GB927845A - Improvements in or relating to electron microscopes - Google Patents
Improvements in or relating to electron microscopesInfo
- Publication number
- GB927845A GB927845A GB30921/59A GB3092159A GB927845A GB 927845 A GB927845 A GB 927845A GB 30921/59 A GB30921/59 A GB 30921/59A GB 3092159 A GB3092159 A GB 3092159A GB 927845 A GB927845 A GB 927845A
- Authority
- GB
- United Kingdom
- Prior art keywords
- cooling
- medium
- sept
- walls
- discharged
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000001816 cooling Methods 0.000 abstract 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 abstract 2
- 239000002826 coolant Substances 0.000 abstract 2
- 239000002184 metal Substances 0.000 abstract 2
- 239000012809 cooling fluid Substances 0.000 abstract 1
- 239000012530 fluid Substances 0.000 abstract 1
- 239000007789 gas Substances 0.000 abstract 1
- 239000007788 liquid Substances 0.000 abstract 1
- 229910052757 nitrogen Inorganic materials 0.000 abstract 1
- 238000005192 partition Methods 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/20—Means for supporting or positioning the object or the material; Means for adjusting diaphragms or lenses associated with the support
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Sampling And Sample Adjustment (AREA)
Abstract
927,845. Electron microscopes. PHILIPS ELECTRICAL INDUSTRIES Ltd. Sept. 10, 1959 [Sept. 13, 1958], No. 30921/59. Class 39 (1). In an electron microscope the object carrier 17 supports the object on a pin 19 in a cooling space defined by walls 22, 23 connected to a metal block 26 at the end of a metal tube 27 having a concentric inner tube 31 which feeds cooling fluid (liquid or gas, e.g. air or nitrogen) to the face of the block 26, the fluid being discharged through a bore 34. In order that the cooling medium does not extract heat from the microscope housing the medium is heated by a heater 44 so that the discharged cooling medium is maintained at ambient temperature. The walls of the cooling chamber may substantially surround the object and the object diaphragm may also be arranged in the cooling chamber being separated from the object by a partition wall which is also cooled.
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| NL231361 | 1958-09-13 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| GB927845A true GB927845A (en) | 1963-06-06 |
Family
ID=19751346
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| GB30921/59A Expired GB927845A (en) | 1958-09-13 | 1959-09-10 | Improvements in or relating to electron microscopes |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US3124680A (en) |
| CH (1) | CH379656A (en) |
| DE (1) | DE1152766B (en) |
| FR (1) | FR1235119A (en) |
| GB (1) | GB927845A (en) |
| NL (2) | NL108507C (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB2211655A (en) * | 1987-10-23 | 1989-07-05 | Joel Limited | Scanning tunnelling microscope installed in electron microscope |
| CN105474348B (en) * | 2013-09-20 | 2018-02-23 | 株式会社日立高新技术 | Anti-pollution trap and vacuum applying unit |
Families Citing this family (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE1215832B (en) * | 1963-04-19 | 1966-05-05 | Max Planck Gesellschaft | Corpuscular beam apparatus working on the pump, in particular an electron microscope, with an object cartridge which receives the object carrier and consists of two mutually heat-insulated cartridge parts |
| DE1202915B (en) * | 1963-09-09 | 1965-10-14 | Siemens Ag | Corpuscular beam apparatus working on the pump, in particular an electron microscope, with an object cartridge which receives the object carrier and which is connected to a deep-freezing device |
| US3973125A (en) * | 1965-09-16 | 1976-08-03 | Siemens Aktiengesellschaft | Corpuscular-ray apparatus with a cryogenically cooled specimen space |
| US3489896A (en) * | 1966-11-01 | 1970-01-13 | Ashland Oil Inc | Alignment tool or device for cooling blade |
| DE1614163B1 (en) * | 1967-05-31 | 1970-10-15 | Max Planck Gesellschaft | Corpuscular beam device, in particular an electron microscope, with a preparation holder |
| DE1614165B1 (en) * | 1967-06-02 | 1970-09-24 | Max Planck Gesellschaft | Corpuscular beam device, in particular an electron microscope, with an object space cooling |
| FR2087652A5 (en) * | 1970-05-27 | 1971-12-31 | Onera (Off Nat Aerospatiale) | |
| NL7906633A (en) * | 1979-09-05 | 1981-03-09 | Philips Nv | ANTI-CONTAMINATION DIAPHRAGM FOR ELECTRON RADIUS. |
| US4833330A (en) * | 1987-11-03 | 1989-05-23 | Gatan Inc. | Anticontaminator for transmission electron microscopes |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE659092C (en) * | 1934-12-12 | 1938-04-25 | Ernst Ruska Dr Ing | Infeed device for corpuscular jet devices operated on the pump |
| CH236120A (en) * | 1942-04-29 | 1945-01-15 | Fides Gmbh | Method for examining an object in a corpuscular beam apparatus. |
| BE455526A (en) * | 1943-03-04 | |||
| NL198831A (en) * | 1954-07-14 | |||
| US2826701A (en) * | 1954-09-01 | 1958-03-11 | Gen Electric | Low temperature chamber for electronoptics instruments |
-
0
- NL NL231361D patent/NL231361A/xx unknown
- NL NL108507D patent/NL108507C/xx active
- US US3124680D patent/US3124680A/en not_active Expired - Lifetime
-
1959
- 1959-09-09 DE DEN17209A patent/DE1152766B/en active Pending
- 1959-09-10 CH CH7805959A patent/CH379656A/en unknown
- 1959-09-10 GB GB30921/59A patent/GB927845A/en not_active Expired
- 1959-09-11 FR FR804963A patent/FR1235119A/en not_active Expired
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB2211655A (en) * | 1987-10-23 | 1989-07-05 | Joel Limited | Scanning tunnelling microscope installed in electron microscope |
| GB2211655B (en) * | 1987-10-23 | 1992-06-17 | Joel Limited | Electron microscope equipped with scanning tunnelling microscope |
| CN105474348B (en) * | 2013-09-20 | 2018-02-23 | 株式会社日立高新技术 | Anti-pollution trap and vacuum applying unit |
Also Published As
| Publication number | Publication date |
|---|---|
| NL108507C (en) | |
| FR1235119A (en) | 1960-07-01 |
| NL231361A (en) | |
| DE1152766B (en) | 1963-08-14 |
| US3124680A (en) | 1964-03-10 |
| CH379656A (en) | 1964-07-15 |
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