GB1445963A - Ion beam apparatus - Google Patents

Ion beam apparatus

Info

Publication number
GB1445963A
GB1445963A GB1137075A GB1137075A GB1445963A GB 1445963 A GB1445963 A GB 1445963A GB 1137075 A GB1137075 A GB 1137075A GB 1137075 A GB1137075 A GB 1137075A GB 1445963 A GB1445963 A GB 1445963A
Authority
GB
United Kingdom
Prior art keywords
ion
ions
mass
energy
ion beam
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB1137075A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Max Planck Gesellschaft zur Foerderung der Wissenschaften eV
Original Assignee
Max Planck Gesellschaft zur Foerderung der Wissenschaften eV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Max Planck Gesellschaft zur Foerderung der Wissenschaften eV filed Critical Max Planck Gesellschaft zur Foerderung der Wissenschaften eV
Publication of GB1445963A publication Critical patent/GB1445963A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/10—Ion sources; Ion guns
    • H01J49/14—Ion sources; Ion guns using particle bombardment, e.g. ionisation chambers
    • H01J49/142—Ion sources; Ion guns using particle bombardment, e.g. ionisation chambers using a solid target which is not previously vapourised
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/004—Combinations of spectrometers, tandem spectrometers, e.g. MS/MS, MSn
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/26—Mass spectrometers or separator tubes
    • H01J49/34—Dynamic spectrometers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/44—Energy spectrometers, e.g. alpha-, beta-spectrometers
    • H01J49/46—Static spectrometers
    • H01J49/48—Static spectrometers using electrostatic analysers, e.g. cylindrical sector, Wien filter

Abstract

1445963 Ion beam apparatus MAX-PLANCKGES ZUR FÍRDERUNG DER WISSENSCHAFTEN EV 19 March 1975 [25 March 1974] 11370/75 Heading HID Ion beam apparatus for surface analysis of a specimen 16 which permits as alternative modes ion scattering spectrometry or secondary ion mass spectrometry comprises a primary ion beam source 10 bombarding the specimen 16, the scattered or ejected ions passing in turn through an energy analyser 24 and a mass spectrometer 32 to an ion detector 36. The mass spectrometer is not used in ion scattering spectrometry where energy analysis only is required. In secondary ion mass spectrometry the energy analyser 24 is set to transmit the central energy level of the secondary ions, mass analysis then taking place in the mass spectrometer 32 which is preferably a quadrupole filter. The energy analyser can be a concentric cylinder or sphere capacitor. Earthed beam defining apertures are indicated at 10a, 18, 20, 26 and 30 with an electrostatic lens 14. The electrode assembly 22 accelerates the ions from the sample 16. Electrode 28 decelerates the ions before entry to spectrometer 32.
GB1137075A 1974-03-25 1975-03-19 Ion beam apparatus Expired GB1445963A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19742414221 DE2414221C3 (en) 1974-03-25 1974-03-25 Ion-optical device for examining the surface of a sample by ion bombardment and analyzing the ions emanating from the bombarded surface area

Publications (1)

Publication Number Publication Date
GB1445963A true GB1445963A (en) 1976-08-11

Family

ID=5911045

Family Applications (1)

Application Number Title Priority Date Filing Date
GB1137075A Expired GB1445963A (en) 1974-03-25 1975-03-19 Ion beam apparatus

Country Status (8)

Country Link
JP (1) JPS5199094A (en)
BE (1) BE826966A (en)
DE (1) DE2414221C3 (en)
DK (1) DK144898C (en)
FR (1) FR2266166B3 (en)
GB (1) GB1445963A (en)
IT (1) IT1034386B (en)
NL (1) NL7503567A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1981003395A1 (en) * 1980-05-12 1981-11-26 Univ Trobe Angular resolved spectrometer

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4058724A (en) * 1975-06-27 1977-11-15 Minnesota Mining And Manufacturing Company Ion Scattering spectrometer with two analyzers preferably in tandem
DE2556291C3 (en) * 1975-12-13 1980-11-27 Gesellschaft Fuer Strahlen- Und Umweltforschung Mbh, 8000 Muenchen Scanning ion microscope
JPH083988B2 (en) * 1986-10-08 1996-01-17 株式会社日立製作所 Secondary ion mass spectrometry
JPH0589817A (en) * 1991-03-16 1993-04-09 Eiko Eng:Kk Complex analysis device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1981003395A1 (en) * 1980-05-12 1981-11-26 Univ Trobe Angular resolved spectrometer

Also Published As

Publication number Publication date
DK122675A (en) 1975-09-26
IT1034386B (en) 1979-09-10
DE2414221B2 (en) 1978-04-20
DK144898C (en) 1982-11-22
FR2266166B3 (en) 1977-12-02
JPS5199094A (en) 1976-09-01
NL7503567A (en) 1975-09-29
DE2414221A1 (en) 1975-10-09
FR2266166A1 (en) 1975-10-24
DE2414221C3 (en) 1979-01-18
DK144898B (en) 1982-06-28
BE826966A (en) 1975-07-16

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Legal Events

Date Code Title Description
PS Patent sealed
PCNP Patent ceased through non-payment of renewal fee