JPS5199094A - - Google Patents

Info

Publication number
JPS5199094A
JPS5199094A JP50035998A JP3599875A JPS5199094A JP S5199094 A JPS5199094 A JP S5199094A JP 50035998 A JP50035998 A JP 50035998A JP 3599875 A JP3599875 A JP 3599875A JP S5199094 A JPS5199094 A JP S5199094A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP50035998A
Inventor
Hairanto Beruneru
Takuraua Edomunto
Guruntona Manfureeto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Max Planck Gesellschaft zur Foerderung der Wissenschaften eV
Original Assignee
Max Planck Gesellschaft zur Foerderung der Wissenschaften eV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Max Planck Gesellschaft zur Foerderung der Wissenschaften eV filed Critical Max Planck Gesellschaft zur Foerderung der Wissenschaften eV
Publication of JPS5199094A publication Critical patent/JPS5199094A/ja
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/10—Ion sources; Ion guns
    • H01J49/14—Ion sources; Ion guns using particle bombardment, e.g. ionisation chambers
    • H01J49/142—Ion sources; Ion guns using particle bombardment, e.g. ionisation chambers using a solid target which is not previously vapourised
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/004—Combinations of spectrometers, tandem spectrometers, e.g. MS/MS, MSn
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/26—Mass spectrometers or separator tubes
    • H01J49/34—Dynamic spectrometers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/44—Energy spectrometers, e.g. alpha-, beta-spectrometers
    • H01J49/46—Static spectrometers
    • H01J49/48—Static spectrometers using electrostatic analysers, e.g. cylindrical sector, Wien filter

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
  • Electron Tubes For Measurement (AREA)
JP50035998A 1974-03-25 1975-03-24 Pending JPS5199094A (ja)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19742414221 DE2414221C3 (de) 1974-03-25 1974-03-25 Ionenoptisches Gerät zur Untersuchung der Oberfläche einer Probe durch IonenbeschuB und Analyse der vom beschossenen Oberflächenbereich ausgehenden Ionen

Publications (1)

Publication Number Publication Date
JPS5199094A true JPS5199094A (ja) 1976-09-01

Family

ID=5911045

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50035998A Pending JPS5199094A (ja) 1974-03-25 1975-03-24

Country Status (8)

Country Link
JP (1) JPS5199094A (ja)
BE (1) BE826966A (ja)
DE (1) DE2414221C3 (ja)
DK (1) DK144898C (ja)
FR (1) FR2266166B3 (ja)
GB (1) GB1445963A (ja)
IT (1) IT1034386B (ja)
NL (1) NL7503567A (ja)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6394140A (ja) * 1986-10-08 1988-04-25 Hitachi Ltd 二次イオン質量分析方法
JPH0589817A (ja) * 1991-03-16 1993-04-09 Eiko Eng:Kk 複合分析装置

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4058724A (en) * 1975-06-27 1977-11-15 Minnesota Mining And Manufacturing Company Ion Scattering spectrometer with two analyzers preferably in tandem
DE2556291C3 (de) * 1975-12-13 1980-11-27 Gesellschaft Fuer Strahlen- Und Umweltforschung Mbh, 8000 Muenchen Raster-Ionenmikroskop
WO1981003395A1 (en) * 1980-05-12 1981-11-26 Univ Trobe Angular resolved spectrometer

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6394140A (ja) * 1986-10-08 1988-04-25 Hitachi Ltd 二次イオン質量分析方法
JPH0589817A (ja) * 1991-03-16 1993-04-09 Eiko Eng:Kk 複合分析装置

Also Published As

Publication number Publication date
DE2414221C3 (de) 1979-01-18
GB1445963A (en) 1976-08-11
DK122675A (ja) 1975-09-26
IT1034386B (it) 1979-09-10
DK144898C (da) 1982-11-22
NL7503567A (nl) 1975-09-29
FR2266166A1 (ja) 1975-10-24
BE826966A (fr) 1975-07-16
DE2414221B2 (de) 1978-04-20
FR2266166B3 (ja) 1977-12-02
DE2414221A1 (de) 1975-10-09
DK144898B (da) 1982-06-28

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