GB669381A - Improvements in and relating to electrostatic electron lens structures - Google Patents

Improvements in and relating to electrostatic electron lens structures

Info

Publication number
GB669381A
GB669381A GB12895/45A GB1289545A GB669381A GB 669381 A GB669381 A GB 669381A GB 12895/45 A GB12895/45 A GB 12895/45A GB 1289545 A GB1289545 A GB 1289545A GB 669381 A GB669381 A GB 669381A
Authority
GB
United Kingdom
Prior art keywords
electrode
insulating
rods
spider
electrodes
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB12895/45A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
British Thomson Houston Co Ltd
Original Assignee
British Thomson Houston Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US537273A external-priority patent/US2420514A/en
Application filed by British Thomson Houston Co Ltd filed Critical British Thomson Houston Co Ltd
Publication of GB669381A publication Critical patent/GB669381A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/06—Electron sources; Electron guns
    • H01J37/067—Replacing parts of guns; Mutual adjustment of electrodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J29/00—Details of cathode-ray tubes or of electron-beam tubes of the types covered by group H01J31/00
    • H01J29/46—Arrangements of electrodes and associated parts for generating or controlling the ray or beam, e.g. electron-optical arrangement
    • H01J29/58—Arrangements for focusing or reflecting ray or beam
    • H01J29/62—Electrostatic lenses
    • H01J29/622—Electrostatic lenses producing fields exhibiting symmetry of revolution
    • H01J29/624—Electrostatic lenses producing fields exhibiting symmetry of revolution co-operating with or closely associated to an electron gun
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/06—Electron sources; Electron guns
    • H01J37/065—Construction of guns or parts thereof
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/10—Lenses
    • H01J37/12—Lenses electrostatic
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/18—Vacuum locks ; Means for obtaining or maintaining the desired pressure within the vessel
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/20—Means for supporting or positioning the object or the material; Means for adjusting diaphragms or lenses associated with the support
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/24—Circuit arrangements not adapted to a particular application of the tube and not otherwise provided for

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)

Abstract

669,381. Electron lenses. BRITISH THOMSON-HOUSTON CO., Ltd. May 23, 1945. [May 25, 1944], No. 12895/45. Class 39 (i). An electrostatic electron lens system, in for example an electron microscope, comprises two coaxial disc-electrodes 1, 6, Fig. 1, mechanically interconnected by insulating means 11 wholly located on that planar face of one electrode 1 which is remote from the second electrode 6 and by supporting means 15, 16 extending through openings 4, 5 in the first electrode for securing the second electrode 6 directly, or via an intermediate member, to the insulating means 11. The insulating means 11 can be of C, Z, zig-zag or cup shape and may be a ceramic bonded mica known under the Registered Trade Mark " Mycalex ". The cup-shaped insulating means 11 may be re-entrant. The supporting means 15, 16 may comprise metal rods secured, e.g. by welding, to the periphery of the second electrode 6. One of the rods 16 can extend beyond the second electrode 6 through an opening in a third electrode 2 for connection to a potential source. The electrodes 1, 2 and 6 are aligned and spaced by a mandrel 18 having two portions 19, 20 and shoulders 21, 22. An annular spacer 9 is provided between the electrodes 1 and 2..In the construction shown in Fig. 3, the insulating means comprises two groups of stand-off insulators 24, 25 seated in recesses 26, 27 of the electrodes 1, 2 and having re-entrant portions 28 to form shrouds for nuts 17 on the rods 16<SP>1</SP> connected to the electrode 6 and to increase the length of the insulating path between the electrodes. In the construction shown in Figs. 6 and 7 the insulating means comprises a group of columns 35 of insulating material connected at one end to the electrode 2 and at the other end to a metallic ring member 37 constituting the intermediate member, and the supporting means comprises metal rods 42 secured at one end to the electrode 6 and at the other end to the intermediate member 37 via another group of columns 38 of insulating material. A metallic spider member 34 is provided between the electrode 2 and the insulating columns 35 and is attached to the electrode 2 by a plurality of pusher screws 45 and a plurality of screws 44, Fig. 10, passing through holes 46 in the spider 34 of larger diameter than the screws for lateral adjustment of the spider. A metallic tube 47 is attached to the spider 34 to prevent the metallic ring, 37 affecting the electron stream and to eliminate spurious aberrations of the electron beam caused by electrostatic charges built up on the insulator surfaces. In the construction shown in Fig. 9 the spider 34 is provided with a stud 48 in screw-threaded engagement with an annular insulator 49 of substantially C-shaped cross-section having apertures 51 in which the rods 42 are clamped by screws 43 provided with smooth polished metal caps 52 to reduce arcing between the ends of the rods and the surrounding structure.
GB12895/45A 1942-12-01 1945-05-23 Improvements in and relating to electrostatic electron lens structures Expired GB669381A (en)

Applications Claiming Priority (6)

Application Number Priority Date Filing Date Title
US467530A US2424788A (en) 1942-12-01 1942-12-01 Electron microscope
US507557A US2400331A (en) 1942-12-01 1943-10-25 Electron lens system
US519772A US2424789A (en) 1942-12-01 1944-01-26 Electron microscope
US519774A US2424791A (en) 1942-12-01 1944-01-26 Electron microscope apparatus
US519773A US2424790A (en) 1942-12-01 1944-01-26 Electron microscope
US537273A US2420514A (en) 1944-05-25 1944-05-25 Electron lens structure

Publications (1)

Publication Number Publication Date
GB669381A true GB669381A (en) 1952-04-02

Family

ID=32180838

Family Applications (3)

Application Number Title Priority Date Filing Date
GB19991/43A Expired GB576003A (en) 1942-12-01 1943-11-30 Improvements in and relating to electron microscopes
GB20729/44A Expired GB647703A (en) 1942-12-01 1944-10-25 Improvements in and relating to electron lens systems
GB12895/45A Expired GB669381A (en) 1942-12-01 1945-05-23 Improvements in and relating to electrostatic electron lens structures

Family Applications Before (2)

Application Number Title Priority Date Filing Date
GB19991/43A Expired GB576003A (en) 1942-12-01 1943-11-30 Improvements in and relating to electron microscopes
GB20729/44A Expired GB647703A (en) 1942-12-01 1944-10-25 Improvements in and relating to electron lens systems

Country Status (4)

Country Link
US (5) US2424788A (en)
BE (4) BE480179A (en)
FR (3) FR938893A (en)
GB (3) GB576003A (en)

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FR937296A (en) * 1947-06-21 1948-08-12 Csf Improvements to focusing devices, for electron microscopes
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US2877286A (en) * 1955-06-13 1959-03-10 Cs 13 Corp Radiant energy shielding device
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US3292041A (en) * 1962-07-02 1966-12-13 Hitachi Ltd Multistage type high voltage electron gun with controllable electrode spacing
US3182175A (en) * 1962-09-24 1965-05-04 Nat Res Corp Electron beam heating device
US3614422A (en) * 1969-08-01 1971-10-19 Hitachi Ltd Surge reduction resistors between a high-voltage source and an electron microscope electron gun
US3982058A (en) * 1975-05-13 1976-09-21 The United States Of America As Represented By The Secretary Of The Navy Magnetic and electric field shielding of computer components from lightning
US3961220A (en) * 1975-05-16 1976-06-01 Gte Sylvania Incorporated Snubber means for positioning a gun structure in an electron discharge device
FR2417179A1 (en) * 1978-02-08 1979-09-07 Hitachi Ltd ELECTRONIC CANNON WITH FIELD EMISSION
US4196371A (en) * 1978-04-05 1980-04-01 Tektronix, Inc. Shock-absorbing means for mesh-carrying member of a cathode ray tube
US4359664A (en) * 1980-07-02 1982-11-16 North American Philips Consumer Electronics Corp. Method of mounting a cathode and eyelet for use therewith
US4446374A (en) * 1982-01-04 1984-05-01 Ivanov Andrei S Electron beam accelerator
US5376792A (en) * 1993-04-26 1994-12-27 Rj Lee Group, Inc. Scanning electron microscope
US20070145266A1 (en) * 2005-12-12 2007-06-28 Avi Cohen Electron microscope apparatus using CRT-type optics
US20070145267A1 (en) * 2005-12-12 2007-06-28 Adler David L Portable scanning electron microscope
WO2007070475A2 (en) * 2005-12-12 2007-06-21 Kla-Tencor Technologies Corporation Scanning electron microscope with crt-type electron optics
EP2545579B1 (en) * 2010-03-08 2017-02-22 Microscopy Innovations, LLC Device for holding electron microscope grids and other materials
JP6573835B2 (en) * 2016-01-12 2019-09-11 株式会社荏原製作所 Inspection apparatus and high-pressure reference pipe manufacturing method

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US2036532A (en) * 1928-12-12 1936-04-07 Knoll Cathode-ray-oscillograph
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Also Published As

Publication number Publication date
US2424791A (en) 1947-07-29
US2424790A (en) 1947-07-29
BE576003A (en)
US2400331A (en) 1946-05-14
FR58024E (en) 1953-09-21
US2424788A (en) 1947-07-29
FR964837A (en) 1950-08-25
BE474126A (en)
BE480179A (en)
US2424789A (en) 1947-07-29
GB576003A (en) 1946-03-14
GB647703A (en) 1950-12-20
FR938893A (en) 1948-10-27
BE483238A (en)

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