US3124680A - Agent - Google Patents

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Publication number
US3124680A
US3124680A US3124680DA US3124680A US 3124680 A US3124680 A US 3124680A US 3124680D A US3124680D A US 3124680DA US 3124680 A US3124680 A US 3124680A
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Prior art keywords
housing
microscope
space
spaced members
wall
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Expired - Lifetime
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/20—Means for supporting or positioning the object or the material; Means for adjusting diaphragms or lenses associated with the support

Definitions

  • This invention relates to electron microscopes comprising devices for examining objects, in which a space containing the object is cooled artificially.
  • the object is at the same low temperature as the space.
  • This device permits of examining objects the properties of which vary due to variations in temperature.
  • object cooling for preventing contamination of the surface of the object.
  • particles deposit onto the object, which particles cause the microscopic image to be blurred.
  • the formation of particles is attributed to organic vapors which are a constituent of the residual gases still present in the space of the microscope after this space has been evacuated to the desired low pressure. It is necessary to make allowance for the fact that a decrease in the temperature of the object may result in condensation of all of the substances present in the residual gas and which have a comparatively low vapor pressure.
  • the occurrence of a thin layer of condensate on the surface of the object is likewise harmful to the quality of the image produced of the object by electrons.
  • the space containing the object serves as a cooling chamber.
  • this chamber which is bounded by at least two walls to be maintained at a low temperature
  • the object is arranged and secured to a carrier which extends inwards from the periphery of the housing of the microscope other than that which carries on the object chamber.
  • the arrangement is such that the carrier and the object are not in contact with the walls of this space.
  • the cooling chamber is particularly operative if the walls largely surround the object.
  • a cooling liquid which is supplied and discharged through a channel from outside the housing of the microscope.
  • vibrations for example the periodic motions of a pump aggregate pushing the liquid through the channel, are propagated by the liquid and transferred to the cooling chamber.
  • a device according to the invention may comprise a tubular carrier, one extremity of which is closed by a metallic block to which the walls of the cooling chamber are secured, and the other extremity of which has an inlet aperture for a cooling medium which is led through a channel in the carrier along the metallic block and discharged through an aperture provided in the wall, said carrier being provided with means of supplying heat 3,124,580 Patented Mar. 10, 1964 to a portion which constitutes the connection with the housing of the microscope.
  • an electric heater element for the supply of heat to the said portion it is possible to employ an electric heater element.
  • FIG. 1 shows a cross-section of the arrangement of the object and the object space in the housing of the micro scope
  • FIG. 2 shows longitudinal section thereof.
  • the housing of the microscope comprises a cylindrical wall 1 which contains poles 2 and 3 of a magnetic elec tron lens having an energizing Winding 4 which surrounds the pole 2.
  • the winding 4 has a coil container 5.
  • the poles 2 and 3 are provided with detachable pole-pieces 6 and 7, which are connected to the poles by means of flange nuts 8 and 9.
  • the poles 2 and 3 are provided with bores 119 and 11 which merge into small apertures 12 and 13 in the pole-pieces 6 and 7 to allow passage of the electron beam.
  • a disc-like plate 14 is arranged in the space between the poles 2 and 3.
  • rubber sealing rings 15 and 16 which separate the space containing the pole-pieces from the other part of the housing of the microscope and which constitute an air-tight closure so that the volume which is evacuated is small with respect to the Volume of the housing.
  • the disc-like plate 14 serves to support an object carrier 17 which comprises a thin rod, one extremity of which is provided with a knob 18 and the other extremity of which is a thin pin 19.
  • a sealing ring 26 provides for air-tight sealing of the carrier 17 in aperture 21 of the plate 14.
  • the object is arranged at the end of pin 19 and lies in the optical axis of the electron lens in the space between two walls 22 and 2-3 which have apertures 24 and 25 to allow passage of electrons which, after the space of the microscope has been evacuated, traverse the apertures in the pole-pieces from above to below when the microscope is put into operation (FIG. 2).
  • the evacuation of the space in the microscope decreases the density of the remaining gas residues to an extent sufiicient to prevent residual gas particles from detrimentally affecting the path of the electron beam. These gas residues would not otherwise be harmful if they did not contain substances from which molecules are dissociated when bombarded by electrons.
  • a portion of the dissociated products deposits on walls bounding the vacuous space, especially at areas struck by electrons, such as along the edges of apertures bounding the beam. Since the object positioned in the electron beam is bombarded by all of the electrons and the gas molecules which have a velocity directed towards the object lose energy upon reaching the surface, the possibility of the gas molecules being dissociated is greater in the vicinity of the object than elsewhere in the microscope. Deposition of the dissociated particles onto the object is noticeable fairly soon from variations in the quality of the image on the viewing screen. It has been found that the use of the invention provides a considerable improvement since the rate of deposition on the object evidently decreases considerably.
  • the walls 22 and 23 between which the object is arranged are connected to a metallic block 26 which closes one extremity of a metallic tube 27.
  • a plug 28 of heat-insulating material Secured to the other extremity of tube 27 is a plug 28 of heat-insulating material which is provided with a spout 29 around which a rubber tube 30 may be clamped.
  • the plug 28 carries a thinner tube 31 which extends into the cavity of tube 27.
  • These tubes constitute in common a channel through which a cooling medium supplied through an aperture 32 in the plug 29 to the surface of the block 26.
  • the cooling medium is discharged through a bore 33 provided in the wall of tube 27 in which a spout 34 is also secured for providing a rubber tube 35.
  • the tube 27 is arranged in a holder 36 which is rigidly connected to the housing 1 of the microscope by means of a part 37 which is of a larger size so that it can accommodate the attachment means which are not shown.
  • the part 37 has a cylindrical tube 38.
  • the space for these parts is recessed in the disc 14-, which for this purpose has a wide aperture 39 which communicates through a narrow aperture 40 with the object space of the microscope.
  • a rubber intermediate piece 41 is clamped in position in this aperture by means of a resilient ring 42 and encircles the cylindrical tube 38 so as to close the aperture 40 hermetically.
  • a rubber ring 43 which likewise serves to prevent air from penetrating the space between the pole-pieces.
  • an electric heater element 44 having connections 45 and 46 for current supply wires 47 and 48.
  • the object of the heat produced by element 44 is to increase the temperature of the discharged cooling medium up to the ambient temperature, thus preventing the cooling device from extracting heat from the housing of the microscope.
  • a housing a pair of spaced members defining an object space and having coaxial apertures in the electron optical axis of the microscope, an object holder positioned between said members in the path of the electron beam, a tubular member extending through one portion of the wall of the housing, a metal member surrounding a portion of said tubular member for supporting said spaced members, and means to introduce a cooling medium into said tubular member for cooling said spaced members to a temperature below the temperature of the object holder, a supporting member for said object holder extending through another portion of the wall of said housing without being in contact therewith for maintaining a small temperature difference between the object holder and the cooled spaced members, and means within the housing to hermetically seal the supporting member.
  • a housing a pair of spaced members defining an object space and having coaxial apertures in the electron optical axis of the microscope, an object holder positioned between said members in the path of the electron beam, a tubular member extending through a portion of the housing, a metal member surrounding a portion of said tubular member for supporting said spaced members, means to introduce a cooling medium into said tubular member for cooling said spaced members to a temperature below the temperature of the object holder, means in the wall of the tubular member to heat the portion of the tubular member in contact with the wall of the housing, a supporting member for said object holder extending through the wall of said housing without being in contact there with for maintaining a small temperature difference between the object holder and the cooled spaced members, and means within the housing to hermetically seal the supporting member.
  • a housing a pair of spaced members defining an object space and having coaxial apertures in the electron optical axis of the microscope, an object holder positioned between said members in the path of the electron beam, a tubular member extending through a portion of the housing, a metal member surrounding a portion of said tubular member for supporting said spaced members, means to introduce a cooling medium into said tubular member for cooling said spaced members to a temperature below the temperature of the object holder, electrical heater means in the wall of the tubular member to heat the portion of the tubular member in contact with the wall of the housing, a supporting member for said object holder extending through the wall of said housing without being in contact therewith for maintaining a small temperature difference between the object holder and the cooled spaced members, and means within the housing to hermetically seal the supporting member.

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  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Sampling And Sample Adjustment (AREA)
US3124680D 1958-09-13 Agent Expired - Lifetime US3124680A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
NL231361 1958-09-13

Publications (1)

Publication Number Publication Date
US3124680A true US3124680A (en) 1964-03-10

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ID=19751346

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Application Number Title Priority Date Filing Date
US3124680D Expired - Lifetime US3124680A (en) 1958-09-13 Agent

Country Status (6)

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US (1) US3124680A (enrdf_load_stackoverflow)
CH (1) CH379656A (enrdf_load_stackoverflow)
DE (1) DE1152766B (enrdf_load_stackoverflow)
FR (1) FR1235119A (enrdf_load_stackoverflow)
GB (1) GB927845A (enrdf_load_stackoverflow)
NL (2) NL231361A (enrdf_load_stackoverflow)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3373277A (en) * 1963-04-19 1968-03-12 Max Planck Gesellschaft Object cartridge wherein the specimen carrier is surrounded by a cooling chamber
US3387132A (en) * 1963-09-09 1968-06-04 Siemens Ag Particle beam apparatus with a cryogenically cooled specimen cartridge that is below the specimen holder temperature
US3489896A (en) * 1966-11-01 1970-01-13 Ashland Oil Inc Alignment tool or device for cooling blade
US3798447A (en) * 1970-05-27 1974-03-19 Onera (Off Nat Aerospatiale) Apparatus for directing an energizing beam on a sample to cause secondary ion emission
US3973125A (en) * 1965-09-16 1976-08-03 Siemens Aktiengesellschaft Corpuscular-ray apparatus with a cryogenically cooled specimen space
US4352015A (en) * 1979-09-05 1982-09-28 U.S. Philips Corporation Anti-contamination diaphragm for an electron beam apparatus
US4833330A (en) * 1987-11-03 1989-05-23 Gatan Inc. Anticontaminator for transmission electron microscopes

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1614163B1 (de) * 1967-05-31 1970-10-15 Max Planck Gesellschaft Korpuskularstrahlgeraet,insbesondere Elektronenmikroskop,mit einem Praeparathalter
DE1614165B1 (de) * 1967-06-02 1970-09-24 Max Planck Gesellschaft Korpuskularstrahlgeraet,insbesondere Elektronenmikroskop,mit einer Objektraumkuehlung
JPH01110204A (ja) * 1987-10-23 1989-04-26 Jeol Ltd 電子顕微鏡用走査トンネル顕微鏡
US10269533B2 (en) * 2013-09-20 2019-04-23 Hitachi High-Technologies Corporation Anti-contamination trap, and vacuum application device

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CH236120A (de) * 1942-04-29 1945-01-15 Fides Gmbh Verfahren zur Untersuchung eines Objektes in einem Korpuskularstrahlapparat.
FR903128A (fr) * 1943-03-04 1945-09-25 Bosch Gmbh Robert Dispositif pour faire tourner et coulisser des objets dans des enceintes ou l'on a fait le vide
US2826701A (en) * 1954-09-01 1958-03-11 Gen Electric Low temperature chamber for electronoptics instruments
US2858444A (en) * 1954-07-14 1958-10-28 Siemens Ag Object-holding device for electron microscopes

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE659092C (de) * 1934-12-12 1938-04-25 Ernst Ruska Dr Ing Einschleusvorrichtung fuer an der Pumpe betriebene Korpuskularstrahlapparate

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CH236120A (de) * 1942-04-29 1945-01-15 Fides Gmbh Verfahren zur Untersuchung eines Objektes in einem Korpuskularstrahlapparat.
FR903128A (fr) * 1943-03-04 1945-09-25 Bosch Gmbh Robert Dispositif pour faire tourner et coulisser des objets dans des enceintes ou l'on a fait le vide
US2858444A (en) * 1954-07-14 1958-10-28 Siemens Ag Object-holding device for electron microscopes
US2826701A (en) * 1954-09-01 1958-03-11 Gen Electric Low temperature chamber for electronoptics instruments

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3373277A (en) * 1963-04-19 1968-03-12 Max Planck Gesellschaft Object cartridge wherein the specimen carrier is surrounded by a cooling chamber
US3387132A (en) * 1963-09-09 1968-06-04 Siemens Ag Particle beam apparatus with a cryogenically cooled specimen cartridge that is below the specimen holder temperature
US3973125A (en) * 1965-09-16 1976-08-03 Siemens Aktiengesellschaft Corpuscular-ray apparatus with a cryogenically cooled specimen space
US3489896A (en) * 1966-11-01 1970-01-13 Ashland Oil Inc Alignment tool or device for cooling blade
US3798447A (en) * 1970-05-27 1974-03-19 Onera (Off Nat Aerospatiale) Apparatus for directing an energizing beam on a sample to cause secondary ion emission
US4352015A (en) * 1979-09-05 1982-09-28 U.S. Philips Corporation Anti-contamination diaphragm for an electron beam apparatus
US4833330A (en) * 1987-11-03 1989-05-23 Gatan Inc. Anticontaminator for transmission electron microscopes

Also Published As

Publication number Publication date
NL108507C (enrdf_load_stackoverflow)
DE1152766B (de) 1963-08-14
CH379656A (de) 1964-07-15
FR1235119A (fr) 1960-07-01
GB927845A (en) 1963-06-06
NL231361A (enrdf_load_stackoverflow)

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