CH236120A - Method for examining an object in a corpuscular beam apparatus. - Google Patents

Method for examining an object in a corpuscular beam apparatus.

Info

Publication number
CH236120A
CH236120A CH236120DA CH236120A CH 236120 A CH236120 A CH 236120A CH 236120D A CH236120D A CH 236120DA CH 236120 A CH236120 A CH 236120A
Authority
CH
Switzerland
Prior art keywords
examining
beam apparatus
corpuscular beam
corpuscular
Prior art date
Application number
Other languages
German (de)
Inventor
Fides Gesellschaft Beschraenk
Original Assignee
Fides Gmbh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fides Gmbh filed Critical Fides Gmbh
Publication of CH236120A publication Critical patent/CH236120A/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/20—Means for supporting or positioning the objects or the material; Means for adjusting diaphragms or lenses associated with the support

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Sampling And Sample Adjustment (AREA)
CH236120D 1942-04-29 1943-04-21 Method for examining an object in a corpuscular beam apparatus. CH236120A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE236120X 1942-04-29

Publications (1)

Publication Number Publication Date
CH236120A true CH236120A (en) 1945-01-15

Family

ID=5900237

Family Applications (1)

Application Number Title Priority Date Filing Date
CH236120D CH236120A (en) 1942-04-29 1943-04-21 Method for examining an object in a corpuscular beam apparatus.

Country Status (3)

Country Link
CH (1) CH236120A (en)
DE (1) DE898211C (en)
FR (1) FR897307A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2858444A (en) * 1954-07-14 1958-10-28 Siemens Ag Object-holding device for electron microscopes
US3124680A (en) * 1958-09-13 1964-03-10 Agent

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2858444A (en) * 1954-07-14 1958-10-28 Siemens Ag Object-holding device for electron microscopes
US3124680A (en) * 1958-09-13 1964-03-10 Agent

Also Published As

Publication number Publication date
DE898211C (en) 1953-11-30
FR897307A (en) 1945-03-19

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