GB927845A - Improvements in or relating to electron microscopes - Google Patents
Improvements in or relating to electron microscopesInfo
- Publication number
- GB927845A GB927845A GB30921/59A GB3092159A GB927845A GB 927845 A GB927845 A GB 927845A GB 30921/59 A GB30921/59 A GB 30921/59A GB 3092159 A GB3092159 A GB 3092159A GB 927845 A GB927845 A GB 927845A
- Authority
- GB
- United Kingdom
- Prior art keywords
- cooling
- medium
- sept
- walls
- discharged
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000001816 cooling Methods 0.000 abstract 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 abstract 2
- 239000002826 coolant Substances 0.000 abstract 2
- 239000002184 metal Substances 0.000 abstract 2
- 239000012809 cooling fluid Substances 0.000 abstract 1
- 239000012530 fluid Substances 0.000 abstract 1
- 239000007789 gas Substances 0.000 abstract 1
- 239000007788 liquid Substances 0.000 abstract 1
- 229910052757 nitrogen Inorganic materials 0.000 abstract 1
- 238000005192 partition Methods 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/20—Means for supporting or positioning the object or the material; Means for adjusting diaphragms or lenses associated with the support
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Sampling And Sample Adjustment (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
NL231361 | 1958-09-13 |
Publications (1)
Publication Number | Publication Date |
---|---|
GB927845A true GB927845A (en) | 1963-06-06 |
Family
ID=19751346
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
GB30921/59A Expired GB927845A (en) | 1958-09-13 | 1959-09-10 | Improvements in or relating to electron microscopes |
Country Status (6)
Country | Link |
---|---|
US (1) | US3124680A (enrdf_load_stackoverflow) |
CH (1) | CH379656A (enrdf_load_stackoverflow) |
DE (1) | DE1152766B (enrdf_load_stackoverflow) |
FR (1) | FR1235119A (enrdf_load_stackoverflow) |
GB (1) | GB927845A (enrdf_load_stackoverflow) |
NL (2) | NL231361A (enrdf_load_stackoverflow) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB2211655A (en) * | 1987-10-23 | 1989-07-05 | Joel Limited | Scanning tunnelling microscope installed in electron microscope |
CN105474348B (zh) * | 2013-09-20 | 2018-02-23 | 株式会社日立高新技术 | 防污染阱以及真空应用装置 |
Families Citing this family (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE1215832B (de) * | 1963-04-19 | 1966-05-05 | Max Planck Gesellschaft | An der Pumpe arbeitender Korpuskularstrahlapparat, insbesondere Elektronenmikroskop, mit einer den Objekttraeger aufnehmenden, aus zwei gegeneinander waermeisolierten Patronenteilen bestehenden Objektpatrone |
DE1202915B (de) * | 1963-09-09 | 1965-10-14 | Siemens Ag | An der Pumpe arbeitender Korpuskularstrahl-apparat, insbesondere Elektronenmikroskop, mit einer den Objekttraeger aufnehmenden und mit einer Tiefkuehlvorrichtung in Verbindung stehenden Objektpatrone |
US3973125A (en) * | 1965-09-16 | 1976-08-03 | Siemens Aktiengesellschaft | Corpuscular-ray apparatus with a cryogenically cooled specimen space |
US3489896A (en) * | 1966-11-01 | 1970-01-13 | Ashland Oil Inc | Alignment tool or device for cooling blade |
DE1614163B1 (de) * | 1967-05-31 | 1970-10-15 | Max Planck Gesellschaft | Korpuskularstrahlgeraet,insbesondere Elektronenmikroskop,mit einem Praeparathalter |
DE1614165B1 (de) * | 1967-06-02 | 1970-09-24 | Max Planck Gesellschaft | Korpuskularstrahlgeraet,insbesondere Elektronenmikroskop,mit einer Objektraumkuehlung |
FR2087652A5 (enrdf_load_stackoverflow) * | 1970-05-27 | 1971-12-31 | Onera (Off Nat Aerospatiale) | |
NL7906633A (nl) * | 1979-09-05 | 1981-03-09 | Philips Nv | Anti-contaminatie diafragma voor elektronen- straalapparaat. |
US4833330A (en) * | 1987-11-03 | 1989-05-23 | Gatan Inc. | Anticontaminator for transmission electron microscopes |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE659092C (de) * | 1934-12-12 | 1938-04-25 | Ernst Ruska Dr Ing | Einschleusvorrichtung fuer an der Pumpe betriebene Korpuskularstrahlapparate |
CH236120A (de) * | 1942-04-29 | 1945-01-15 | Fides Gmbh | Verfahren zur Untersuchung eines Objektes in einem Korpuskularstrahlapparat. |
BE455526A (enrdf_load_stackoverflow) * | 1943-03-04 | |||
NL198831A (enrdf_load_stackoverflow) * | 1954-07-14 | |||
US2826701A (en) * | 1954-09-01 | 1958-03-11 | Gen Electric | Low temperature chamber for electronoptics instruments |
-
0
- NL NL108507D patent/NL108507C/xx active
- NL NL231361D patent/NL231361A/xx unknown
- US US3124680D patent/US3124680A/en not_active Expired - Lifetime
-
1959
- 1959-09-09 DE DEN17209A patent/DE1152766B/de active Pending
- 1959-09-10 CH CH7805959A patent/CH379656A/de unknown
- 1959-09-10 GB GB30921/59A patent/GB927845A/en not_active Expired
- 1959-09-11 FR FR804963A patent/FR1235119A/fr not_active Expired
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB2211655A (en) * | 1987-10-23 | 1989-07-05 | Joel Limited | Scanning tunnelling microscope installed in electron microscope |
GB2211655B (en) * | 1987-10-23 | 1992-06-17 | Joel Limited | Electron microscope equipped with scanning tunnelling microscope |
CN105474348B (zh) * | 2013-09-20 | 2018-02-23 | 株式会社日立高新技术 | 防污染阱以及真空应用装置 |
Also Published As
Publication number | Publication date |
---|---|
NL108507C (enrdf_load_stackoverflow) | |
CH379656A (de) | 1964-07-15 |
NL231361A (enrdf_load_stackoverflow) | |
US3124680A (en) | 1964-03-10 |
DE1152766B (de) | 1963-08-14 |
FR1235119A (fr) | 1960-07-01 |
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