HK1057621A1 - Method, apparatus and system for flow control of process gas in semiconductor manufacturing - Google Patents

Method, apparatus and system for flow control of process gas in semiconductor manufacturing

Info

Publication number
HK1057621A1
HK1057621A1 HK04100490A HK04100490A HK1057621A1 HK 1057621 A1 HK1057621 A1 HK 1057621A1 HK 04100490 A HK04100490 A HK 04100490A HK 04100490 A HK04100490 A HK 04100490A HK 1057621 A1 HK1057621 A1 HK 1057621A1
Authority
HK
Hong Kong
Prior art keywords
flow control
process gas
semiconductor manufacturing
semiconductor
manufacturing
Prior art date
Application number
HK04100490A
Other languages
English (en)
Inventor
Louis Ollivier
Original Assignee
Parker Hannifin Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Parker Hannifin Corp filed Critical Parker Hannifin Corp
Publication of HK1057621A1 publication Critical patent/HK1057621A1/xx

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D7/00—Control of flow
    • G05D7/06—Control of flow characterised by the use of electric means
    • G05D7/0617—Control of flow characterised by the use of electric means specially adapted for fluid materials
    • G05D7/0629—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means
    • G05D7/0635—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means
    • G05D7/0641—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means using a plurality of throttling means
    • G05D7/0647—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means using a plurality of throttling means the plurality of throttling means being arranged in series
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D16/00—Control of fluid pressure
    • G05D16/04—Control of fluid pressure without auxiliary power
    • G05D16/06—Control of fluid pressure without auxiliary power the sensing element being a flexible membrane, yielding to pressure, e.g. diaphragm, bellows, capsule
    • G05D16/063—Control of fluid pressure without auxiliary power the sensing element being a flexible membrane, yielding to pressure, e.g. diaphragm, bellows, capsule the sensing element being a membrane
    • G05D16/0644—Control of fluid pressure without auxiliary power the sensing element being a flexible membrane, yielding to pressure, e.g. diaphragm, bellows, capsule the sensing element being a membrane the membrane acting directly on the obturator
    • G05D16/0655—Control of fluid pressure without auxiliary power the sensing element being a flexible membrane, yielding to pressure, e.g. diaphragm, bellows, capsule the sensing element being a membrane the membrane acting directly on the obturator using one spring-loaded membrane
    • G05D16/0661—Control of fluid pressure without auxiliary power the sensing element being a flexible membrane, yielding to pressure, e.g. diaphragm, bellows, capsule the sensing element being a membrane the membrane acting directly on the obturator using one spring-loaded membrane characterised by the loading mechanisms of the membrane
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/0318—Processes
    • Y10T137/0324—With control of flow by a condition or characteristic of a fluid
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/7722—Line condition change responsive valves
    • Y10T137/7758—Pilot or servo controlled
    • Y10T137/7759—Responsive to change in rate of fluid flow
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/7722—Line condition change responsive valves
    • Y10T137/7758—Pilot or servo controlled
    • Y10T137/7759—Responsive to change in rate of fluid flow
    • Y10T137/776—Control by pressures across flow line valve
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/7722—Line condition change responsive valves
    • Y10T137/7758—Pilot or servo controlled
    • Y10T137/7761—Electrically actuated valve
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/8593—Systems
    • Y10T137/86389—Programmer or timer
    • Y10T137/86397—With independent valve controller

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Automation & Control Theory (AREA)
  • Fluid Mechanics (AREA)
  • Manufacturing & Machinery (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Flow Control (AREA)
  • Chemical Vapour Deposition (AREA)
  • Measuring Volume Flow (AREA)
HK04100490A 2000-03-27 2004-01-21 Method, apparatus and system for flow control of process gas in semiconductor manufacturing HK1057621A1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US09/535,750 US6363958B1 (en) 1999-05-10 2000-03-27 Flow control of process gas in semiconductor manufacturing
PCT/US2001/005556 WO2001073820A2 (en) 2000-03-27 2001-02-22 Flow control of process gas in semiconductor manufacturing

Publications (1)

Publication Number Publication Date
HK1057621A1 true HK1057621A1 (en) 2004-04-08

Family

ID=24135599

Family Applications (1)

Application Number Title Priority Date Filing Date
HK04100490A HK1057621A1 (en) 2000-03-27 2004-01-21 Method, apparatus and system for flow control of process gas in semiconductor manufacturing

Country Status (9)

Country Link
US (2) US6363958B1 (zh)
EP (2) EP1424614B1 (zh)
JP (1) JP4564223B2 (zh)
KR (1) KR100697893B1 (zh)
CN (1) CN1237423C (zh)
AU (1) AU2001241629A1 (zh)
DE (1) DE60128566T2 (zh)
HK (1) HK1057621A1 (zh)
WO (1) WO2001073820A2 (zh)

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AU2001241629A1 (en) 2001-10-08
EP1424614B1 (en) 2014-01-01
CN1237423C (zh) 2006-01-18
DE60128566D1 (de) 2007-07-05
US20020092564A1 (en) 2002-07-18
EP1297396B1 (en) 2007-05-23
KR100697893B1 (ko) 2007-03-20
WO2001073820A2 (en) 2001-10-04
WO2001073820A3 (en) 2002-02-14
EP1424614A3 (en) 2005-03-23
EP1297396A4 (en) 2003-07-16
US6450200B1 (en) 2002-09-17
EP1297396A2 (en) 2003-04-02
US6363958B1 (en) 2002-04-02
KR20020093857A (ko) 2002-12-16
JP2003529218A (ja) 2003-09-30
CN1432147A (zh) 2003-07-23
DE60128566T2 (de) 2008-01-31
JP4564223B2 (ja) 2010-10-20

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