GB2509063A - Plasma device with earth electrode - Google Patents

Plasma device with earth electrode Download PDF

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Publication number
GB2509063A
GB2509063A GB1222840.9A GB201222840A GB2509063A GB 2509063 A GB2509063 A GB 2509063A GB 201222840 A GB201222840 A GB 201222840A GB 2509063 A GB2509063 A GB 2509063A
Authority
GB
United Kingdom
Prior art keywords
dielectric substrate
plasma
electrode
plasma cell
active species
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
GB1222840.9A
Other languages
English (en)
Other versions
GB201222840D0 (en
Inventor
Thomas Bickford Holbeche
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Linde GmbH
Original Assignee
Linde GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Linde GmbH filed Critical Linde GmbH
Priority to GB1222840.9A priority Critical patent/GB2509063A/en
Publication of GB201222840D0 publication Critical patent/GB201222840D0/en
Priority to US14/650,960 priority patent/US20150340207A1/en
Priority to ES13815796.1T priority patent/ES2635053T3/es
Priority to BR112015014338A priority patent/BR112015014338A2/pt
Priority to MX2015007911A priority patent/MX2015007911A/es
Priority to JP2015547134A priority patent/JP2016507255A/ja
Priority to PCT/GB2013/000550 priority patent/WO2014096755A1/en
Priority to CN201380066424.1A priority patent/CN105009691A/zh
Priority to EP13815796.1A priority patent/EP2936943B1/en
Publication of GB2509063A publication Critical patent/GB2509063A/en
Withdrawn legal-status Critical Current

Links

Classifications

    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B18/00—Surgical instruments, devices or methods for transferring non-mechanical forms of energy to or from the body
    • A61B18/04—Surgical instruments, devices or methods for transferring non-mechanical forms of energy to or from the body by heating
    • A61B18/042—Surgical instruments, devices or methods for transferring non-mechanical forms of energy to or from the body by heating using additional gas becoming plasma
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61L—METHODS OR APPARATUS FOR STERILISING MATERIALS OR OBJECTS IN GENERAL; DISINFECTION, STERILISATION OR DEODORISATION OF AIR; CHEMICAL ASPECTS OF BANDAGES, DRESSINGS, ABSORBENT PADS OR SURGICAL ARTICLES; MATERIALS FOR BANDAGES, DRESSINGS, ABSORBENT PADS OR SURGICAL ARTICLES
    • A61L2/00—Disinfection or sterilisation of materials or objects, in general; Accessories therefor
    • A61L2/02—Disinfection or sterilisation of materials or objects, in general; Accessories therefor using physical processes
    • A61L2/14—Plasma, i.e. ionised gases
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/50—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32348—Dielectric barrier discharge
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/3244—Gas supply means
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/32532—Electrodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/32798—Further details of plasma apparatus not provided for in groups H01J37/3244 - H01J37/32788; special provisions for cleaning or maintenance of the apparatus
    • H01J37/32816—Pressure
    • H01J37/32825—Working under atmospheric pressure or higher
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/2406—Generating plasma using dielectric barrier discharges, i.e. with a dielectric interposed between the electrodes
    • H05H1/2431—Generating plasma using dielectric barrier discharges, i.e. with a dielectric interposed between the electrodes using cylindrical electrodes, e.g. rotary drums
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/2406—Generating plasma using dielectric barrier discharges, i.e. with a dielectric interposed between the electrodes
    • H05H1/2443—Generating plasma using dielectric barrier discharges, i.e. with a dielectric interposed between the electrodes the plasma fluid flowing through a dielectric tube

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Health & Medical Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Surgery (AREA)
  • Animal Behavior & Ethology (AREA)
  • Veterinary Medicine (AREA)
  • Public Health (AREA)
  • General Health & Medical Sciences (AREA)
  • Otolaryngology (AREA)
  • Molecular Biology (AREA)
  • Medical Informatics (AREA)
  • Heart & Thoracic Surgery (AREA)
  • Biomedical Technology (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Epidemiology (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Fluid Mechanics (AREA)
  • Plasma Technology (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Electrotherapy Devices (AREA)
GB1222840.9A 2012-12-18 2012-12-18 Plasma device with earth electrode Withdrawn GB2509063A (en)

Priority Applications (9)

Application Number Priority Date Filing Date Title
GB1222840.9A GB2509063A (en) 2012-12-18 2012-12-18 Plasma device with earth electrode
EP13815796.1A EP2936943B1 (en) 2012-12-18 2013-12-16 Device for providing a flow of plasma
MX2015007911A MX2015007911A (es) 2012-12-18 2013-12-16 Dispositivo para proporcionar un flujo de plasma.
ES13815796.1T ES2635053T3 (es) 2012-12-18 2013-12-16 Dispositivo para proporcionar un flujo de plasma
BR112015014338A BR112015014338A2 (pt) 2012-12-18 2013-12-16 dispositivo para fornecer um fluxo de um plasma
US14/650,960 US20150340207A1 (en) 2012-12-18 2013-12-16 Device for providing a flow of plasma
JP2015547134A JP2016507255A (ja) 2012-12-18 2013-12-16 プラズマの流れを提供する装置
PCT/GB2013/000550 WO2014096755A1 (en) 2012-12-18 2013-12-16 Device for providing a flow of plasma
CN201380066424.1A CN105009691A (zh) 2012-12-18 2013-12-16 提供等离子体流的装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB1222840.9A GB2509063A (en) 2012-12-18 2012-12-18 Plasma device with earth electrode

Publications (2)

Publication Number Publication Date
GB201222840D0 GB201222840D0 (en) 2013-01-30
GB2509063A true GB2509063A (en) 2014-06-25

Family

ID=47630956

Family Applications (1)

Application Number Title Priority Date Filing Date
GB1222840.9A Withdrawn GB2509063A (en) 2012-12-18 2012-12-18 Plasma device with earth electrode

Country Status (9)

Country Link
US (1) US20150340207A1 (https=)
EP (1) EP2936943B1 (https=)
JP (1) JP2016507255A (https=)
CN (1) CN105009691A (https=)
BR (1) BR112015014338A2 (https=)
ES (1) ES2635053T3 (https=)
GB (1) GB2509063A (https=)
MX (1) MX2015007911A (https=)
WO (1) WO2014096755A1 (https=)

Families Citing this family (27)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
RU2656333C1 (ru) * 2015-01-12 2018-06-05 Гуанчжоу Цин ГУ Медикал Технолоджи Ко., ЛТД Плазменный прибор со сменной разрядной трубкой
JP6513793B2 (ja) * 2015-04-09 2019-05-15 株式会社オーラル２８ プラズマ照射装置及びプラズマ照射方法
US11490947B2 (en) 2015-05-15 2022-11-08 Clear Intradermal Technologies, Inc. Tattoo removal using a liquid-gas mixture with plasma gas bubbles
CA2986031C (en) 2015-05-15 2024-03-19 ClearIt, LLC Systems and methods for tattoo removal using cold plasma
EP3314988B1 (en) 2015-06-23 2020-06-17 Aurora Labs Ltd Plasma driven particle propagation apparatus and pumping method
EP3120875B1 (en) * 2015-07-20 2017-07-12 Hilgenberg GmbH Ionization device
WO2017197071A1 (en) 2016-05-12 2017-11-16 EP Technologies LLC Methods and systems for trans-tissue substance delivery using plasmaporation
WO2017195345A1 (ja) * 2016-05-13 2017-11-16 富士機械製造株式会社 医療用プラズマ発生装置、およびプラズマ照射方法
WO2018089577A1 (en) 2016-11-10 2018-05-17 EP Technologies LLC Methods and systems for generating plasma activated liquid
CN106693009B (zh) * 2016-12-26 2023-06-27 大连顺达微创科技有限公司 一种大气压柔性冷等离子体射流内窥镜灭菌装置及方法
CN107320847B (zh) * 2017-06-21 2020-08-07 江苏春申堂药业有限公司 一种低温等离子体灭菌笔
TWI691237B (zh) * 2018-02-13 2020-04-11 國立交通大學 常壓電漿束產生裝置
WO2020004247A1 (ja) * 2018-06-28 2020-01-02 株式会社Ｃｓｐアドバンスソリューションズ 流行性角結膜炎の治療用点眼剤、当該点眼剤を生成するプラズマ活性点眼剤生成装置、及び流行性角結膜炎の治療方法
ES2974157T3 (es) * 2018-07-31 2024-06-26 Oreal Generación de plasma frío lejos de la piel, y sistemas asociados
CA3124411A1 (en) 2018-12-19 2020-06-25 ClearIt, LLC Systems and methods for tattoo removal using an applied electric field
DE102019101063B4 (de) 2019-01-16 2021-02-25 Cinogy Gmbh Plasma-Behandlungsanordnung und Verfahren zur Anpassung der Größe einer Auflagefläche der Plasma-Behandlungsanordnung an die Größe der zu behandelnden Oberfläche
CN112638471B (zh) * 2019-06-24 2025-07-11 永进生物科技股份有限公司 包括二进气口的电浆装置
TWI694748B (zh) * 2019-08-28 2020-05-21 明志科技大學 用以產生大面積電漿之電極元件
US12564725B2 (en) 2020-03-19 2026-03-03 Caps Medical Ltd. Treatment of internal spaces using plasma generating device
GB2595651A (en) * 2020-05-29 2021-12-08 Univ Southampton Sterlisation of endoscopes
WO2022013229A1 (en) 2020-07-13 2022-01-20 Freiburger Medizintechnik Gmbh Electrode arrangement
KR20220078855A (ko) 2020-12-04 2022-06-13 주식회사 피글 세포활성용 플라스마 발생부의 제조방법 및 이를 통해 제조된 플라스마 발생부를 포함하는 세포활성장치
JP7696559B2 (ja) * 2020-12-24 2025-06-23 国立大学法人高知大学 腫瘍組織への免疫細胞誘導装置
CN112741704B (zh) * 2020-12-29 2022-06-24 江苏容正医药科技有限公司 一种用于牙齿清洁和/或美白的等离子体射流装置
IL315745A (en) * 2021-12-22 2024-11-01 Inbar Medical Ltd Devices and methods for treating skin tissue using cold plasma
JP7612315B1 (ja) * 2023-11-01 2025-01-14 株式会社Tmeic 活性ガス生成装置
WO2025094419A1 (ja) * 2023-11-01 2025-05-08 株式会社Tmeic 活性ガス生成装置

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2006001455A1 (ja) * 2004-06-28 2006-01-05 The University Of Tokyo プラズマ発生装置並びにこれを使用した生体内プラズマ処理装置及び表面処理装置
JP2009119356A (ja) * 2007-11-14 2009-06-04 Toshiba Corp 放電表面処理装置及び放電表面処理方法
WO2009146432A1 (en) * 2008-05-30 2009-12-03 Colorado State University Research Foundation Plasma-based chemical source device and method of use thereof
US20100125267A1 (en) * 2008-11-14 2010-05-20 Psm Inc. Plasma Gun for Bio/Medical Treatment
US20120271225A1 (en) * 2009-08-25 2012-10-25 Neoplas Gmbh Device for the planar treatment of areas of human or animal skin or mucous membrane surfaces by means of a cold atmospheric pressure plasma
WO2012172285A1 (en) * 2011-06-17 2012-12-20 Linde Aktiengesellschaft Device for providing a flow of plasma

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6673533B1 (en) * 1995-03-10 2004-01-06 Meso Scale Technologies, Llc. Multi-array multi-specific electrochemiluminescence testing
US5970993A (en) * 1996-10-04 1999-10-26 Utron Inc. Pulsed plasma jet paint removal
US6652069B2 (en) * 2000-11-22 2003-11-25 Konica Corporation Method of surface treatment, device of surface treatment, and head for use in ink jet printer
JP2003229299A (ja) * 2002-02-06 2003-08-15 Konica Corp 大気圧プラズマ処理装置、該大気圧プラズマ処理装置を用いて製造した膜、製膜方法及び該製膜方法を用いて製造した膜
JP2005322416A (ja) * 2003-05-01 2005-11-17 Gunma Univ 大気圧低温プラズマ装置と表面処理方法
US7022402B2 (en) * 2003-07-14 2006-04-04 E. I. Du Pont De Nemours And Company Dielectric substrates comprising a polymide core layer and a high temperature fluoropolymer bonding layer, and methods relating thereto
JP4658506B2 (ja) * 2004-03-31 2011-03-23 浩史 滝川 パルスアークプラズマ生成用電源回路及びパルスアークプラズマ処理装置
DE102004029081A1 (de) * 2004-06-16 2006-01-05 Je Plasmaconsult Gmbh Vorrichtung zur Bearbeitung eines Substrates mittels mindestens eines Plasma-Jets
US7608839B2 (en) * 2005-08-05 2009-10-27 Mcgill University Plasma source and applications thereof
WO2007105428A1 (ja) * 2006-02-13 2007-09-20 National University Corporation Gunma University プラズマ発生装置用ノズル、プラズマ発生装置、プラズマ表面処理装置、プラズマ発生方法およびプラズマ表面処理方法
DE102008008614A1 (de) * 2008-02-12 2009-08-13 Leibniz-Institut für Plasmaforschung und Technologie e.V. Plama-Gerät zur selektiven Behandlung elektroporierter Zellen
KR101044314B1 (ko) * 2008-11-25 2011-06-29 포항공과대학교 산학협력단 저온 플라즈마를 이용한 지혈장치
WO2011092186A1 (de) * 2010-01-26 2011-08-04 Leibniz-Institut Für Plasmaforschung Und Technologie E. V. Vorrichtung und verfahren zur erzeugung einer elektrischen entladung in hohlkörpern
WO2012005132A1 (ja) * 2010-07-07 2012-01-12 独立行政法人産業技術総合研究所 プラズマ照射処理装置
GB201016341D0 (en) * 2010-09-28 2010-11-10 Linde Ag Active gases and treatment methods

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2006001455A1 (ja) * 2004-06-28 2006-01-05 The University Of Tokyo プラズマ発生装置並びにこれを使用した生体内プラズマ処理装置及び表面処理装置
JP2009119356A (ja) * 2007-11-14 2009-06-04 Toshiba Corp 放電表面処理装置及び放電表面処理方法
WO2009146432A1 (en) * 2008-05-30 2009-12-03 Colorado State University Research Foundation Plasma-based chemical source device and method of use thereof
US20100125267A1 (en) * 2008-11-14 2010-05-20 Psm Inc. Plasma Gun for Bio/Medical Treatment
US20120271225A1 (en) * 2009-08-25 2012-10-25 Neoplas Gmbh Device for the planar treatment of areas of human or animal skin or mucous membrane surfaces by means of a cold atmospheric pressure plasma
WO2012172285A1 (en) * 2011-06-17 2012-12-20 Linde Aktiengesellschaft Device for providing a flow of plasma

Also Published As

Publication number Publication date
ES2635053T3 (es) 2017-10-02
WO2014096755A1 (en) 2014-06-26
JP2016507255A (ja) 2016-03-10
EP2936943A1 (en) 2015-10-28
GB201222840D0 (en) 2013-01-30
US20150340207A1 (en) 2015-11-26
BR112015014338A2 (pt) 2017-07-11
EP2936943B1 (en) 2017-06-14
MX2015007911A (es) 2015-10-05
CN105009691A (zh) 2015-10-28

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