IT1034386B - PARTICLE OPTICS APPARATUS FOR THE SPECTROMETRIC ANALYSIS OF ION AND MASS DISPERSIONS OF SECONDARY IONS - Google Patents

PARTICLE OPTICS APPARATUS FOR THE SPECTROMETRIC ANALYSIS OF ION AND MASS DISPERSIONS OF SECONDARY IONS

Info

Publication number
IT1034386B
IT1034386B IT2138775A IT2138775A IT1034386B IT 1034386 B IT1034386 B IT 1034386B IT 2138775 A IT2138775 A IT 2138775A IT 2138775 A IT2138775 A IT 2138775A IT 1034386 B IT1034386 B IT 1034386B
Authority
IT
Italy
Prior art keywords
ion
spectrometric analysis
secondary ions
particle optics
optics apparatus
Prior art date
Application number
IT2138775A
Other languages
Italian (it)
Original Assignee
Max Planck Gesellschaft
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Max Planck Gesellschaft filed Critical Max Planck Gesellschaft
Application granted granted Critical
Publication of IT1034386B publication Critical patent/IT1034386B/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/10—Ion sources; Ion guns
    • H01J49/14—Ion sources; Ion guns using particle bombardment, e.g. ionisation chambers
    • H01J49/142—Ion sources; Ion guns using particle bombardment, e.g. ionisation chambers using a solid target which is not previously vapourised
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/004—Combinations of spectrometers, tandem spectrometers, e.g. MS/MS, MSn
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/26—Mass spectrometers or separator tubes
    • H01J49/34—Dynamic spectrometers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/44—Energy spectrometers, e.g. alpha-, beta-spectrometers
    • H01J49/46—Static spectrometers
    • H01J49/48—Static spectrometers using electrostatic analysers, e.g. cylindrical sector, Wien filter
IT2138775A 1974-03-25 1975-03-18 PARTICLE OPTICS APPARATUS FOR THE SPECTROMETRIC ANALYSIS OF ION AND MASS DISPERSIONS OF SECONDARY IONS IT1034386B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19742414221 DE2414221C3 (en) 1974-03-25 1974-03-25 Ion-optical device for examining the surface of a sample by ion bombardment and analyzing the ions emanating from the bombarded surface area

Publications (1)

Publication Number Publication Date
IT1034386B true IT1034386B (en) 1979-09-10

Family

ID=5911045

Family Applications (1)

Application Number Title Priority Date Filing Date
IT2138775A IT1034386B (en) 1974-03-25 1975-03-18 PARTICLE OPTICS APPARATUS FOR THE SPECTROMETRIC ANALYSIS OF ION AND MASS DISPERSIONS OF SECONDARY IONS

Country Status (8)

Country Link
JP (1) JPS5199094A (en)
BE (1) BE826966A (en)
DE (1) DE2414221C3 (en)
DK (1) DK144898C (en)
FR (1) FR2266166B3 (en)
GB (1) GB1445963A (en)
IT (1) IT1034386B (en)
NL (1) NL7503567A (en)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4058724A (en) * 1975-06-27 1977-11-15 Minnesota Mining And Manufacturing Company Ion Scattering spectrometer with two analyzers preferably in tandem
DE2556291C3 (en) * 1975-12-13 1980-11-27 Gesellschaft Fuer Strahlen- Und Umweltforschung Mbh, 8000 Muenchen Scanning ion microscope
GB2098797B (en) * 1980-05-12 1985-01-16 Univ Trobe Angular resolved spectrometer
JPH083988B2 (en) * 1986-10-08 1996-01-17 株式会社日立製作所 Secondary ion mass spectrometry
JPH0589817A (en) * 1991-03-16 1993-04-09 Eiko Eng:Kk Complex analysis device

Also Published As

Publication number Publication date
DK122675A (en) 1975-09-26
DE2414221B2 (en) 1978-04-20
DK144898C (en) 1982-11-22
FR2266166B3 (en) 1977-12-02
JPS5199094A (en) 1976-09-01
NL7503567A (en) 1975-09-29
DE2414221A1 (en) 1975-10-09
FR2266166A1 (en) 1975-10-24
DE2414221C3 (en) 1979-01-18
GB1445963A (en) 1976-08-11
DK144898B (en) 1982-06-28
BE826966A (en) 1975-07-16

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