmbh, 6000 Frankfurt | Verfahren zum Prüfen definierter Strukturen |
JPS54139784A (en) * | 1978-04-21 | 1979-10-30 | Ngk Insulators Ltd | Method and device for testing ceramic piece having innumerable through pores |
US4295198A (en) * | 1979-04-02 | 1981-10-13 | Cogit Systems, Inc. | Automatic printed circuit dimensioning, routing and inspecting apparatus |
US4246606A (en) * | 1979-04-17 | 1981-01-20 | Hajime Industries Ltd. | Inspection apparatus |
FR2454604B1 (fr) * | 1979-04-19 | 1986-04-04 | Hajime Industries | Appareil de controle ou d'examen d'objets |
JPS5744824A (en) * | 1980-09-01 | 1982-03-13 | Hitachi Ltd | Spectrum display device |
US4502075A (en) * | 1981-12-04 | 1985-02-26 | International Remote Imaging Systems | Method and apparatus for producing optical displays |
EP0085380B1 (en) * | 1982-01-25 | 1988-07-27 | Hitachi, Ltd. | Method for testing a joint |
DE3416883A1 (de) * | 1984-05-08 | 1985-11-14 | Robert Prof. Dr.-Ing. 7760 Radolfzell Massen | Verfahren und anordnung zur kontinuierlichen beruehrungslosen messung der 2-dimensionalen schrumpfung von strickwaren |
DE3427981A1 (de) * | 1984-07-28 | 1986-02-06 | Telefunken electronic GmbH, 7100 Heilbronn | Verfahren zur fehlererkennung an definierten strukturen |
FR2589242B1 (fr) * | 1985-10-25 | 1988-11-25 | Oreal | Procede pour examiner la surface d'un echantillon et appareil pour sa mise en oeuvre |
JPS62156547A (ja) * | 1985-12-27 | 1987-07-11 | Sumitomo Special Metals Co Ltd | 表面欠陥検出方法 |
JPS62209305A (ja) * | 1986-03-10 | 1987-09-14 | Fujitsu Ltd | 寸法良否判定方法 |
DE3612256C2 (de) * | 1986-04-11 | 1998-05-14 | Twi Tech Wissenschaftliche Ind | Verfahren und Einrichtung zur optoelektronischen Qualitätskontrolle |
DE3704381A1 (de) * | 1987-02-12 | 1988-08-25 | Alexander Gausa | Stegplattenpruefung |
US5060065A (en) * | 1990-02-23 | 1991-10-22 | Cimflex Teknowledge Corporation | Apparatus and method for illuminating a printed circuit board for inspection |
DE4410603C1 (de) * | 1994-03-26 | 1995-06-14 | Jenoptik Technologie Gmbh | Verfahren zur Erkennung von Fehlern bei der Inspektion von strukturierten Oberflächen |
US5970167A (en) * | 1995-11-08 | 1999-10-19 | Alpha Innotech Corporation | Integrated circuit failure analysis using color voltage contrast |
US6330354B1 (en) | 1997-05-01 | 2001-12-11 | International Business Machines Corporation | Method of analyzing visual inspection image data to find defects on a device |
JPWO2002067039A1 (ja) * | 2001-02-19 | 2004-06-24 | オリンパス株式会社 | 画像比較装置、画像比較方法及び画像比較をコンピュータに実行させるプログラム |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3049588A (en) * | 1959-08-28 | 1962-08-14 | Prec Controls Corp | Quality control system |
US3811010A (en) * | 1972-08-16 | 1974-05-14 | Us Navy | Intrusion detection apparatus |
-
1974
- 1974-03-08 US US449561A patent/US3916439A/en not_active Expired - Lifetime
-
1975
- 1975-02-28 CA CA220,971A patent/CA1017848A/en not_active Expired
- 1975-02-28 GB GB8416/75A patent/GB1479406A/en not_active Expired
- 1975-02-28 IL IL46733A patent/IL46733A/en unknown
- 1975-03-01 DE DE19752508992 patent/DE2508992A1/de active Pending
- 1975-03-07 JP JP50027260A patent/JPS50123386A/ja active Pending
- 1975-03-10 FR FR7507412A patent/FR2263492A1/fr not_active Withdrawn
Also Published As
Publication number | Publication date |
---|---|
US3916439A (en) | 1975-10-28 |
DE2508992A1 (de) | 1976-04-01 |
IL46733A0 (en) | 1975-04-25 |
JPS50123386A (ja) | 1975-09-27 |
FR2263492A1 (ja) | 1975-10-03 |
GB1479406A (en) | 1977-07-13 |
CA1017848A (en) | 1977-09-20 |
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