GB576003A - Improvements in and relating to electron microscopes - Google Patents

Improvements in and relating to electron microscopes

Info

Publication number
GB576003A
GB576003A GB19991/43A GB1999143A GB576003A GB 576003 A GB576003 A GB 576003A GB 19991/43 A GB19991/43 A GB 19991/43A GB 1999143 A GB1999143 A GB 1999143A GB 576003 A GB576003 A GB 576003A
Authority
GB
United Kingdom
Prior art keywords
cathode
cylinder
discs
conductor
envelope
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB19991/43A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
British Thomson Houston Co Ltd
Original Assignee
British Thomson Houston Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by British Thomson Houston Co Ltd filed Critical British Thomson Houston Co Ltd
Priority claimed from US537273A external-priority patent/US2420514A/en
Publication of GB576003A publication Critical patent/GB576003A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/06—Electron sources; Electron guns
    • H01J37/067—Replacing parts of guns; Mutual adjustment of electrodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J29/00—Details of cathode-ray tubes or of electron-beam tubes of the types covered by group H01J31/00
    • H01J29/46—Arrangements of electrodes and associated parts for generating or controlling the ray or beam, e.g. electron-optical arrangement
    • H01J29/58—Arrangements for focusing or reflecting ray or beam
    • H01J29/62—Electrostatic lenses
    • H01J29/622—Electrostatic lenses producing fields exhibiting symmetry of revolution
    • H01J29/624—Electrostatic lenses producing fields exhibiting symmetry of revolution co-operating with or closely associated to an electron gun
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/06—Electron sources; Electron guns
    • H01J37/065—Construction of guns or parts thereof
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/10—Lenses
    • H01J37/12—Lenses electrostatic
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/18—Vacuum locks ; Means for obtaining or maintaining the desired pressure within the vessel
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/20—Means for supporting or positioning the object or the material; Means for adjusting diaphragms or lenses associated with the support
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/24—Circuit arrangements not adapted to a particular application of the tube and not otherwise provided for

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)

Abstract

576,003. Electron microscopes. BRITISH THOMSON-HOUSTON CO., Ltd. Nov. 30, 1943, No. 19991. Convention date; Dec. 1, 1942. [Class 39 (i)] An electrostatic electron microscope has a plurality of three element lenses closely fitted within a metallic cylinder. In the form shown, three such lenses 30, 31, 32, Fig. 3, are mounted within the cylinder 29. Each lens comprises two outer apertured discs 33, 34 conductively connected to cylinder 29 and an inner disc 37 insulated from the cylinder by being mounted within insulating disc 39. Discs 33, 34, 39 are spaced apart by spacing cylinders 40 ... 44. The inner discs 37 are connected by conductor 184 to the cathode which is kept at a high negative potential to earth, the cylinder 29 and the other elements of the lens being earthed. The conductor 184 passes through holes in the outer discs 33, 34 and is screened from the beam by a metal plate ; to facilitate assembly, it is made in two sections with a spring contact between them. The cylinder 29 fits within the metal envelope 24, which is surrounded by a combined electrostatic and magnetic shield comprising alternate layers of copper 25, 26 and of high permeability iron 27, 28. The cathode is a directly heated hairpin filament 65, Fig. 4, one end of which is connected through stem 119, spring 111, vacuum-tight lead 105, and spring 107 to the inner conductor 83 of a concentric line, while the other end is connected through flexible lead 125 and sheath 109 to the outer line conductor 84. Centring screws 114 acting on collar 112 allow the cathode to be accurately centred in aperture 130. The whole cathode structure is mounted on glass end bell 82 which is sealed by a detachable gasket seal 80 to one end of envelope 24. Between the cathode and the first lens 32 are : (1) two magnetic shielding discs 66, 67, one carrying an anode extension 73 surrounding the cathode sheath 109 ; (2) a transversely adjustable aperture stop 50, for reducing the beam to a fine axial pencil; (3) a manipulator 46 adjustable in three dimensions, as more fully described in Specification 575,267, [Group XX], and carrying an object holder which is inserted through tube 54. The tube 54 is closed by a cap 56 opened by a lever mechanism which simultaneously operates valve 58 to let in warm dry air from pipe 61 before the cap is removed. The chamber is exhausted through port 75 connected to a vapour pump arranged in the same cabinet, together with a cooling fan for the cathode end, and supply and control circuit elements. The viewing end comprises a fluorescent screen 85, viewed by eyepiece or camera, mounted by gasket seal in a disc 88 sealed by gasket seal 91 to the other end of envelope 24. The manipulator 46 is adapted by three rods 93 brought out through vacuumtight bellows 96, 97, 98 as shown in Fig. 21, and moved by a flexible drive 216 from knurled wheels 7, 8.
GB19991/43A 1942-12-01 1943-11-30 Improvements in and relating to electron microscopes Expired GB576003A (en)

Applications Claiming Priority (6)

Application Number Priority Date Filing Date Title
US467530A US2424788A (en) 1942-12-01 1942-12-01 Electron microscope
US507557A US2400331A (en) 1942-12-01 1943-10-25 Electron lens system
US519772A US2424789A (en) 1942-12-01 1944-01-26 Electron microscope
US519774A US2424791A (en) 1942-12-01 1944-01-26 Electron microscope apparatus
US519773A US2424790A (en) 1942-12-01 1944-01-26 Electron microscope
US537273A US2420514A (en) 1944-05-25 1944-05-25 Electron lens structure

Publications (1)

Publication Number Publication Date
GB576003A true GB576003A (en) 1946-03-14

Family

ID=32180838

Family Applications (3)

Application Number Title Priority Date Filing Date
GB19991/43A Expired GB576003A (en) 1942-12-01 1943-11-30 Improvements in and relating to electron microscopes
GB20729/44A Expired GB647703A (en) 1942-12-01 1944-10-25 Improvements in and relating to electron lens systems
GB12895/45A Expired GB669381A (en) 1942-12-01 1945-05-23 Improvements in and relating to electrostatic electron lens structures

Family Applications After (2)

Application Number Title Priority Date Filing Date
GB20729/44A Expired GB647703A (en) 1942-12-01 1944-10-25 Improvements in and relating to electron lens systems
GB12895/45A Expired GB669381A (en) 1942-12-01 1945-05-23 Improvements in and relating to electrostatic electron lens structures

Country Status (4)

Country Link
US (5) US2424788A (en)
BE (4) BE480179A (en)
FR (3) FR938893A (en)
GB (3) GB576003A (en)

Families Citing this family (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2734141A (en) * 1956-02-07 hughes
FR1001312A (en) * 1946-04-15 1952-02-22 Csf Vacuum adjustment and centering device of a wehnelt cathode filament
CH265966A (en) * 1946-10-04 1949-12-31 Csf Sealed disc electronic discharge tube comprising an axially adjustable emissive cathode.
FR937296A (en) * 1947-06-21 1948-08-12 Csf Improvements to focusing devices, for electron microscopes
US2628996A (en) * 1949-01-21 1953-02-17 Western Electric Co Extensible folded terminal for electrical coils
US2817035A (en) * 1954-04-26 1957-12-17 Hughes Aircraft Co Brillouin flow electron gun
US2877286A (en) * 1955-06-13 1959-03-10 Cs 13 Corp Radiant energy shielding device
NL95319C (en) * 1957-09-27
US3292041A (en) * 1962-07-02 1966-12-13 Hitachi Ltd Multistage type high voltage electron gun with controllable electrode spacing
US3182175A (en) * 1962-09-24 1965-05-04 Nat Res Corp Electron beam heating device
US3614422A (en) * 1969-08-01 1971-10-19 Hitachi Ltd Surge reduction resistors between a high-voltage source and an electron microscope electron gun
US3982058A (en) * 1975-05-13 1976-09-21 The United States Of America As Represented By The Secretary Of The Navy Magnetic and electric field shielding of computer components from lightning
US3961220A (en) * 1975-05-16 1976-06-01 Gte Sylvania Incorporated Snubber means for positioning a gun structure in an electron discharge device
FR2417179A1 (en) * 1978-02-08 1979-09-07 Hitachi Ltd ELECTRONIC CANNON WITH FIELD EMISSION
US4196371A (en) * 1978-04-05 1980-04-01 Tektronix, Inc. Shock-absorbing means for mesh-carrying member of a cathode ray tube
US4359664A (en) * 1980-07-02 1982-11-16 North American Philips Consumer Electronics Corp. Method of mounting a cathode and eyelet for use therewith
US4446374A (en) * 1982-01-04 1984-05-01 Ivanov Andrei S Electron beam accelerator
US5376792A (en) * 1993-04-26 1994-12-27 Rj Lee Group, Inc. Scanning electron microscope
US20070145266A1 (en) * 2005-12-12 2007-06-28 Avi Cohen Electron microscope apparatus using CRT-type optics
US20070145267A1 (en) * 2005-12-12 2007-06-28 Adler David L Portable scanning electron microscope
WO2007070475A2 (en) * 2005-12-12 2007-06-21 Kla-Tencor Technologies Corporation Scanning electron microscope with crt-type electron optics
EP2545579B1 (en) * 2010-03-08 2017-02-22 Microscopy Innovations, LLC Device for holding electron microscope grids and other materials
JP6573835B2 (en) * 2016-01-12 2019-09-11 株式会社荏原製作所 Inspection apparatus and high-pressure reference pipe manufacturing method

Family Cites Families (48)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US1419241A (en) * 1922-06-13 X-ray cabinet
US2132076A (en) * 1938-10-04 Fluos
US1836829A (en) * 1928-04-17 1931-12-15 Bell Telephone Labor Inc Electric discharge device
US2036532A (en) * 1928-12-12 1936-04-07 Knoll Cathode-ray-oscillograph
US2227189A (en) * 1928-12-12 1940-12-31 Rca Corp Cathode-ray oscillograph
DE906737C (en) * 1931-05-31 1954-03-18 Siemens Ag Arrangement for enlarged imaging of objects by means of electron beams
US2062243A (en) * 1931-12-24 1936-11-24 New York Central Railroad Co Auto boxcar
US2075141A (en) * 1932-03-24 1937-03-30 Schlesinger Kurt Cathode ray tube system
US2227033A (en) * 1932-04-04 1940-12-31 Loewe Radio Inc Electron optical system
US2147372A (en) * 1935-03-14 1939-02-14 Telefunken Gmbh Cathode ray tube
BE426509A (en) * 1937-02-22
GB493790A (en) * 1937-04-30 1938-10-14 British Thomson Houston Co Ltd Improvements in or relating to cathode ray devices
NL53220C (en) * 1937-07-07
NL54222C (en) * 1937-08-24
US2227034A (en) * 1937-08-30 1940-12-31 Loewe Radio Inc Cathode ray tube
US2200694A (en) * 1937-09-21 1940-05-14 Pintsch Julius Kg Annular fusion joint
US2234281A (en) * 1938-02-10 1941-03-11 Fides Gmbh Shielded electron microscope
US2218639A (en) * 1938-07-09 1940-10-22 Dill Mfg Co Air bag stem
US2208406A (en) * 1938-08-17 1940-07-16 Westinghouse Electric & Mfg Co Cathode ray tube
US2266717A (en) * 1938-09-16 1941-12-16 Fides Gmbh Electron microscope
NL56051C (en) * 1938-10-19
US2305459A (en) * 1938-11-11 1942-12-15 Schuchmann Hans Electronic microscope
FR849648A (en) * 1938-11-19 1939-11-28 Licentia Gmbh Electron microscope based on the optical ultramicroscope principle
FR849698A (en) * 1938-11-19 1939-11-29 Licentia Gmbh Electron microscope operated by an influence machine
US2344238A (en) * 1939-01-19 1944-03-14 Rca Corp Compressed fluid condenser
BE436784A (en) * 1939-01-26
US2200095A (en) * 1939-02-28 1940-05-07 Rca Corp Photographic device for vacuum apparatus
BE438468A (en) * 1939-05-08
US2356633A (en) * 1939-10-19 1944-08-22 Ardenne Manfred Von Electronic microscope
US2244358A (en) * 1939-12-30 1941-06-03 Rca Corp Thermionic cathode assembly
US2301303A (en) * 1940-02-17 1942-11-10 Rca Corp Shielded electronic microscope
US2275234A (en) * 1940-04-25 1942-03-03 Rca Corp Electron diffraction camera
BE440927A (en) * 1940-05-08
US2361722A (en) * 1940-05-09 1944-10-31 Ardenne Manfred Von Electronic microscope
US2284710A (en) * 1940-06-01 1942-06-02 Rca Corp Vacuum plumbing
US2301490A (en) * 1940-06-25 1942-11-10 Bell Telephone Labor Inc Electronic discharge device
US2272843A (en) * 1940-07-31 1942-02-10 Rca Corp Electron microscope specimen chamber
US2267082A (en) * 1941-01-18 1941-12-23 Westinghouse Electric & Mfg Co Grid lead assembly
US2303166A (en) * 1941-01-21 1942-11-24 Bell Telephone Labor Inc Electron discharge device
US2319061A (en) * 1941-01-31 1943-05-11 Rca Corp Demountable electron gun
US2362034A (en) * 1941-06-25 1944-11-07 William F Stahl Shield for electrical currents
US2277414A (en) * 1941-07-02 1942-03-24 Gen Electric Electron lens
BE477138A (en) * 1941-08-18
BE475636A (en) * 1941-09-19
US2330888A (en) * 1942-05-29 1943-10-05 Rca Corp Scanning microscope
US2347348A (en) * 1942-06-30 1944-04-25 Rca Corp Electron microscope object chamber
US2380209A (en) * 1942-12-11 1945-07-10 Gen Electric Positioning means
US2360872A (en) * 1943-09-25 1944-10-24 Rca Corp Electron optical instrument

Also Published As

Publication number Publication date
US2424791A (en) 1947-07-29
US2424790A (en) 1947-07-29
BE576003A (en)
US2400331A (en) 1946-05-14
FR58024E (en) 1953-09-21
GB669381A (en) 1952-04-02
US2424788A (en) 1947-07-29
FR964837A (en) 1950-08-25
BE474126A (en)
BE480179A (en)
US2424789A (en) 1947-07-29
GB647703A (en) 1950-12-20
FR938893A (en) 1948-10-27
BE483238A (en)

Similar Documents

Publication Publication Date Title
GB576003A (en) Improvements in and relating to electron microscopes
GB1355365A (en) Electron guns
GB668161A (en) Improvements in cathode ray tubes
GB493790A (en) Improvements in or relating to cathode ray devices
US2565533A (en) Cathode-ray tube
JP2022167821A (en) Method and system for liquid-cooling insulated radiolucent target
US2564737A (en) Cathode-ray tube
US3124680A (en) Agent
US2271990A (en) Electron microscope
GB909640A (en) Improvements in or relating to ion getter pumps
US2049781A (en) Braun tube especially for television purposes
US2467224A (en) Neutralization of electrostatic charges in electron-optical instruments
US2086718A (en) Electron tube
US2752519A (en) Method and apparatus for use in chemical evaporation processes
US2131536A (en) Electron microscope
US2347982A (en) Electron lens
US3370168A (en) Anode aperture plate for a television camera tube in an electron microscope comprising a stainless steel foil
US2838708A (en) Electron discharge device and method of gettering
US2946910A (en) Infrared image converter tubes
US2420560A (en) Electron microscope
US3363098A (en) Combined electron microscope and diffraction apparatus for the electronoptical inspection of the surfaces of objects
US2129015A (en) Braun tube
US3418465A (en) Radiation source for reducing specimen contamination in electron microscopes
US2400332A (en) Self-adjusting electrode support
US2658160A (en) Image-reproducing device