IL145340A0 - Single wafer type cleaning method and apparatus - Google Patents

Single wafer type cleaning method and apparatus

Info

Publication number
IL145340A0
IL145340A0 IL14534001A IL14534001A IL145340A0 IL 145340 A0 IL145340 A0 IL 145340A0 IL 14534001 A IL14534001 A IL 14534001A IL 14534001 A IL14534001 A IL 14534001A IL 145340 A0 IL145340 A0 IL 145340A0
Authority
IL
Israel
Prior art keywords
cleaning method
single wafer
type cleaning
wafer type
wafer
Prior art date
Application number
IL14534001A
Other languages
English (en)
Original Assignee
S E S Company Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by S E S Company Ltd filed Critical S E S Company Ltd
Publication of IL145340A0 publication Critical patent/IL145340A0/xx

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67017—Apparatus for fluid treatment
    • H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
    • H01L21/6704—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing
    • H01L21/67051—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing using mainly spraying means, e.g. nozzles
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
    • H01L21/304—Mechanical treatment, e.g. grinding, polishing, cutting
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S134/00—Cleaning and liquid contact with solids
    • Y10S134/902—Semiconductor wafer

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
  • Weting (AREA)
IL14534001A 2001-05-30 2001-09-09 Single wafer type cleaning method and apparatus IL145340A0 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2001161920A JP2002353181A (ja) 2001-05-30 2001-05-30 枚葉式基板洗浄方法および枚葉式基板洗浄装置

Publications (1)

Publication Number Publication Date
IL145340A0 true IL145340A0 (en) 2002-06-30

Family

ID=19005128

Family Applications (1)

Application Number Title Priority Date Filing Date
IL14534001A IL145340A0 (en) 2001-05-30 2001-09-09 Single wafer type cleaning method and apparatus

Country Status (8)

Country Link
US (2) US6752877B2 (xx)
EP (1) EP1263024A2 (xx)
JP (1) JP2002353181A (xx)
KR (1) KR100800204B1 (xx)
CN (1) CN1212646C (xx)
IL (1) IL145340A0 (xx)
SG (1) SG117396A1 (xx)
TW (1) TW515002B (xx)

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JP2003007664A (ja) * 2001-06-22 2003-01-10 Ses Co Ltd 枚葉式基板洗浄方法および枚葉式基板洗浄装置
JP3979464B2 (ja) * 2001-12-27 2007-09-19 株式会社荏原製作所 無電解めっき前処理装置及び方法
US6823876B1 (en) * 2003-09-02 2004-11-30 Macronix International Co., Ltd. Methodology of rotational etching tool maintenance
CN100347829C (zh) * 2003-09-28 2007-11-07 沈阳仪表科学研究院 高精度硅传感器芯片腐蚀装置
EP1727191A1 (en) * 2004-03-12 2006-11-29 Sipec Corporation Substrate processing equipment
EP1708249A2 (en) * 2005-03-31 2006-10-04 Kaijo Corporation Cleaning device and cleaning method
KR100727703B1 (ko) * 2005-12-06 2007-06-13 동부일렉트로닉스 주식회사 반도체 소자 제조용 케미컬 공급장치
TWI352628B (en) * 2006-07-21 2011-11-21 Akrion Technologies Inc Nozzle for use in the megasonic cleaning of substr
KR100797081B1 (ko) 2006-08-24 2008-01-22 세메스 주식회사 기판 처리 장치 및 방법
JP4762098B2 (ja) 2006-09-28 2011-08-31 大日本スクリーン製造株式会社 基板処理装置および基板処理方法
US8177993B2 (en) 2006-11-05 2012-05-15 Globalfoundries Singapore Pte Ltd Apparatus and methods for cleaning and drying of wafers
KR100949090B1 (ko) * 2007-09-19 2010-03-22 세메스 주식회사 스핀 유닛 및 이를 갖는 기판 가공 장치
KR101394090B1 (ko) * 2007-10-22 2014-05-13 주식회사 케이씨텍 습식세정장치의 냉각구조
US8268087B2 (en) * 2007-12-27 2012-09-18 Tokyo Electron Limited Liquid processing apparatus, liquid processing method, and storage medium
CN101673062B (zh) * 2008-09-09 2011-10-26 中芯国际集成电路制造(北京)有限公司 一种全湿法去胶的装置
KR101004434B1 (ko) * 2008-11-26 2010-12-28 세메스 주식회사 기판 지지 유닛과, 이를 이용한 기판 연마 장치 및 방법
DE202010015018U1 (de) * 2010-11-07 2011-04-14 Bohnet, Hans Anordnung zur Herstellung von strukturierten Substraten
KR101280099B1 (ko) * 2011-12-14 2013-06-28 주식회사 케이씨텍 매엽식 기판 세정 장치
JP5864355B2 (ja) * 2012-05-11 2016-02-17 東京エレクトロン株式会社 基板処理装置および基板処理方法
JP5901419B2 (ja) * 2012-05-11 2016-04-13 東京エレクトロン株式会社 基板処理装置、基板処理方法および記憶媒体
CN103506339B (zh) * 2012-06-28 2017-04-19 盛美半导体设备（上海）有限公司 晶圆背面清洗装置及清洗方法
CN104347466A (zh) * 2013-07-31 2015-02-11 盛美半导体设备（上海）有限公司 晶圆承载装置
US10037902B2 (en) 2015-03-27 2018-07-31 SCREEN Holdings Co., Ltd. Substrate processing device and substrate processing method
CN106964590B (zh) * 2017-05-29 2018-05-29 惠安县新宏泰物流有限公司 一种清洗装置
JP6514300B2 (ja) * 2017-10-18 2019-05-15 株式会社Ｓｃｒｅｅｎホールディングス 基板処理方法および基板処理装置
FR3085603B1 (fr) * 2018-09-11 2020-08-14 Soitec Silicon On Insulator Procede pour le traitement d'un susbtrat soi dans un equipement de nettoyage monoplaque
US11398391B2 (en) * 2020-05-19 2022-07-26 Taiwan Semiconductor Manufacturing Company Ltd. Substrate processing apparatus and method for processing substrate
KR102535766B1 (ko) * 2021-08-24 2023-05-26 (주)디바이스이엔지 백 노즐 어셈블리를 포함하는 기판 처리장치
CN114632751B (zh) * 2022-03-17 2023-12-22 北京北方华创微电子装备有限公司 清洗系统
CN115410964B (zh) * 2022-11-02 2023-01-06 华海清科股份有限公司 一种晶圆水平清洗装置
WO2024130624A1 (zh) * 2022-12-22 2024-06-27 深圳华大生命科学研究院 一种清洗设备、清洗系统及清洗方法

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JPS5212576A (en) * 1975-07-21 1977-01-31 Hitachi Ltd Wafer washing drying device
US4132567A (en) * 1977-10-13 1979-01-02 Fsi Corporation Apparatus for and method of cleaning and removing static charges from substrates
US4286541A (en) * 1979-07-26 1981-09-01 Fsi Corporation Applying photoresist onto silicon wafers
JPH02272732A (ja) * 1989-04-14 1990-11-07 Nec Corp 半導体ウェーハ処理装置
US6239038B1 (en) * 1995-10-13 2001-05-29 Ziying Wen Method for chemical processing semiconductor wafers
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US6050275A (en) * 1996-09-27 2000-04-18 Tokyo Electron Limited Apparatus for and method of cleaning objects to be processed
DE69737240T2 (de) * 1996-11-15 2007-06-21 Shibaura Mechatronics Corp., Yokohama Rotiergerät und rotierverfahren
JPH10247631A (ja) * 1997-03-05 1998-09-14 Dainippon Screen Mfg Co Ltd 基板処理装置
TW402737B (en) * 1997-05-27 2000-08-21 Tokyo Electron Ltd Cleaning/drying device and method
DE69835988T2 (de) * 1997-08-18 2007-06-21 Tokyo Electron Ltd. Doppelseitenreinigungsmaschine für ein Substrat
JP3555724B2 (ja) * 1997-09-04 2004-08-18 大日本スクリーン製造株式会社 基板処理装置
JPH11260707A (ja) * 1998-03-09 1999-09-24 Tokyo Electron Ltd 現像処理方法及び現像処理装置
JP3563605B2 (ja) * 1998-03-16 2004-09-08 東京エレクトロン株式会社 処理装置
TW444921U (en) * 1998-03-18 2001-07-01 United Microelectronics Corp Injection cleaning device of developer machine
JP3741546B2 (ja) * 1998-08-27 2006-02-01 大日本スクリーン製造株式会社 基板処理装置
US6460552B1 (en) * 1998-10-05 2002-10-08 Lorimer D'arcy H. Method and apparatus for cleaning flat workpieces
US6516815B1 (en) * 1999-07-09 2003-02-11 Applied Materials, Inc. Edge bead removal/spin rinse dry (EBR/SRD) module
JP3519669B2 (ja) * 2000-04-25 2004-04-19 東京エレクトロン株式会社 現像処理方法及び現像処理装置
JP2003007664A (ja) * 2001-06-22 2003-01-10 Ses Co Ltd 枚葉式基板洗浄方法および枚葉式基板洗浄装置

Also Published As

Publication number Publication date
JP2002353181A (ja) 2002-12-06
US20030201003A1 (en) 2003-10-30
CN1212646C (zh) 2005-07-27
KR100800204B1 (ko) 2008-02-01
TW515002B (en) 2002-12-21
KR20020091746A (ko) 2002-12-06
EP1263024A2 (en) 2002-12-04
US6752877B2 (en) 2004-06-22
US6792959B2 (en) 2004-09-21
US20020179120A1 (en) 2002-12-05
CN1388568A (zh) 2003-01-01
SG117396A1 (en) 2005-12-29

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