FR2266166B3 - - Google Patents

Info

Publication number
FR2266166B3
FR2266166B3 FR7509351A FR7509351A FR2266166B3 FR 2266166 B3 FR2266166 B3 FR 2266166B3 FR 7509351 A FR7509351 A FR 7509351A FR 7509351 A FR7509351 A FR 7509351A FR 2266166 B3 FR2266166 B3 FR 2266166B3
Authority
FR
France
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR7509351A
Other versions
FR2266166A1 (fr
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Max Planck Gesellschaft zur Foerderung der Wissenschaften eV
Original Assignee
Max Planck Gesellschaft zur Foerderung der Wissenschaften eV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Max Planck Gesellschaft zur Foerderung der Wissenschaften eV filed Critical Max Planck Gesellschaft zur Foerderung der Wissenschaften eV
Publication of FR2266166A1 publication Critical patent/FR2266166A1/fr
Application granted granted Critical
Publication of FR2266166B3 publication Critical patent/FR2266166B3/fr
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/10—Ion sources; Ion guns
    • H01J49/14—Ion sources; Ion guns using particle bombardment, e.g. ionisation chambers
    • H01J49/142—Ion sources; Ion guns using particle bombardment, e.g. ionisation chambers using a solid target which is not previously vapourised
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/004—Combinations of spectrometers, tandem spectrometers, e.g. MS/MS, MSn
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/26—Mass spectrometers or separator tubes
    • H01J49/34—Dynamic spectrometers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/44—Energy spectrometers, e.g. alpha-, beta-spectrometers
    • H01J49/46—Static spectrometers
    • H01J49/48—Static spectrometers using electrostatic analysers, e.g. cylindrical sector, Wien filter

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
  • Electron Tubes For Measurement (AREA)
FR7509351A 1974-03-25 1975-03-25 Expired FR2266166B3 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19742414221 DE2414221C3 (de) 1974-03-25 1974-03-25 Ionenoptisches Gerät zur Untersuchung der Oberfläche einer Probe durch IonenbeschuB und Analyse der vom beschossenen Oberflächenbereich ausgehenden Ionen

Publications (2)

Publication Number Publication Date
FR2266166A1 FR2266166A1 (fr) 1975-10-24
FR2266166B3 true FR2266166B3 (fr) 1977-12-02

Family

ID=5911045

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7509351A Expired FR2266166B3 (fr) 1974-03-25 1975-03-25

Country Status (8)

Country Link
JP (1) JPS5199094A (fr)
BE (1) BE826966A (fr)
DE (1) DE2414221C3 (fr)
DK (1) DK144898C (fr)
FR (1) FR2266166B3 (fr)
GB (1) GB1445963A (fr)
IT (1) IT1034386B (fr)
NL (1) NL7503567A (fr)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4058724A (en) * 1975-06-27 1977-11-15 Minnesota Mining And Manufacturing Company Ion Scattering spectrometer with two analyzers preferably in tandem
DE2556291C3 (de) * 1975-12-13 1980-11-27 Gesellschaft Fuer Strahlen- Und Umweltforschung Mbh, 8000 Muenchen Raster-Ionenmikroskop
GB2098797B (en) * 1980-05-12 1985-01-16 Univ Trobe Angular resolved spectrometer
JPH083988B2 (ja) * 1986-10-08 1996-01-17 株式会社日立製作所 二次イオン質量分析方法
JPH0589817A (ja) * 1991-03-16 1993-04-09 Eiko Eng:Kk 複合分析装置

Also Published As

Publication number Publication date
GB1445963A (en) 1976-08-11
DE2414221A1 (de) 1975-10-09
NL7503567A (nl) 1975-09-29
DK122675A (fr) 1975-09-26
JPS5199094A (fr) 1976-09-01
IT1034386B (it) 1979-09-10
DK144898B (da) 1982-06-28
DK144898C (da) 1982-11-22
FR2266166A1 (fr) 1975-10-24
DE2414221B2 (de) 1978-04-20
BE826966A (fr) 1975-07-16
DE2414221C3 (de) 1979-01-18

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